ViennaPS 3.6.0__cp312-cp312-macosx_11_0_arm64.whl → 4.1.0__cp312-cp312-macosx_11_0_arm64.whl

viennaps/_core/__init__.pyi

@@ -0,0 +1,1154 @@
+"""
+ViennaPS is a header-only C++ process simulation library which includes surface and volume representations, a ray tracer, and physical models for the simulation of microelectronic fabrication processes. The main design goals are simplicity and efficiency, tailored towards scientific simulations.
+"""
+
+from __future__ import annotations
+import collections.abc
+import enum
+import typing
+import viennals._core
+from viennaps import d2
+import viennaps.d2
+from viennaps import d3
+import viennaps.d3
+from . import constants
+from . import gpu
+from . import util
+
+__all__: list[str] = [
+    "AdvectionParameters",
+    "AtomicLayerProcessParameters",
+    "CF4O2Parameters",
+    "CF4O2ParametersIons",
+    "CF4O2ParametersMask",
+    "CF4O2ParametersPassivation",
+    "CF4O2ParametersSi",
+    "CF4O2ParametersSiGe",
+    "CoverageParameters",
+    "Extrude",
+    "FaradayCageParameters",
+    "FluorocarbonMaterialParameters",
+    "FluorocarbonParameters",
+    "FluorocarbonParametersIons",
+    "FluxEngineType",
+    "HoleShape",
+    "IBEParameters",
+    "IBEParametersCos4Yield",
+    "Length",
+    "LengthUnit",
+    "Logger",
+    "Material",
+    "MaterialMap",
+    "MetaDataLevel",
+    "NormalizationType",
+    "PlasmaEtchingParameters",
+    "PlasmaEtchingParametersIons",
+    "PlasmaEtchingParametersMask",
+    "PlasmaEtchingParametersPassivation",
+    "PlasmaEtchingParametersPolymer",
+    "PlasmaEtchingParametersSubstrate",
+    "ProcessParams",
+    "RateSet",
+    "RayTracingParameters",
+    "Slice",
+    "Time",
+    "TimeUnit",
+    "constants",
+    "d2",
+    "d3",
+    "gpu",
+    "gpuAvailable",
+    "setNumThreads",
+    "util",
+    "version",
+]
+
+class AdvectionParameters:
+    checkDissipation: bool
+    ignoreVoids: bool
+    integrationScheme: viennals._core.IntegrationSchemeEnum
+    velocityOutput: bool
+    def __init__(self) -> None: ...
+    def toMetaData(self) -> dict[str, list[float]]:
+        """
+        Convert the advection parameters to a metadata dict.
+        """
+
+    def toMetaDataString(self) -> str:
+        """
+        Convert the advection parameters to a metadata string.
+        """
+
+    @property
+    def dissipationAlpha(self) -> float: ...
+    @dissipationAlpha.setter
+    def dissipationAlpha(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def timeStepRatio(self) -> float: ...
+    @timeStepRatio.setter
+    def timeStepRatio(self, arg0: typing.SupportsFloat) -> None: ...
+
+class AtomicLayerProcessParameters:
+    def __init__(self) -> None: ...
+    def toMetaData(self) -> dict[str, list[float]]:
+        """
+        Convert the ALD process parameters to a metadata dict.
+        """
+
+    def toMetaDataString(self) -> str:
+        """
+        Convert the ALD process parameters to a metadata string.
+        """
+
+    @property
+    def coverageTimeStep(self) -> float: ...
+    @coverageTimeStep.setter
+    def coverageTimeStep(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def numCycles(self) -> int: ...
+    @numCycles.setter
+    def numCycles(self, arg0: typing.SupportsInt) -> None: ...
+    @property
+    def pulseTime(self) -> float: ...
+    @pulseTime.setter
+    def pulseTime(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def purgePulseTime(self) -> float: ...
+    @purgePulseTime.setter
+    def purgePulseTime(self, arg0: typing.SupportsFloat) -> None: ...
+
+class CF4O2Parameters:
+    Ions: CF4O2ParametersIons
+    Mask: CF4O2ParametersMask
+    Passivation: CF4O2ParametersPassivation
+    Si: CF4O2ParametersSi
+    SiGe: CF4O2ParametersSiGe
+    fluxIncludeSticking: bool
+    def __init__(self) -> None: ...
+    @property
+    def etchStopDepth(self) -> float: ...
+    @etchStopDepth.setter
+    def etchStopDepth(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def etchantFlux(self) -> float: ...
+    @etchantFlux.setter
+    def etchantFlux(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def gamma_C(self) -> dict[Material, float]: ...
+    @gamma_C.setter
+    def gamma_C(
+        self, arg0: collections.abc.Mapping[Material, typing.SupportsFloat]
+    ) -> None: ...
+    @property
+    def gamma_C_oxidized(self) -> dict[Material, float]: ...
+    @gamma_C_oxidized.setter
+    def gamma_C_oxidized(
+        self, arg0: collections.abc.Mapping[Material, typing.SupportsFloat]
+    ) -> None: ...
+    @property
+    def gamma_F(self) -> dict[Material, float]: ...
+    @gamma_F.setter
+    def gamma_F(
+        self, arg0: collections.abc.Mapping[Material, typing.SupportsFloat]
+    ) -> None: ...
+    @property
+    def gamma_F_oxidized(self) -> dict[Material, float]: ...
