ViennaPS 3.7.1__cp312-cp312-win_amd64.whl → 4.0.0__cp312-cp312-win_amd64.whl

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  1. viennaps/__init__.py +126 -0
  2. viennaps/__init__.pyi +239 -0
  3. viennaps/_core/__init__.pyi +1110 -0
  4. viennaps/_core/constants.pyi +46 -0
  5. viennaps/_core/gpu.pyi +74 -0
  6. viennaps/_core/util.pyi +13 -0
  7. viennaps/_core.cp312-win_amd64.pyd +0 -0
  8. viennaps/d2/__init__.pyi +1449 -0
  9. viennaps/d2/gpu.pyi +85 -0
  10. viennaps/d3/__init__.pyi +1454 -0
  11. viennaps/d3/gpu.pyi +85 -0
  12. {viennaps-3.7.1.dist-info → viennaps-4.0.0.dist-info}/METADATA +28 -23
  13. viennaps-4.0.0.dist-info/RECORD +55 -0
  14. {viennaps-3.7.1.dist-info → viennaps-4.0.0.dist-info}/WHEEL +1 -1
  15. viennaps.libs/embree4.dll +0 -0
  16. viennaps.libs/embree4.exp +0 -0
  17. viennaps.libs/embree4.lib +0 -0
  18. viennaps.libs/embree_avx.lib +0 -0
  19. viennaps.libs/embree_avx2.lib +0 -0
  20. viennaps.libs/embree_sse42.lib +0 -0
  21. viennaps.libs/lexers.lib +0 -0
  22. viennaps.libs/math.lib +0 -0
  23. viennaps.libs/simd.lib +0 -0
  24. viennaps.libs/sys.lib +0 -0
  25. viennaps.libs/tasking.lib +0 -0
  26. viennaps.libs/tbb12.dll +0 -0
  27. viennaps.libs/tbb12.exp +0 -0
  28. viennaps.libs/tbb12.lib +0 -0
  29. viennaps.libs/vtkCommonComputationalGeometry-9.3.dll +0 -0
  30. viennaps.libs/vtkCommonCore-9.3.dll +0 -0
  31. viennaps.libs/vtkCommonDataModel-9.3.dll +0 -0
  32. viennaps.libs/vtkCommonExecutionModel-9.3.dll +0 -0
  33. viennaps.libs/vtkCommonMath-9.3.dll +0 -0
  34. viennaps.libs/vtkCommonMisc-9.3.dll +0 -0
  35. viennaps.libs/vtkCommonSystem-9.3.dll +0 -0
  36. viennaps.libs/vtkCommonTransforms-9.3.dll +0 -0
  37. viennaps.libs/vtkFiltersCore-9.3.dll +0 -0
  38. viennaps.libs/vtkFiltersGeneral-9.3.dll +0 -0
  39. viennaps.libs/vtkFiltersGeometry-9.3.dll +0 -0
  40. viennaps.libs/vtkFiltersVerdict-9.3.dll +0 -0
  41. viennaps.libs/vtkIOCore-9.3.dll +0 -0
  42. viennaps.libs/vtkIOXML-9.3.dll +0 -0
  43. viennaps.libs/vtkIOXMLParser-9.3.dll +0 -0
  44. viennaps.libs/vtkdoubleconversion-9.3.dll +0 -0
  45. viennaps.libs/vtkexpat-9.3.dll +0 -0
  46. viennaps.libs/vtkfmt-9.3.dll +0 -0
  47. viennaps.libs/vtkkissfft-9.3.dll +0 -0
  48. viennaps.libs/vtkloguru-9.3.dll +0 -0
  49. viennaps.libs/vtklz4-9.3.dll +0 -0
  50. viennaps.libs/vtklzma-9.3.dll +0 -0
  51. viennaps.libs/vtkpugixml-9.3.dll +0 -0
  52. viennaps.libs/vtksys-9.3.dll +0 -0
  53. viennaps.libs/vtkverdict-9.3.dll +0 -0
  54. viennaps.libs/vtkzlib-9.3.dll +0 -0
  55. viennaps-3.7.1.dist-info/RECORD +0 -59
  56. viennaps2d/Release/viennaps2d.cp310-win_amd64.pyd +0 -0
  57. viennaps2d/Release/viennaps2d.cp311-win_amd64.pyd +0 -0
  58. viennaps2d/Release/viennaps2d.cp312-win_amd64.pyd +0 -0
  59. viennaps2d/__init__.py +0 -80
  60. viennaps2d/__init__.pyi +0 -6
  61. viennaps2d/viennaps2d.cp312-win_amd64.pyd +0 -0
  62. viennaps2d/viennaps2d.pyi +0 -1423
  63. viennaps3d/Release/viennaps3d.cp310-win_amd64.pyd +0 -0
  64. viennaps3d/Release/viennaps3d.cp311-win_amd64.pyd +0 -0
  65. viennaps3d/Release/viennaps3d.cp312-win_amd64.pyd +0 -0
  66. viennaps3d/__init__.py +0 -80
