ViennaPS 3.7.1__cp312-cp312-win_amd64.whl → 4.0.0__cp312-cp312-win_amd64.whl
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- viennaps/__init__.py +126 -0
- viennaps/__init__.pyi +239 -0
- viennaps/_core/__init__.pyi +1110 -0
- viennaps/_core/constants.pyi +46 -0
- viennaps/_core/gpu.pyi +74 -0
- viennaps/_core/util.pyi +13 -0
- viennaps/_core.cp312-win_amd64.pyd +0 -0
- viennaps/d2/__init__.pyi +1449 -0
- viennaps/d2/gpu.pyi +85 -0
- viennaps/d3/__init__.pyi +1454 -0
- viennaps/d3/gpu.pyi +85 -0
- {viennaps-3.7.1.dist-info → viennaps-4.0.0.dist-info}/METADATA +28 -23
- viennaps-4.0.0.dist-info/RECORD +55 -0
- {viennaps-3.7.1.dist-info → viennaps-4.0.0.dist-info}/WHEEL +1 -1
- viennaps.libs/embree4.dll +0 -0
- viennaps.libs/embree4.exp +0 -0
- viennaps.libs/embree4.lib +0 -0
- viennaps.libs/embree_avx.lib +0 -0
- viennaps.libs/embree_avx2.lib +0 -0
- viennaps.libs/embree_sse42.lib +0 -0
- viennaps.libs/lexers.lib +0 -0
- viennaps.libs/math.lib +0 -0
- viennaps.libs/simd.lib +0 -0
- viennaps.libs/sys.lib +0 -0
- viennaps.libs/tasking.lib +0 -0
- viennaps.libs/tbb12.dll +0 -0
- viennaps.libs/tbb12.exp +0 -0
- viennaps.libs/tbb12.lib +0 -0
- viennaps.libs/vtkCommonComputationalGeometry-9.3.dll +0 -0
- viennaps.libs/vtkCommonCore-9.3.dll +0 -0
- viennaps.libs/vtkCommonDataModel-9.3.dll +0 -0
- viennaps.libs/vtkCommonExecutionModel-9.3.dll +0 -0
- viennaps.libs/vtkCommonMath-9.3.dll +0 -0
- viennaps.libs/vtkCommonMisc-9.3.dll +0 -0
- viennaps.libs/vtkCommonSystem-9.3.dll +0 -0
- viennaps.libs/vtkCommonTransforms-9.3.dll +0 -0
- viennaps.libs/vtkFiltersCore-9.3.dll +0 -0
- viennaps.libs/vtkFiltersGeneral-9.3.dll +0 -0
- viennaps.libs/vtkFiltersGeometry-9.3.dll +0 -0
- viennaps.libs/vtkFiltersVerdict-9.3.dll +0 -0
- viennaps.libs/vtkIOCore-9.3.dll +0 -0
- viennaps.libs/vtkIOXML-9.3.dll +0 -0
- viennaps.libs/vtkIOXMLParser-9.3.dll +0 -0
- viennaps.libs/vtkdoubleconversion-9.3.dll +0 -0
- viennaps.libs/vtkexpat-9.3.dll +0 -0
- viennaps.libs/vtkfmt-9.3.dll +0 -0
- viennaps.libs/vtkkissfft-9.3.dll +0 -0
- viennaps.libs/vtkloguru-9.3.dll +0 -0
- viennaps.libs/vtklz4-9.3.dll +0 -0
- viennaps.libs/vtklzma-9.3.dll +0 -0
- viennaps.libs/vtkpugixml-9.3.dll +0 -0
- viennaps.libs/vtksys-9.3.dll +0 -0
- viennaps.libs/vtkverdict-9.3.dll +0 -0
- viennaps.libs/vtkzlib-9.3.dll +0 -0
- viennaps-3.7.1.dist-info/RECORD +0 -59
- viennaps2d/Release/viennaps2d.cp310-win_amd64.pyd +0 -0
- viennaps2d/Release/viennaps2d.cp311-win_amd64.pyd +0 -0
- viennaps2d/Release/viennaps2d.cp312-win_amd64.pyd +0 -0
- viennaps2d/__init__.py +0 -80
- viennaps2d/__init__.pyi +0 -6
- viennaps2d/viennaps2d.cp312-win_amd64.pyd +0 -0
- viennaps2d/viennaps2d.pyi +0 -1423
- viennaps3d/Release/viennaps3d.cp310-win_amd64.pyd +0 -0
- viennaps3d/Release/viennaps3d.cp311-win_amd64.pyd +0 -0
- viennaps3d/Release/viennaps3d.cp312-win_amd64.pyd +0 -0
- viennaps3d/__init__.py +0 -80
- viennaps3d/__init__.pyi +0 -6
- viennaps3d/gpu.pyi +0 -147
- viennaps3d/viennaps3d.cp312-win_amd64.pyd +0 -0
- viennaps3d/viennaps3d.pyi +0 -1348
- {viennaps-3.7.1.dist-info → viennaps-4.0.0.dist-info}/licenses/LICENSE +0 -0
viennaps/d3/gpu.pyi
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"""
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GPU accelerated functions.