+    @gamma_F_oxidized.setter
+    def gamma_F_oxidized(
+        self, arg0: collections.abc.Mapping[Material, typing.SupportsFloat]
+    ) -> None: ...
+    @property
+    def gamma_O(self) -> dict[Material, float]: ...
+    @gamma_O.setter
+    def gamma_O(
+        self, arg0: collections.abc.Mapping[Material, typing.SupportsFloat]
+    ) -> None: ...
+    @property
+    def gamma_O_passivated(self) -> dict[Material, float]: ...
+    @gamma_O_passivated.setter
+    def gamma_O_passivated(
+        self, arg0: collections.abc.Mapping[Material, typing.SupportsFloat]
+    ) -> None: ...
+    @property
+    def ionFlux(self) -> float: ...
+    @ionFlux.setter
+    def ionFlux(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def oxygenFlux(self) -> float: ...
+    @oxygenFlux.setter
+    def oxygenFlux(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def polymerFlux(self) -> float: ...
+    @polymerFlux.setter
+    def polymerFlux(self, arg0: typing.SupportsFloat) -> None: ...
+
+class CF4O2ParametersIons:
+    def __init__(self) -> None: ...
+    @property
+    def exponent(self) -> float: ...
+    @exponent.setter
+    def exponent(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def inflectAngle(self) -> float: ...
+    @inflectAngle.setter
+    def inflectAngle(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def meanEnergy(self) -> float: ...
+    @meanEnergy.setter
+    def meanEnergy(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def minAngle(self) -> float: ...
+    @minAngle.setter
+    def minAngle(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def n_l(self) -> float: ...
+    @n_l.setter
+    def n_l(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def sigmaEnergy(self) -> float: ...
+    @sigmaEnergy.setter
+    def sigmaEnergy(self, arg0: typing.SupportsFloat) -> None: ...
+
+class CF4O2ParametersMask:
+    def __init__(self) -> None: ...
+    @property
+    def A_sp(self) -> float: ...
+    @A_sp.setter
+    def A_sp(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def Eth_sp(self) -> float: ...
+    @Eth_sp.setter
+    def Eth_sp(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def rho(self) -> float: ...
+    @rho.setter
+    def rho(self, arg0: typing.SupportsFloat) -> None: ...
+
+class CF4O2ParametersPassivation:
+    def __init__(self) -> None: ...
+    @property
+    def A_C_ie(self) -> float: ...
+    @A_C_ie.setter
+    def A_C_ie(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def A_O_ie(self) -> float: ...
+    @A_O_ie.setter
+    def A_O_ie(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def Eth_C_ie(self) -> float: ...
+    @Eth_C_ie.setter
+    def Eth_C_ie(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def Eth_O_ie(self) -> float: ...
+    @Eth_O_ie.setter
+    def Eth_O_ie(self, arg0: typing.SupportsFloat) -> None: ...
+
+class CF4O2ParametersSi:
+    def __init__(self) -> None: ...
+    @property
+    def A_ie(self) -> float: ...
+    @A_ie.setter
+    def A_ie(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def A_sp(self) -> float: ...
+    @A_sp.setter
+    def A_sp(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def Eth_ie(self) -> float: ...
+    @Eth_ie.setter
+    def Eth_ie(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def Eth_sp(self) -> float: ...
+    @Eth_sp.setter
+    def Eth_sp(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def beta_sigma(self) -> float: ...
+    @beta_sigma.setter
+    def beta_sigma(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def k_sigma(self) -> float: ...
+    @k_sigma.setter
+    def k_sigma(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def rho(self) -> float: ...
+    @rho.setter
+    def rho(self, arg0: typing.SupportsFloat) -> None: ...
+
+class CF4O2ParametersSiGe:
+    def __init__(self) -> None: ...
+    def k_sigma_SiGe(self, arg0: typing.SupportsFloat) -> float: ...
+    @property
+    def A_ie(self) -> float: ...
+    @A_ie.setter
+    def A_ie(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def A_sp(self) -> float: ...
+    @A_sp.setter
+    def A_sp(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def Eth_ie(self) -> float: ...
+    @Eth_ie.setter
+    def Eth_ie(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def Eth_sp(self) -> float: ...
+    @Eth_sp.setter
+    def Eth_sp(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def beta_sigma(self) -> float: ...
+    @beta_sigma.setter
+    def beta_sigma(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def k_sigma(self) -> float: ...
+    @k_sigma.setter
+    def k_sigma(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def rho(self) -> float: ...
+    @rho.setter
+    def rho(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def x(self) -> float: ...
+    @x.setter
+    def x(self, arg0: typing.SupportsFloat) -> None: ...
+
+class CoverageParameters:
+    def __init__(self) -> None: ...
+    def toMetaData(self) -> dict[str, list[float]]:
+        """
+        Convert the coverage parameters to a metadata dict.
+        """
+
+    def toMetaDataString(self) -> str:
+        """
+        Convert the coverage parameters to a metadata string.
+        """
+
+    @property
+    def maxIterations(self) -> int: ...
+    @maxIterations.setter
+    def maxIterations(self, arg0: typing.SupportsInt) -> None: ...
+    @property
+    def tolerance(self) -> float: ...
+    @tolerance.setter
+    def tolerance(self, arg0: typing.SupportsFloat) -> None: ...
+
+class Extrude:
+    @typing.overload
+    def __init__(self) -> None: ...