  67. viennaps3d/__init__.pyi +0 -6
  68. viennaps3d/gpu.pyi +0 -147
  69. viennaps3d/viennaps3d.cp312-win_amd64.pyd +0 -0
  70. viennaps3d/viennaps3d.pyi +0 -1348
  71. {viennaps-3.7.1.dist-info → viennaps-4.0.0.dist-info}/licenses/LICENSE +0 -0
viennaps/d3/gpu.pyi ADDED
@@ -0,0 +1,85 @@
1
+ """
2
+ GPU accelerated functions.
3
+ """
4
+
5
+ from __future__ import annotations
6
+ import collections.abc
7
+ import typing
8
+ import viennaps._core
9
+ import viennaps.d3
10
+
11
+ __all__: list[str] = [
12
+ "FaradayCageEtching",
13
+ "HBrO2Etching",
14
+ "MultiParticleProcess",
15
+ "ProcessModelGPU",
16
+ "SF6O2Etching",
17
+ "SingleParticleProcess",
18
+ ]
19
+
20
+ class FaradayCageEtching(ProcessModelGPU):
21
+ def __init__(
22
+ self,
23
+ rate: typing.SupportsFloat,
24
+ stickingProbability: typing.SupportsFloat,
25
+ power: typing.SupportsFloat,
26
+ cageAngle: typing.SupportsFloat,
27
+ tiltAngle: typing.SupportsFloat,
28
+ ) -> None: ...
29
+
30
+ class HBrO2Etching(ProcessModelGPU):
31
+ def __init__(self, parameters: viennaps._core.PlasmaEtchingParameters) -> None: ...
32
+
33
+ class MultiParticleProcess(ProcessModelGPU):
34
+ def __init__(self) -> None: ...
35
+ def addIonParticle(
36
+ self,
37
+ sourcePower: typing.SupportsFloat,
38
+ thetaRMin: typing.SupportsFloat = 0.0,
39
+ thetaRMax: typing.SupportsFloat = 90.0,
40
+ minAngle: typing.SupportsFloat = 0.0,
41
+ B_sp: typing.SupportsFloat = -1.0,
42
+ meanEnergy: typing.SupportsFloat = 0.0,
43
+ sigmaEnergy: typing.SupportsFloat = 0.0,
44
+ thresholdEnergy: typing.SupportsFloat = 0.0,
45
+ inflectAngle: typing.SupportsFloat = 0.0,
46
+ n: typing.SupportsFloat = 1,
47
+ label: str = "ionFlux",
48
+ ) -> None: ...
49
+ @typing.overload
50
+ def addNeutralParticle(
51
+ self, stickingProbability: typing.SupportsFloat, label: str = "neutralFlux"
52
+ ) -> None: ...
53
+ @typing.overload
54
+ def addNeutralParticle(
55
+ self,
56
+ materialSticking: collections.abc.Mapping[
57
+ viennaps._core.Material, typing.SupportsFloat
58
+ ],
59
+ defaultStickingProbability: typing.SupportsFloat = 1.0,
60
+ label: str = "neutralFlux",
61
+ ) -> None: ...
62
+ def setRateFunction(
63
+ self,
64
+ arg0: collections.abc.Callable[
65
+ [collections.abc.Sequence[typing.SupportsFloat], viennaps._core.Material],
66
+ float,
67
+ ],
68
+ ) -> None: ...
69
+
70
+ class ProcessModelGPU(viennaps.d3.ProcessModelBase):
71
+ pass
72
+
73
+ class SF6O2Etching(ProcessModelGPU):
74
+ def __init__(self, parameters: viennaps._core.PlasmaEtchingParameters) -> None: ...
75
+
76
+ class SingleParticleProcess(ProcessModelGPU):
77
+ def __init__(
78
+ self,
79
+ materialRates: collections.abc.Mapping[
80
+ viennaps._core.Material, typing.SupportsFloat
81
+ ],
82
+ rate: typing.SupportsFloat,
83
+ stickingProbability: typing.SupportsFloat,
84
+ sourceExponent: typing.SupportsFloat,
85
+ ) -> None: ...
@@ -1,6 +1,6 @@
1
1
  Metadata-Version: 2.2
2
2
  Name: ViennaPS
3
- Version: 3.7.1
3
+ Version: 4.0.0
4
4
  Summary: Topography simulation library for microelectronic fabrication processes
5
5
  License: Copyright (c) 2025 Institute for Microelectronics, TU Wien.
6
6
 