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"""
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from __future__ import annotations
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import collections.abc
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import typing
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import viennaps._core
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import viennaps.d3
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__all__: list[str] = [
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"FaradayCageEtching",
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"HBrO2Etching",
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"MultiParticleProcess",
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"ProcessModelGPU",
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"SF6O2Etching",
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"SingleParticleProcess",
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]
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class FaradayCageEtching(ProcessModelGPU):
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def __init__(
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self,
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rate: typing.SupportsFloat,
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stickingProbability: typing.SupportsFloat,
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power: typing.SupportsFloat,
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cageAngle: typing.SupportsFloat,
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tiltAngle: typing.SupportsFloat,
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) -> None: ...
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class HBrO2Etching(ProcessModelGPU):
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def __init__(self, parameters: viennaps._core.PlasmaEtchingParameters) -> None: ...
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class MultiParticleProcess(ProcessModelGPU):
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def __init__(self) -> None: ...
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def addIonParticle(
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self,
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sourcePower: typing.SupportsFloat,
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thetaRMin: typing.SupportsFloat = 0.0,
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thetaRMax: typing.SupportsFloat = 90.0,
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minAngle: typing.SupportsFloat = 0.0,
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B_sp: typing.SupportsFloat = -1.0,
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meanEnergy: typing.SupportsFloat = 0.0,
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sigmaEnergy: typing.SupportsFloat = 0.0,
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thresholdEnergy: typing.SupportsFloat = 0.0,
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inflectAngle: typing.SupportsFloat = 0.0,
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n: typing.SupportsFloat = 1,
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label: str = "ionFlux",
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) -> None: ...
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@typing.overload
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def addNeutralParticle(
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self, stickingProbability: typing.SupportsFloat, label: str = "neutralFlux"
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) -> None: ...
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@typing.overload
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def addNeutralParticle(
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self,
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materialSticking: collections.abc.Mapping[
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viennaps._core.Material, typing.SupportsFloat
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],
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defaultStickingProbability: typing.SupportsFloat = 1.0,
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label: str = "neutralFlux",
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) -> None: ...
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def setRateFunction(
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self,
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arg0: collections.abc.Callable[
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[collections.abc.Sequence[typing.SupportsFloat], viennaps._core.Material],
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float,
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],
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) -> None: ...
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class ProcessModelGPU(viennaps.d3.ProcessModelBase):
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pass
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class SF6O2Etching(ProcessModelGPU):
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def __init__(self, parameters: viennaps._core.PlasmaEtchingParameters) -> None: ...
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class SingleParticleProcess(ProcessModelGPU):
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def __init__(
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self,
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materialRates: collections.abc.Mapping[
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viennaps._core.Material, typing.SupportsFloat
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],
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rate: typing.SupportsFloat,
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stickingProbability: typing.SupportsFloat,
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sourceExponent: typing.SupportsFloat,
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) -> None: ...