+    @typing.overload
+    def __init__(
+        self,
+        inputDomain: viennaps.d2.Domain,
+        outputDomain: viennaps.d3.Domain,
+        extent: typing.Annotated[
+            collections.abc.Sequence[typing.SupportsFloat], "FixedSize(2)"
+        ],
+        extrusionAxis: typing.SupportsInt,
+        boundaryConditions: typing.Annotated[
+            collections.abc.Sequence[viennals._core.BoundaryConditionEnum],
+            "FixedSize(3)",
+        ],
+    ) -> None: ...
+    def apply(self) -> None:
+        """
+        Run the extrusion.
+        """
+
+    def setBoundaryConditions(
+        self,
+        arg0: typing.Annotated[
+            collections.abc.Sequence[viennals._core.BoundaryConditionEnum],
+            "FixedSize(3)",
+        ],
+    ) -> None:
+        """
+        Set the boundary conditions in the extruded domain.
+        """
+
+    def setExtent(
+        self,
+        arg0: typing.Annotated[
+            collections.abc.Sequence[typing.SupportsFloat], "FixedSize(2)"
+        ],
+    ) -> None:
+        """
+        Set the min and max extent in the extruded dimension.
+        """
+
+    def setExtrusionAxis(self, arg0: typing.SupportsInt) -> None:
+        """
+        Set the axis along which to extrude (0, 1, or 2).
+        """
+
+    def setInputDomain(self, arg0: viennaps.d2.Domain) -> None:
+        """
+        Set the input domain to be extruded.
+        """
+
+    def setOutputDomain(self, arg0: viennaps.d3.Domain) -> None:
+        """
+        Set the output domain. The 3D output domain will be overwritten by the extruded domain.
+        """
+
+class FaradayCageParameters:
+    ibeParams: IBEParameters
+    def __init__(self) -> None: ...
+    @property
+    def cageAngle(self) -> float: ...
+    @cageAngle.setter
+    def cageAngle(self, arg0: typing.SupportsFloat) -> None: ...
+
+class FluorocarbonMaterialParameters:
+    id: Material
+    def __init__(self) -> None: ...
+    @property
+    def A_ie(self) -> float: ...
+    @A_ie.setter
+    def A_ie(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def A_sp(self) -> float: ...
+    @A_sp.setter
+    def A_sp(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def B_sp(self) -> float: ...
+    @B_sp.setter
+    def B_sp(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def E_a(self) -> float: ...
+    @E_a.setter
+    def E_a(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def Eth_ie(self) -> float: ...
+    @Eth_ie.setter
+    def Eth_ie(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def Eth_sp(self) -> float: ...
+    @Eth_sp.setter
+    def Eth_sp(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def K(self) -> float: ...
+    @K.setter
+    def K(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def beta_e(self) -> float: ...
+    @beta_e.setter
+    def beta_e(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def beta_p(self) -> float: ...
+    @beta_p.setter
+    def beta_p(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def density(self) -> float: ...
+    @density.setter
+    def density(self, arg0: typing.SupportsFloat) -> None: ...
+
+class FluorocarbonParameters:
+    Ions: FluorocarbonParametersIons
+    def __init__(self) -> None: ...
+    def addMaterial(
+        self, materialParameters: FluorocarbonMaterialParameters
+    ) -> None: ...
+    def getMaterialParameters(
+        self, material: Material
+    ) -> FluorocarbonMaterialParameters: ...
+    @property
+    def delta_p(self) -> float: ...
+    @delta_p.setter
+    def delta_p(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def etchStopDepth(self) -> float: ...
+    @etchStopDepth.setter
+    def etchStopDepth(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def etchantFlux(self) -> float: ...
+    @etchantFlux.setter
+    def etchantFlux(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def ionFlux(self) -> float: ...
+    @ionFlux.setter
+    def ionFlux(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def k_ev(self) -> float: ...
+    @k_ev.setter
+    def k_ev(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def k_ie(self) -> float: ...
+    @k_ie.setter
+    def k_ie(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def polyFlux(self) -> float: ...
+    @polyFlux.setter
+    def polyFlux(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def temperature(self) -> float: ...
+    @temperature.setter
+    def temperature(self, arg0: typing.SupportsFloat) -> None: ...
+
+class FluorocarbonParametersIons:
+    def __init__(self) -> None: ...
+    @property
+    def exponent(self) -> float: ...
+    @exponent.setter
+    def exponent(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def inflectAngle(self) -> float: ...
+    @inflectAngle.setter
+    def inflectAngle(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def meanEnergy(self) -> float: ...
+    @meanEnergy.setter
+    def meanEnergy(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def minAngle(self) -> float: ...
+    @minAngle.setter
+    def minAngle(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def n_l(self) -> float: ...
+    @n_l.setter
+    def n_l(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def sigmaEnergy(self) -> float: ...
+    @sigmaEnergy.setter
+    def sigmaEnergy(self, arg0: typing.SupportsFloat) -> None: ...