@@ -26,15 +26,19 @@ Project-URL: Homepage, https://viennatools.github.io/ViennaPS/
26
26
  Project-URL: Documentation, https://viennatools.github.io/ViennaPS/
27
27
  Project-URL: Repository, https://github.com/ViennaTools/ViennaPS
28
28
  Project-URL: Issues, https://github.com/ViennaTools/ViennaPS/issues
29
- Requires-Dist: ViennaLS>=4.5.0
29
+ Requires-Dist: ViennaLS>=5.0.1
30
30
  Description-Content-Type: text/markdown
31
31
 
32
32
  <div align="center">
33
33
 
34
- ![](assets/logo.png)
35
-
36
- <h1>ViennaPS - Process Simulation Library</h1>
34
+ <picture>
35
+ <source srcset="https://raw.githubusercontent.com/ViennaTools/ViennaPS/master/assets/ViennaPS_title-dark.png" media="(prefers-color-scheme: dark)">
36
+ <source srcset="https://raw.githubusercontent.com/ViennaTools/ViennaPS/master/assets/ViennaPS_title.png" media="(prefers-color-scheme: light)">
37
+ <img src="https://raw.githubusercontent.com/ViennaTools/ViennaPS/master/assets/ViennaPS_title.png" alt="ViennaPS" width=500>
38
+ </picture>
37
39
 
40
+ ---
41
+
38
42
  [![🐍 Build Bindings](https://github.com/ViennaTools/ViennaPS/actions/workflows/python.yml/badge.svg)](https://github.com/ViennaTools/ViennaPS/actions/workflows/python.yml)
39
43
  [![🧪 Run Tests](https://github.com/ViennaTools/ViennaPS/actions/workflows/build.yml/badge.svg)](https://github.com/ViennaTools/ViennaPS/actions/workflows/build.yml)
40
44
  [![PyPi Version](https://img.shields.io/pypi/v/ViennaPS?logo=pypi)](https://pypi.org/project/ViennaPS/)
@@ -93,7 +97,7 @@ ViennaPS is also available on the [Python Package Index (PyPI)](https://pypi.org
93
97
 
94
98
  * [ViennaCS](https://github.com/ViennaTools/viennacs)
95
99
 
96
- * [pybind11](https://github.com/pybind/pybind11) (2.12.0+, only for building Python libs)
100
+ * [pybind11](https://github.com/pybind/pybind11) (3.0.0+, only for building Python libs)
97
101
 