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Metadata-Version: 2.2
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Name: ViennaPS
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Version:
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Version: 4.0.0
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Summary: Topography simulation library for microelectronic fabrication processes
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License: Copyright (c) 2025 Institute for Microelectronics, TU Wien.
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Project-URL: Documentation, https://viennatools.github.io/ViennaPS/
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Project-URL: Repository, https://github.com/ViennaTools/ViennaPS
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Project-URL: Issues, https://github.com/ViennaTools/ViennaPS/issues
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Requires-Dist: ViennaLS>=
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Requires-Dist: ViennaLS>=5.0.1
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Description-Content-Type: text/markdown
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<div align="center">
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<
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<picture>
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<source srcset="https://raw.githubusercontent.com/ViennaTools/ViennaPS/master/assets/ViennaPS_title-dark.png" media="(prefers-color-scheme: dark)">
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<source srcset="https://raw.githubusercontent.com/ViennaTools/ViennaPS/master/assets/ViennaPS_title.png" media="(prefers-color-scheme: light)">
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<img src="https://raw.githubusercontent.com/ViennaTools/ViennaPS/master/assets/ViennaPS_title.png" alt="ViennaPS" width=500>
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</picture>
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---
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[](https://github.com/ViennaTools/ViennaPS/actions/workflows/python.yml)
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[](https://github.com/ViennaTools/ViennaPS/actions/workflows/build.yml)
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[](https://pypi.org/project/ViennaPS/)
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* [ViennaCS](https://github.com/ViennaTools/viennacs)
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* [pybind11](https://github.com/pybind/pybind11) (
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* [pybind11](https://github.com/pybind/pybind11) (3.0.0+, only for building Python libs)
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The CMake configuration automatically checks if the dependencies are installed.
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If the dependencies are not found on the system, they will be built from source. To use local installations of the dependencies, the `VIENNAPS_LOOKUP_DIRS` variable can be set to the installation path of the dependencies.
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pip install .
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```
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> Some features of the ViennaPS Python module depend on the ViennaLS Python module.
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> Some features of the ViennaPS Python module depend on the ViennaLS Python module. The ViennaLS is installed automatically as a dependency.
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> Note: A locally built ViennaPS Python module is typically not compatible with the ViennaLS package from PyPI. For details and troubleshooting, see [this guide](https://viennatools.github.io/ViennaPS/inst/troubleshooting.html#python-importerror).
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## Using the Python package
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The
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The ViennaPS Python package can be used by importing it in your Python scripts:
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```python
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import
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import viennaps as vps
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```
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By default, ViennaPS operates in two dimensions. You can set the dimension using:
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```python
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vps.setDimension(2) # For 2D simulations
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vps.setDimension(3) # For 3D simulations
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```
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For more details and examples, refer to the official [documentation](https://viennatools.github.io/ViennaPS/).
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## Integration in CMake projects
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We recommend using [CPM.cmake](https://github.com/cpm-cmake/CPM.cmake) to consume this library.
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* Installation with CPM
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```cmake
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CPMAddPackage("gh:viennatools/viennaps@
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CPMAddPackage("gh:viennatools/viennaps@4.0.0")
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```
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* With a local installation
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## GPU Acceleration (Experimental)
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As of version 3.4.0, ViennaPS supports GPU acceleration for the ray tracing part of the library. This feature is still experimental and may not work on all systems. Details on how to enable GPU functionality can be found in the [documentation](https://viennatools.github.io/ViennaPS/inst/).
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As of version 3.4.0, ViennaPS supports GPU acceleration for the ray tracing part of the library. This feature is still experimental and may not work on all systems. Details on how to enable GPU functionality can be found in the [documentation](https://viennatools.github.io/ViennaPS/inst/gpu.html).