+
+class FluxEngineType(enum.IntEnum):
+    AUTO: typing.ClassVar[FluxEngineType]  # value = <FluxEngineType.AUTO: 0>
+    CPU_DISK: typing.ClassVar[FluxEngineType]  # value = <FluxEngineType.CPU_DISK: 1>
+    CPU_TRIANGLE: typing.ClassVar[
+        FluxEngineType
+    ]  # value = <FluxEngineType.CPU_TRIANGLE: 2>
+    GPU_DISK: typing.ClassVar[FluxEngineType]  # value = <FluxEngineType.GPU_DISK: 3>
+    GPU_LINE: typing.ClassVar[FluxEngineType]  # value = <FluxEngineType.GPU_LINE: 5>
+    GPU_TRIANGLE: typing.ClassVar[
+        FluxEngineType
+    ]  # value = <FluxEngineType.GPU_TRIANGLE: 4>
+    @classmethod
+    def __new__(cls, value): ...
+    def __format__(self, format_spec):
+        """
+        Convert to a string according to format_spec.
+        """
+
+class HoleShape(enum.IntEnum):
+    FULL: typing.ClassVar[HoleShape]  # value = <HoleShape.FULL: 0>
+    HALF: typing.ClassVar[HoleShape]  # value = <HoleShape.HALF: 1>
+    QUARTER: typing.ClassVar[HoleShape]  # value = <HoleShape.QUARTER: 2>
+    @classmethod
+    def __new__(cls, value): ...
+    def __format__(self, format_spec):
+        """
+        Convert to a string according to format_spec.
+        """
+
+class IBEParameters:
+    cos4Yield: IBEParametersCos4Yield
+    def __init__(self) -> None: ...
+    def toProcessMetaData(self) -> dict[str, list[float]]:
+        """
+        Convert the IBE parameters to a metadata dict.
+        """
+
+    @property
+    def exponent(self) -> float: ...
+    @exponent.setter
+    def exponent(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def inflectAngle(self) -> float: ...
+    @inflectAngle.setter
+    def inflectAngle(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def materialPlaneWaferRate(self) -> dict[Material, float]: ...
+    @materialPlaneWaferRate.setter
+    def materialPlaneWaferRate(
+        self, arg0: collections.abc.Mapping[Material, typing.SupportsFloat]
+    ) -> None: ...
+    @property
+    def meanEnergy(self) -> float: ...
+    @meanEnergy.setter
+    def meanEnergy(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def minAngle(self) -> float: ...
+    @minAngle.setter
+    def minAngle(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def n_l(self) -> float: ...
+    @n_l.setter
+    def n_l(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def planeWaferRate(self) -> float: ...
+    @planeWaferRate.setter
+    def planeWaferRate(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def redepositionRate(self) -> float: ...
+    @redepositionRate.setter
+    def redepositionRate(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def redepositionThreshold(self) -> float: ...
+    @redepositionThreshold.setter
+    def redepositionThreshold(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def sigmaEnergy(self) -> float: ...
+    @sigmaEnergy.setter
+    def sigmaEnergy(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def thetaRMax(self) -> float: ...
+    @thetaRMax.setter
+    def thetaRMax(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def thetaRMin(self) -> float: ...
+    @thetaRMin.setter
+    def thetaRMin(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def thresholdEnergy(self) -> float: ...
+    @thresholdEnergy.setter
+    def thresholdEnergy(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def tiltAngle(self) -> float: ...
+    @tiltAngle.setter
+    def tiltAngle(self, arg0: typing.SupportsFloat) -> None: ...
+
+class IBEParametersCos4Yield:
+    isDefined: bool
+    def __init__(self) -> None: ...
+    def aSum(self) -> float: ...
+    @property
+    def a1(self) -> float: ...
+    @a1.setter
+    def a1(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def a2(self) -> float: ...
+    @a2.setter
+    def a2(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def a3(self) -> float: ...
+    @a3.setter
+    def a3(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def a4(self) -> float: ...
+    @a4.setter
+    def a4(self, arg0: typing.SupportsFloat) -> None: ...
+
+class Length:
+    @staticmethod
+    def convertAngstrom() -> float: ...
+    @staticmethod
+    def convertCentimeter() -> float: ...
+    @staticmethod
+    def convertMeter() -> float: ...
+    @staticmethod
+    def convertMicrometer() -> float: ...
+    @staticmethod
+    def convertMillimeter() -> float: ...
+    @staticmethod
+    def convertNanometer() -> float: ...
+    @staticmethod
+    def getInstance() -> Length: ...
+    @staticmethod
+    def setUnit(arg0: str) -> None: ...
+    @staticmethod
+    def toShortString() -> str: ...
+    @staticmethod
+    def toString() -> str: ...
+
+class LengthUnit(enum.IntEnum):
+    ANGSTROM: typing.ClassVar[LengthUnit]  # value = <LengthUnit.ANGSTROM: 5>
+    CENTIMETER: typing.ClassVar[LengthUnit]  # value = <LengthUnit.CENTIMETER: 1>
+    METER: typing.ClassVar[LengthUnit]  # value = <LengthUnit.METER: 0>
+    MICROMETER: typing.ClassVar[LengthUnit]  # value = <LengthUnit.MICROMETER: 3>
+    MILLIMETER: typing.ClassVar[LengthUnit]  # value = <LengthUnit.MILLIMETER: 2>
+    NANOMETER: typing.ClassVar[LengthUnit]  # value = <LengthUnit.NANOMETER: 4>
+    UNDEFINED: typing.ClassVar[LengthUnit]  # value = <LengthUnit.UNDEFINED: 6>
+    @classmethod
+    def __new__(cls, value): ...
+    def __format__(self, format_spec):
+        """
+        Convert to a string according to format_spec.
+        """
+
+class Logger:
+    @staticmethod
+    def appendToLogFile(arg0: str) -> bool: ...