98
102
  The CMake configuration automatically checks if the dependencies are installed.
99
103
  If the dependencies are not found on the system, they will be built from source. To use local installations of the dependencies, the `VIENNAPS_LOOKUP_DIRS` variable can be set to the installation path of the dependencies.
@@ -126,29 +130,31 @@ cd ViennaPS
126
130
  pip install .
127
131
  ```
128
132
 
129
- > Some features of the ViennaPS Python module depend on the ViennaLS Python module. You’ll need to install ViennaLS separately instructions are available in the [ViennaLS GitHub repository](https://github.com/ViennaTools/ViennaLS).
133
+ > Some features of the ViennaPS Python module depend on the ViennaLS Python module. The ViennaLS is installed automatically as a dependency.
130
134
  > Note: A locally built ViennaPS Python module is typically not compatible with the ViennaLS package from PyPI. For details and troubleshooting, see [this guide](https://viennatools.github.io/ViennaPS/inst/troubleshooting.html#python-importerror).
131
135
 
132
136
  ## Using the Python package
133
137
 
134
- The 2D version of the library can be imported as follows:
138
+ The ViennaPS Python package can be used by importing it in your Python scripts:
135
139
  ```python
136
- import viennaps2d as vps
140
+ import viennaps as vps
137
141
  ```
138
142
 
139
- In order to switch to three dimensions, only the import needs to be changed:
140
-
143
+ By default, ViennaPS operates in two dimensions. You can set the dimension using:
141
144
  ```python
142
- import viennaps3d as vps
145
+ vps.setDimension(2) # For 2D simulations
146
+ vps.setDimension(3) # For 3D simulations
143
147
  ```
144
148
 
149
+ For more details and examples, refer to the official [documentation](https://viennatools.github.io/ViennaPS/).
150
+
145
151
  ## Integration in CMake projects
146
152
 
147
153
  We recommend using [CPM.cmake](https://github.com/cpm-cmake/CPM.cmake) to consume this library.
148
154
 
149
155
  * Installation with CPM
150
156
  ```cmake
151
- CPMAddPackage("gh:viennatools/viennaps@3.7.1")
157
+ CPMAddPackage("gh:viennatools/viennaps@4.0.0")
152
158
  ```
153
159
 
154
160
  * With a local installation
@@ -173,14 +179,13 @@ If ViennaPS was built with shared libraries and you use ViennaPS in your project
173
179
 
174
180
  ## GPU Acceleration (Experimental)
175
181
 
176
- As of version 3.4.0, ViennaPS supports GPU acceleration for the ray tracing part of the library. This feature is still experimental and may not work on all systems. Details on how to enable GPU functionality can be found in the [documentation](https://viennatools.github.io/ViennaPS/inst/).
182
+ As of version 3.4.0, ViennaPS supports GPU acceleration for the ray tracing part of the library. This feature is still experimental and may not work on all systems. Details on how to enable GPU functionality can be found in the [documentation](https://viennatools.github.io/ViennaPS/inst/gpu.html).
177
183
 
178
184
  ## Basic Examples
179
185
 
180
186
  ### Building
181
187
 
182
188
  The examples can be built using CMake:
183
- > __Important__: Make sure all dependencies are installed and have been built previously
184
189
 
185
190
  ```bash
186
191
  git clone https://github.com/ViennaTools/ViennaPS.git
@@ -192,7 +197,7 @@ cmake --build build
192
197
 
193
198
  The examples can then be executed in their respective build folders with the config files, e.g.:
194
199
  ```bash
195
- cd examples/exampleName
200
+ cd build/examples/exampleName
196
201
  ./exampleName.bat config.txt # (Windows)
197
202
  ./exampleName config.txt # (Other)
198
203
  ```
@@ -204,7 +209,7 @@ Individual examples can also be build by calling `make` in their respective buil
204
209
  This [example](https://github.com/ViennaTools/ViennaPS/tree/master/examples/trenchDeposition) focuses on a particle deposition process within a trench geometry. By default, the simulation presents a 2D representation of the trench. Nevertheless, users have the flexibility to conduct 3D simulations by adjusting the value of the constant _D_ in __trenchDeposition.cpp__ to 3. Customization of process and geometry parameters is achieved through the __config.txt__ file. The accompanying image illustrates instances of the trench deposition process, showcasing variations in the particle sticking probability _s_.
205
210
 
206
211
  <div align="center">
207
- <img src="assets/deposition.svg" width=700 style="background-color:white;">
212
+ <img src="https://raw.githubusercontent.com/ViennaTools/ViennaPS/master/assets/deposition.png" width=700 style="background-color:white;">
208
213
  </div>
209
214
 
210
215
  ### SF<sub>6</sub>/O<sub>2</sub> Hole Etching
@@ -218,7 +223,7 @@ The image presents the results of different flux configurations, as tested in _t
218
223
  > The images shown here were generated using **ViennaPS v3.6.0**.
219
224
 