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## Basic Examples
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### Building
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The examples can be built using CMake:
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> __Important__: Make sure all dependencies are installed and have been built previously
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```bash
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The examples can then be executed in their respective build folders with the config files, e.g.:
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This [example](https://github.com/ViennaTools/ViennaPS/tree/master/examples/trenchDeposition) focuses on a particle deposition process within a trench geometry. By default, the simulation presents a 2D representation of the trench. Nevertheless, users have the flexibility to conduct 3D simulations by adjusting the value of the constant _D_ in __trenchDeposition.cpp__ to 3. Customization of process and geometry parameters is achieved through the __config.txt__ file. The accompanying image illustrates instances of the trench deposition process, showcasing variations in the particle sticking probability _s_.
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</div>
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### SF<sub>6</sub>/O<sub>2</sub> Hole Etching
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> The images shown here were generated using **ViennaPS v3.6.0**.
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<img src="assets/sf6o2_results.png" width=700 style="background-color:white;">
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<img src="https://raw.githubusercontent.com/ViennaTools/ViennaPS/master/assets/sf6o2_results.png" width=700 style="background-color:white;">
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</div>
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### Bosch Process
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This comparison highlights the trade-offs between computational efficiency and physical accuracy in DRIE simulations.
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</div>
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### Wet Etching
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This [example](https://github.com/ViennaTools/ViennaPS/tree/master/examples/cantileverWetEtching) demonstrates the wet etching process, specifically focusing on the cantilever structure. The simulation captures the etching dynamics and the influence of crystallographic directions on the etch profile.
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<img src="assets/wet_etching.png" width=700 style="background-color:white;">
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<img src="https://raw.githubusercontent.com/ViennaTools/ViennaPS/master/assets/wet_etching.png" width=700 style="background-color:white;">
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</div>
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### Selective Epitaxy
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This [example](https://github.com/ViennaTools/ViennaPS/tree/master/examples/selectiveEpitaxy) demonstrates the selective epitaxy process, focusing on the growth of SiGe on a Si substrate. Similar to wet etching, the process is influenced by crystallographic directions, which can be adjusted in the __config.txt__ file. The simulation captures the growth dynamics and the resulting SiGe structure.
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This [example](https://github.com/ViennaTools/ViennaPS/tree/master/examples/oxideRegrowth) demonstrates capturing etching byproducts and the subsequent redeposition during a selective etching process in a Si<sub>3</sub>N<sub>4</sub>/SiO<sub>2</sub> stack. The etching byproducts are captured in a cell set description of the etching plasma. To model the dynamics of these etching byproducts, a convection-diffusion equation is solved on the cell set using finite differences. The redeposition is then captured by adding up the byproducts in every step and using this information to generate a velocity field on the etched surface.
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This [example](https://github.com/ViennaTools/ViennaPS/tree/master/examples/GDSReader) tests the full GDS mask import, blurring, rotation, scaling, and flipping as well as the level set conversion pipeline. Shown below is the result after applying proximity correction and extrusion on a simple test.
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"""
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ViennaPS
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========
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ViennaPS is a header-only C++ process simulation library,
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which includes surface and volume representations,
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a ray tracer, and physical models for the simulation of
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microelectronic fabrication processes.
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"""
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import sys
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import os
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additional_paths = [
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]
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continue
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os.environ["PATH"] = path + os.pathsep + os.environ["PATH"]
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spec = find_spec("viennaps3d")
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install_path = os.path.dirname(os.path.abspath(spec.origin))
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return os.path.join(install_path, "ptx")
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_windows_dll_path()
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import viennals2d as ls
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from viennals2d import IntegrationSchemeEnum as IntegrationScheme
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from .viennaps2d import *
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ptxPath = _module_ptx_path()
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# Config file reader helper function
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def ReadConfigFile(fileName: str):
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"""Read a config file in the ViennaPS standard config file format.
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Parameters
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----------
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fileName: str
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Name of the config file.
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Returns
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-------
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dict
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A dictionary containing the parameters from the config file.
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"""
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for line in lines:
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if len(line) > 0:
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par_name = line[:line.find('=')].strip(' ')
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par_value = line[line.find('=')+1:]
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try:
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val = float(par_value)
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except:
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val = par_value
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par_dict[par_name] = val
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return par_dict
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