+    @staticmethod
+    def closeLogFile() -> None: ...
+    @staticmethod
+    def getInstance() -> Logger: ...
+    @staticmethod
+    def getLogLevel() -> int: ...
+    @staticmethod
+    def setLogFile(arg0: str) -> bool: ...
+    @staticmethod
+    def setLogLevel(arg0: ...) -> None: ...
+    def addDebug(self, arg0: str) -> Logger: ...
+    def addError(self, s: str, shouldAbort: bool = True) -> Logger: ...
+    def addInfo(self, arg0: str) -> Logger: ...
+    @typing.overload
+    def addTiming(self, arg0: str, arg1: typing.SupportsFloat) -> Logger: ...
+    @typing.overload
+    def addTiming(
+        self, arg0: str, arg1: typing.SupportsFloat, arg2: typing.SupportsFloat
+    ) -> Logger: ...
+    def addWarning(self, arg0: str) -> Logger: ...
+    def print(self) -> None: ...
+
+class Material(enum.IntEnum):
+    """
+    Material types for domain and level sets
+    """
+
+    ARC: typing.ClassVar[Material]  # value = <Material.ARC: 57>
+    AZO: typing.ClassVar[Material]  # value = <Material.AZO: 152>
+    Air: typing.ClassVar[Material]  # value = <Material.Air: 2>
+    Al2O3: typing.ClassVar[Material]  # value = <Material.Al2O3: 31>
+    AlN: typing.ClassVar[Material]  # value = <Material.AlN: 37>
+    Au: typing.ClassVar[Material]  # value = <Material.Au: 91>
+    BN: typing.ClassVar[Material]  # value = <Material.BN: 39>
+    BPSG: typing.ClassVar[Material]  # value = <Material.BPSG: 54>
+    C: typing.ClassVar[Material]  # value = <Material.C: 50>
+    Co: typing.ClassVar[Material]  # value = <Material.Co: 72>
+    CoW: typing.ClassVar[Material]  # value = <Material.CoW: 85>
+    Cr: typing.ClassVar[Material]  # value = <Material.Cr: 92>
+    Cu: typing.ClassVar[Material]  # value = <Material.Cu: 71>
+    Dielectric: typing.ClassVar[Material]  # value = <Material.Dielectric: 4>
+    GAS: typing.ClassVar[Material]  # value = <Material.GAS: 3>
+    GST: typing.ClassVar[Material]  # value = <Material.GST: 135>
+    GaAs: typing.ClassVar[Material]  # value = <Material.GaAs: 112>
+    GaN: typing.ClassVar[Material]  # value = <Material.GaN: 111>
+    Ge: typing.ClassVar[Material]  # value = <Material.Ge: 110>
+    Graphene: typing.ClassVar[Material]  # value = <Material.Graphene: 130>
+    HSQ: typing.ClassVar[Material]  # value = <Material.HSQ: 60>
+    HfO2: typing.ClassVar[Material]  # value = <Material.HfO2: 32>
+    ITO: typing.ClassVar[Material]  # value = <Material.ITO: 150>
+    InGaAs: typing.ClassVar[Material]  # value = <Material.InGaAs: 114>
+    InP: typing.ClassVar[Material]  # value = <Material.InP: 113>
+    Ir: typing.ClassVar[Material]  # value = <Material.Ir: 81>
+    La2O3: typing.ClassVar[Material]  # value = <Material.La2O3: 36>
+    Mask: typing.ClassVar[Material]  # value = <Material.Mask: 0>
+    Metal: typing.ClassVar[Material]  # value = <Material.Metal: 5>
+    Mn: typing.ClassVar[Material]  # value = <Material.Mn: 88>
+    MnN: typing.ClassVar[Material]  # value = <Material.MnN: 90>
+    MnO: typing.ClassVar[Material]  # value = <Material.MnO: 89>
+    Mo: typing.ClassVar[Material]  # value = <Material.Mo: 80>
+    MoS2: typing.ClassVar[Material]  # value = <Material.MoS2: 131>
+    MoSi2: typing.ClassVar[Material]  # value = <Material.MoSi2: 102>
+    Ni: typing.ClassVar[Material]  # value = <Material.Ni: 74>
+    NiW: typing.ClassVar[Material]  # value = <Material.NiW: 86>
+    PHS: typing.ClassVar[Material]  # value = <Material.PHS: 59>
+    PMMA: typing.ClassVar[Material]  # value = <Material.PMMA: 58>
+    PSG: typing.ClassVar[Material]  # value = <Material.PSG: 55>
+    Pd: typing.ClassVar[Material]  # value = <Material.Pd: 83>
+    PolySi: typing.ClassVar[Material]  # value = <Material.PolySi: 11>
+    Polymer: typing.ClassVar[Material]  # value = <Material.Polymer: 1>
+    Pt: typing.ClassVar[Material]  # value = <Material.Pt: 75>
+    Rh: typing.ClassVar[Material]  # value = <Material.Rh: 82>
+    Ru: typing.ClassVar[Material]  # value = <Material.Ru: 73>
+    RuTa: typing.ClassVar[Material]  # value = <Material.RuTa: 84>
+    SOC: typing.ClassVar[Material]  # value = <Material.SOC: 52>
+    SOG: typing.ClassVar[Material]  # value = <Material.SOG: 53>
+    Si: typing.ClassVar[Material]  # value = <Material.Si: 10>