220
225
  <div align="center">
221
- <img src="assets/sf6o2_results.png" width=700 style="background-color:white;">
226
+ <img src="https://raw.githubusercontent.com/ViennaTools/ViennaPS/master/assets/sf6o2_results.png" width=700 style="background-color:white;">
222
227
  </div>
223
228
 
224
229
  ### Bosch Process
@@ -232,7 +237,7 @@ This [example](https://github.com/ViennaTools/ViennaPS/tree/master/examples/bosc
232
237
  This comparison highlights the trade-offs between computational efficiency and physical accuracy in DRIE simulations.
233
238
 
234
239
  <div align="center">
235
- <img src="assets/bosch_process.png" width=700 style="background-color:white;">
240
+ <img src="https://raw.githubusercontent.com/ViennaTools/ViennaPS/master/assets/bosch_process.png" width=700 style="background-color:white;">
236
241
  </div>
237
242
 
238
243
  ### Wet Etching
@@ -240,7 +245,7 @@ This comparison highlights the trade-offs between computational efficiency and p
240
245
  This [example](https://github.com/ViennaTools/ViennaPS/tree/master/examples/cantileverWetEtching) demonstrates the wet etching process, specifically focusing on the cantilever structure. The simulation captures the etching dynamics and the influence of crystallographic directions on the etch profile.
241
246
 
242
247
  <div align="center">
243
- <img src="assets/wet_etching.png" width=700 style="background-color:white;">
248
+ <img src="https://raw.githubusercontent.com/ViennaTools/ViennaPS/master/assets/wet_etching.png" width=700 style="background-color:white;">
244
249
  </div>
245
250
 
246
251
  ### Selective Epitaxy
@@ -248,7 +253,7 @@ This [example](https://github.com/ViennaTools/ViennaPS/tree/master/examples/cant
248
253
  This [example](https://github.com/ViennaTools/ViennaPS/tree/master/examples/selectiveEpitaxy) demonstrates the selective epitaxy process, focusing on the growth of SiGe on a Si substrate. Similar to wet etching, the process is influenced by crystallographic directions, which can be adjusted in the __config.txt__ file. The simulation captures the growth dynamics and the resulting SiGe structure.
249
254
 
250
255
  <div align="center">
251
- <img src="assets/epitaxy.png" width=700 style="background-color:white;">
256
+ <img src="https://raw.githubusercontent.com/ViennaTools/ViennaPS/master/assets/epitaxy.png" width=700 style="background-color:white;">
252
257
  </div>
253
258
 
254
259
  ### Redeposition During Selective Etching
@@ -256,7 +261,7 @@ This [example](https://github.com/ViennaTools/ViennaPS/tree/master/examples/sele
256
261
  This [example](https://github.com/ViennaTools/ViennaPS/tree/master/examples/oxideRegrowth) demonstrates capturing etching byproducts and the subsequent redeposition during a selective etching process in a Si<sub>3</sub>N<sub>4</sub>/SiO<sub>2</sub> stack. The etching byproducts are captured in a cell set description of the etching plasma. To model the dynamics of these etching byproducts, a convection-diffusion equation is solved on the cell set using finite differences. The redeposition is then captured by adding up the byproducts in every step and using this information to generate a velocity field on the etched surface.
257
262
 
258
263
  <div align="center">
259
- <img src="assets/redeposition.gif" width=700 style="background-color:white;">
264
+ <img src="https://raw.githubusercontent.com/ViennaTools/ViennaPS/master/assets/redeposition.gif" width=700 style="background-color:white;">
260
265
  </div>
261
266
 
262
267
  ### GDS Mask Import Example
@@ -264,7 +269,7 @@ This [example](https://github.com/ViennaTools/ViennaPS/tree/master/examples/oxid
264
269
  This [example](https://github.com/ViennaTools/ViennaPS/tree/master/examples/GDSReader) tests the full GDS mask import, blurring, rotation, scaling, and flipping as well as the level set conversion pipeline. Shown below is the result after applying proximity correction and extrusion on a simple test.
265
270
 
266
271
  <div align="center">
267
- <img src="assets/masks.png" width=1200 style="background-color:white;">
272
+ <img src="https://raw.githubusercontent.com/ViennaTools/ViennaPS/master/assets/masks.png" width=1200 style="background-color:white;">
268
273
  </div>
269
274
 