+    Si3N4: typing.ClassVar[Material]  # value = <Material.Si3N4: 16>
+    SiBCN: typing.ClassVar[Material]  # value = <Material.SiBCN: 19>
+    SiC: typing.ClassVar[Material]  # value = <Material.SiC: 14>
+    SiCN: typing.ClassVar[Material]  # value = <Material.SiCN: 18>
+    SiCOH: typing.ClassVar[Material]  # value = <Material.SiCOH: 20>
+    SiC_HM: typing.ClassVar[Material]  # value = <Material.SiC_HM: 172>
+    SiGaN: typing.ClassVar[Material]  # value = <Material.SiGaN: 115>
+    SiGe: typing.ClassVar[Material]  # value = <Material.SiGe: 13>
+    SiLK: typing.ClassVar[Material]  # value = <Material.SiLK: 56>
+    SiN: typing.ClassVar[Material]  # value = <Material.SiN: 15>
+    SiN_HM: typing.ClassVar[Material]  # value = <Material.SiN_HM: 171>
+    SiO2: typing.ClassVar[Material]  # value = <Material.SiO2: 30>
+    SiO2_HM: typing.ClassVar[Material]  # value = <Material.SiO2_HM: 175>
+    SiOCH: typing.ClassVar[Material]  # value = <Material.SiOCH: 116>
+    SiOCN: typing.ClassVar[Material]  # value = <Material.SiOCN: 21>
+    SiON: typing.ClassVar[Material]  # value = <Material.SiON: 17>
+    SiON_HM: typing.ClassVar[Material]  # value = <Material.SiON_HM: 170>
+    Ta: typing.ClassVar[Material]  # value = <Material.Ta: 76>
+    Ta2O5: typing.ClassVar[Material]  # value = <Material.Ta2O5: 38>
+    TaN: typing.ClassVar[Material]  # value = <Material.TaN: 77>
+    Ti: typing.ClassVar[Material]  # value = <Material.Ti: 78>
+    TiAlN: typing.ClassVar[Material]  # value = <Material.TiAlN: 87>
+    TiN: typing.ClassVar[Material]  # value = <Material.TiN: 79>
+    TiO: typing.ClassVar[Material]  # value = <Material.TiO: 173>
+    TiO2: typing.ClassVar[Material]  # value = <Material.TiO2: 34>
+    TiSi2: typing.ClassVar[Material]  # value = <Material.TiSi2: 101>
+    Undefined: typing.ClassVar[Material]  # value = <Material.Undefined: 6>
+    VO2: typing.ClassVar[Material]  # value = <Material.VO2: 134>
+    W: typing.ClassVar[Material]  # value = <Material.W: 70>
+    WS2: typing.ClassVar[Material]  # value = <Material.WS2: 132>
+    WSe2: typing.ClassVar[Material]  # value = <Material.WSe2: 133>
+    WSi2: typing.ClassVar[Material]  # value = <Material.WSi2: 100>
+    Y2O3: typing.ClassVar[Material]  # value = <Material.Y2O3: 35>
+    ZnO: typing.ClassVar[Material]  # value = <Material.ZnO: 151>
+    ZrO: typing.ClassVar[Material]  # value = <Material.ZrO: 174>
+    ZrO2: typing.ClassVar[Material]  # value = <Material.ZrO2: 33>
+    aC: typing.ClassVar[Material]  # value = <Material.aC: 51>
+    aSi: typing.ClassVar[Material]  # value = <Material.aSi: 12>
+    hBN: typing.ClassVar[Material]  # value = <Material.hBN: 40>
+    @classmethod
+    def __new__(cls, value): ...
+    def __format__(self, format_spec):
+        """
+        Convert to a string according to format_spec.
+        """
+
+class MaterialMap:
+    @staticmethod
+    def isMaterial(arg0: typing.SupportsFloat, arg1: Material) -> bool: ...
+    @staticmethod
+    def mapToMaterial(arg0: typing.SupportsFloat) -> Material:
+        """
+        Map a float to a material.
+        """
+
+    @staticmethod
+    def toString(arg0: Material) -> str:
+        """
+        Get the name of a material.
+        """
+
+    def __init__(self) -> None: ...
+    def getMaterialAtIdx(self, arg0: typing.SupportsInt) -> Material: ...
+    def getMaterialMap(self) -> viennals._core.MaterialMap: ...
+    def insertNextMaterial(self, material: Material = ...) -> None: ...
+    def size(self) -> int: ...
+
+class MetaDataLevel(enum.IntEnum):
+    FULL: typing.ClassVar[MetaDataLevel]  # value = <MetaDataLevel.FULL: 3>
+    GRID: typing.ClassVar[MetaDataLevel]  # value = <MetaDataLevel.GRID: 1>
+    NONE: typing.ClassVar[MetaDataLevel]  # value = <MetaDataLevel.NONE: 0>
+    PROCESS: typing.ClassVar[MetaDataLevel]  # value = <MetaDataLevel.PROCESS: 2>
+    @classmethod
+    def __new__(cls, value): ...
+    def __format__(self, format_spec):
+        """
+        Convert to a string according to format_spec.
+        """
+
+class NormalizationType(enum.IntEnum):
+    MAX: typing.ClassVar[NormalizationType]  # value = <NormalizationType.MAX: 1>
+    SOURCE: typing.ClassVar[NormalizationType]  # value = <NormalizationType.SOURCE: 0>
+    @classmethod
+    def __new__(cls, value): ...
+    def __format__(self, format_spec):
+        """
+        Convert to a string according to format_spec.
+        """
+
+class PlasmaEtchingParameters:
+    Ions: PlasmaEtchingParametersIons
+    Mask: PlasmaEtchingParametersMask
+    Passivation: PlasmaEtchingParametersPassivation
+    Substrate: PlasmaEtchingParametersSubstrate
+    def __init__(self) -> None: ...
+    @property
+    def beta_E(self) -> dict[int, float]: ...
+    @beta_E.setter
+    def beta_E(
+        self, arg0: collections.abc.Mapping[typing.SupportsInt, typing.SupportsFloat]
+    ) -> None: ...
+    @property
+    def beta_P(self) -> dict[int, float]: ...
+    @beta_P.setter
+    def beta_P(
+        self, arg0: collections.abc.Mapping[typing.SupportsInt, typing.SupportsFloat]
+    ) -> None: ...
+    @property
+    def etchStopDepth(self) -> float: ...
+    @etchStopDepth.setter
+    def etchStopDepth(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def etchantFlux(self) -> float: ...
+    @etchantFlux.setter
+    def etchantFlux(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def ionFlux(self) -> float: ...
+    @ionFlux.setter
+    def ionFlux(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def passivationFlux(self) -> float: ...
+    @passivationFlux.setter
+    def passivationFlux(self, arg0: typing.SupportsFloat) -> None: ...
+
+class PlasmaEtchingParametersIons:
+    def __init__(self) -> None: ...
+    @property
+    def exponent(self) -> float: ...
+    @exponent.setter
+    def exponent(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def inflectAngle(self) -> float: ...
+    @inflectAngle.setter
+    def inflectAngle(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def meanEnergy(self) -> float: ...
+    @meanEnergy.setter
+    def meanEnergy(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def minAngle(self) -> float: ...
+    @minAngle.setter
+    def minAngle(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def n_l(self) -> float: ...
+    @n_l.setter
+    def n_l(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def sigmaEnergy(self) -> float: ...
+    @sigmaEnergy.setter
+    def sigmaEnergy(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def thetaRMax(self) -> float: ...
+    @thetaRMax.setter
+    def thetaRMax(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def thetaRMin(self) -> float: ...
+    @thetaRMin.setter
+    def thetaRMin(self, arg0: typing.SupportsFloat) -> None: ...
+
+class PlasmaEtchingParametersMask:
+    def __init__(self) -> None: ...
+    @property
+    def A_sp(self) -> float: ...
+    @A_sp.setter
+    def A_sp(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def B_sp(self) -> float: ...
+    @B_sp.setter
+    def B_sp(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def Eth_sp(self) -> float: ...
+    @Eth_sp.setter
+    def Eth_sp(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def rho(self) -> float: ...
+    @rho.setter
+    def rho(self, arg0: typing.SupportsFloat) -> None: ...
+
+class PlasmaEtchingParametersPassivation:
+    def __init__(self) -> None: ...
+    @property
+    def A_ie(self) -> float: ...
+    @A_ie.setter
+    def A_ie(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def Eth_ie(self) -> float: ...
+    @Eth_ie.setter
+    def Eth_ie(self, arg0: typing.SupportsFloat) -> None: ...
+
+class PlasmaEtchingParametersPolymer:
+    def __init__(self) -> None: ...
+    @property
+    def A_sp(self) -> float: ...
+    @A_sp.setter
+    def A_sp(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def B_sp(self) -> float: ...
+    @B_sp.setter
+    def B_sp(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def Eth_sp(self) -> float: ...
+    @Eth_sp.setter
+    def Eth_sp(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def rho(self) -> float: ...
+    @rho.setter
+    def rho(self, arg0: typing.SupportsFloat) -> None: ...
+
+class PlasmaEtchingParametersSubstrate:
+    def __init__(self) -> None: ...
+    @property
+    def A_ie(self) -> float: ...
+    @A_ie.setter
+    def A_ie(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def A_sp(self) -> float: ...
+    @A_sp.setter
+    def A_sp(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def B_ie(self) -> float: ...
+    @B_ie.setter
+    def B_ie(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def B_sp(self) -> float: ...
+    @B_sp.setter
+    def B_sp(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def Eth_ie(self) -> float: ...
+    @Eth_ie.setter
+    def Eth_ie(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def Eth_sp(self) -> float: ...
+    @Eth_sp.setter
+    def Eth_sp(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def beta_sigma(self) -> float: ...
+    @beta_sigma.setter
+    def beta_sigma(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def k_sigma(self) -> float: ...
+    @k_sigma.setter
+    def k_sigma(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def rho(self) -> float: ...
+    @rho.setter
+    def rho(self, arg0: typing.SupportsFloat) -> None: ...
+
+class ProcessParams:
+    def __init__(self) -> None: ...
+    @typing.overload
+    def getScalarData(self, arg0: typing.SupportsInt) -> float: ...
+    @typing.overload
+    def getScalarData(self, arg0: typing.SupportsInt) -> float: ...
+    @typing.overload
+    def getScalarData(self, arg0: str) -> float: ...
+    @typing.overload
+    def getScalarData(self) -> list[float]: ...
+    @typing.overload
+    def getScalarData(self) -> list[float]: ...
+    def getScalarDataIndex(self, arg0: str) -> int: ...