270
275
 
@@ -0,0 +1,55 @@
1
+ viennaps/__init__.py,sha256=AKjhfYJ48L9OxNIWOnx48SLpeqK_ikbook85ki8tLEo,3180
2
+ viennaps/__init__.pyi,sha256=VuYGg2bebshkQef4osfJdG1WVQlRQVLWvIZkYHbCI1Q,7086
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+ viennaps/d2/__init__.pyi,sha256=U2OXOZNG4B_yBmkGMNcQLuwc1WXReAr-4f6jHxVez0I,46014
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+ viennaps.libs/embree4.dll,sha256=9Vl9LZz8RxL76sp41Tq2bwDxMzXtQOZKGbWcEO21imw,24914432
13
+ viennaps.libs/embree4.exp,sha256=mI6QvpNf1uZVOczuOfW1rG0VFhXoaaDYUgQLmT37ie8,17003
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17
+ viennaps.libs/embree_sse42.lib,sha256=LCKzF_-kRa_ZY3LE9xrkNuySc6iLfxZqdgoxw6uQYHA,5641358
18
+ viennaps.libs/lexers.lib,sha256=ftVrwp12ig4BySj3puGycBWqK9cQPegvgiwvmQY7dYQ,257064
19
+ viennaps.libs/math.lib,sha256=F15Qrxu0Q36RHvgNtyMfxPAp6gYaBdu2tUiJJKUaCD0,5304
20
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viennaps2d/__init__.py DELETED
@@ -1,80 +0,0 @@
1
- """
2
- ViennaPS
3
- ========
4
-
5
- ViennaPS is a header-only C++ process simulation library,
6
- which includes surface and volume representations,
7
- a ray tracer, and physical models for the simulation of
8
- microelectronic fabrication processes.
9
- """
10
-
11
- import sys
12
-
13
- def _windows_dll_path():
14
- import os
15
-
16
- additional_paths = [
17
- os.path.join(os.path.dirname(os.path.dirname(__file__)), 'viennaps.libs')
18
- ]
19
-
20
- for path in additional_paths:
21
- if not os.path.exists(path):
22
- continue
23
-
24
- os.add_dll_directory(path)
25
- os.environ["PATH"] = path + os.pathsep + os.environ["PATH"]
26
-
27
- def _module_ptx_path():
28
- from importlib.util import find_spec
29
- import os
30
-
31
- spec = find_spec("viennaps3d")
32
- install_path = os.path.dirname(os.path.abspath(spec.origin))
33
- return os.path.join(install_path, "ptx")
34
-
35
-
36
- if sys.platform == "win32":
37
- _windows_dll_path()
38
-
39
- import viennals2d as ls
40
- from viennals2d import IntegrationSchemeEnum as IntegrationScheme
41
- from viennals2d import BoundaryConditionEnum as BoundaryType
42
- from .viennaps2d import *
43
-
44
- if D == 3:
45
- ptxPath = _module_ptx_path()
46
-
47
- # Config file reader helper function
48
- def ReadConfigFile(fileName: str):
49
- """Read a config file in the ViennaPS standard config file format.
50
-
51
- Parameters
52
- ----------
53
- fileName: str
54
- Name of the config file.
55
-
56
- Returns
57
- -------
58
- dict
59
- A dictionary containing the parameters from the config file.
60
- """
61
- par_dict = {}
62
-
63
- with open(fileName, "r") as file:
64
- lines = file.readlines()
65
- for line in lines:
66
-
67
- line = line[:line.find('#')] # remove comments
68
-
69
- if len(line) > 0:
70
- par_name = line[:line.find('=')].strip(' ')
71
- par_value = line[line.find('=')+1:]
72
-
73
- try:
74
- val = float(par_value)
75
- except:
76
- val = par_value
77
-
78
- par_dict[par_name] = val
79
-
80
- return par_dict
viennaps2d/__init__.pyi DELETED
@@ -1,6 +0,0 @@
1
- from .viennaps2d import *
2
- from _typeshed import Incomplete
3
-
4
- ptxPath: Incomplete
5
-
6
- def ReadConfigFile(fileName: str): ...
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