+    def getScalarDataLabel(self, arg0: typing.SupportsInt) -> str: ...
+    def insertNextScalar(self, arg0: typing.SupportsFloat, arg1: str) -> None: ...
+
+class RateSet:
+    calculateVisibility: bool
+    def __init__(
+        self,
+        direction: typing.Annotated[
+            collections.abc.Sequence[typing.SupportsFloat], "FixedSize(3)"
+        ] = [0.0, 0.0, 0.0],
+        directionalVelocity: typing.SupportsFloat = 0.0,
+        isotropicVelocity: typing.SupportsFloat = 0.0,
+        maskMaterials: collections.abc.Sequence[Material] = ...,
+        calculateVisibility: bool = True,
+    ) -> None: ...
+    def print(self) -> None: ...
+    @property
+    def direction(self) -> typing.Annotated[list[float], "FixedSize(3)"]: ...
+    @direction.setter
+    def direction(
+        self,
+        arg0: typing.Annotated[
+            collections.abc.Sequence[typing.SupportsFloat], "FixedSize(3)"
+        ],
+    ) -> None: ...
+    @property
+    def directionalVelocity(self) -> float: ...
+    @directionalVelocity.setter
+    def directionalVelocity(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def isotropicVelocity(self) -> float: ...
+    @isotropicVelocity.setter
+    def isotropicVelocity(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def maskMaterials(self) -> list[Material]: ...
+    @maskMaterials.setter
+    def maskMaterials(self, arg0: collections.abc.Sequence[Material]) -> None: ...
+
+class RayTracingParameters:
+    ignoreFluxBoundaries: bool
+    normalizationType: NormalizationType
+    useRandomSeeds: bool
+    def __init__(self) -> None: ...
+    def toMetaData(self) -> dict[str, list[float]]:
+        """
+        Convert the ray tracing parameters to a metadata dict.
+        """
+
+    def toMetaDataString(self) -> str:
+        """
+        Convert the ray tracing parameters to a metadata string.
+        """
+
+    @property
+    def diskRadius(self) -> float: ...
+    @diskRadius.setter
+    def diskRadius(self, arg0: typing.SupportsFloat) -> None: ...
+    @property
+    def raysPerPoint(self) -> int: ...
+    @raysPerPoint.setter
+    def raysPerPoint(self, arg0: typing.SupportsInt) -> None: ...
+    @property
+    def rngSeed(self) -> int: ...
+    @rngSeed.setter
+    def rngSeed(self, arg0: typing.SupportsInt) -> None: ...
+    @property
+    def smoothingNeighbors(self) -> int: ...
+    @smoothingNeighbors.setter
+    def smoothingNeighbors(self, arg0: typing.SupportsInt) -> None: ...
+
+class Slice:
+    @typing.overload
+    def __init__(self) -> None: ...
+    @typing.overload
+    def __init__(
+        self,
+        inputDomain: viennaps.d3.Domain,
+        outputDomain: viennaps.d2.Domain,
+        sliceDimension: typing.SupportsInt,
+        slicePosition: typing.SupportsFloat,
+    ) -> None: ...
+    def apply(self) -> None:
+        """
+        Run the slicing.
+        """
+
+    def setInputDomain(self, arg0: viennaps.d3.Domain) -> None:
+        """
+        Set the input domain to be sliced.
+        """
+
+    def setOutputDomain(self, arg0: viennaps.d2.Domain) -> None:
+        """
+        Set the output domain. The 2D output domain will be overwritten by the sliced domain.
+        """
+
+    def setReflectX(self, arg0: bool) -> None:
+        """
+        Set whether to reflect the slice along the X axis.
+        """
+
+    def setSliceDimension(self, arg0: typing.SupportsInt) -> None:
+        """
+        Set the dimension along which to slice (0, 1).
+        """
+
+    def setSlicePosition(self, arg0: typing.SupportsFloat) -> None:
+        """
+        Set the position along the slice dimension at which to slice.
+        """
+
+class Time:
+    @staticmethod
+    def convertMillisecond() -> float: ...
+    @staticmethod
+    def convertMinute() -> float: ...
+    @staticmethod
+    def convertSecond() -> float: ...
+    @staticmethod
+    def getInstance() -> Time: ...
+    @staticmethod
+    def setUnit(arg0: str) -> None: ...
+    @staticmethod
+    def toShortString() -> str: ...
+    @staticmethod
+    def toString() -> str: ...
+
+class TimeUnit(enum.IntEnum):
+    MILLISECOND: typing.ClassVar[TimeUnit]  # value = <TimeUnit.MILLISECOND: 2>
+    MINUTE: typing.ClassVar[TimeUnit]  # value = <TimeUnit.MINUTE: 0>
+    SECOND: typing.ClassVar[TimeUnit]  # value = <TimeUnit.SECOND: 1>
+    UNDEFINED: typing.ClassVar[TimeUnit]  # value = <TimeUnit.UNDEFINED: 3>
+    @classmethod
+    def __new__(cls, value): ...
+    def __format__(self, format_spec):
+        """
+        Convert to a string according to format_spec.
+        """
+
+def gpuAvailable() -> bool:
+    """
+    Check if ViennaPS was compiled with GPU support.
+    """
+
+def setNumThreads(arg0: typing.SupportsInt) -> None: ...
+
+__version__: str = "4.1.0"
+version: str = "4.1.0"