ViennaPS 3.7.1__cp312-cp312-macosx_11_0_arm64.whl → 3.7.2__cp312-cp312-macosx_11_0_arm64.whl

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Files changed (38) hide show
  1. {viennaps-3.7.1.dist-info → viennaps-3.7.2.dist-info}/METADATA +17 -13
  2. {viennaps-3.7.1.dist-info → viennaps-3.7.2.dist-info}/RECORD +35 -29
  3. viennaps.libs/cmake_install.cmake +1 -1
  4. viennaps.libs/common/cmake_install.cmake +1 -1
  5. viennaps.libs/common/lexers/cmake_install.cmake +1 -1
  6. viennaps.libs/common/math/cmake_install.cmake +1 -1
  7. viennaps.libs/common/simd/cmake_install.cmake +1 -1
  8. viennaps.libs/common/sys/cmake_install.cmake +1 -1
  9. viennaps.libs/common/tasking/cmake_install.cmake +1 -1
  10. viennaps.libs/kernels/cmake_install.cmake +1 -1
  11. viennaps.libs/libembree_avx2.a +0 -0
  12. viennaps.libs/liblexers.a +0 -0
  13. viennaps.libs/libmath.a +0 -0
  14. viennaps.libs/libsimd.a +0 -0
  15. viennaps.libs/libsys.a +0 -0
  16. viennaps.libs/libtasking.a +0 -0
  17. viennaps.libs/tests/cmake_install.cmake +1 -1
  18. viennaps2d/.dylibs/libomp.dylib +0 -0
  19. viennaps2d/__init__.pyi +216 -4
  20. viennaps2d/viennaps2d/__init__.pyi +2656 -0
  21. viennaps2d/viennaps2d/constants.pyi +26 -0
  22. viennaps2d/viennaps2d/ray.pyi +34 -0
  23. viennaps2d/viennaps2d/util.pyi +10 -0
  24. viennaps2d/viennaps2d.cpython-311-darwin.so +0 -0
  25. viennaps2d/viennaps2d.cpython-312-darwin.so +0 -0
  26. viennaps3d/__init__.pyi +216 -4
  27. viennaps3d/viennaps3d/__init__.pyi +2518 -0
  28. viennaps3d/viennaps3d/constants.pyi +26 -0
  29. viennaps3d/viennaps3d/gpu.pyi +164 -0
  30. viennaps3d/viennaps3d/ray.pyi +34 -0
  31. viennaps3d/viennaps3d/util.pyi +10 -0
  32. viennaps3d/viennaps3d.cpython-311-darwin.so +0 -0
  33. viennaps3d/viennaps3d.cpython-312-darwin.so +0 -0
  34. viennaps2d/viennaps2d.pyi +0 -1423
  35. viennaps3d/gpu.pyi +0 -147
  36. viennaps3d/viennaps3d.pyi +0 -1348
  37. {viennaps-3.7.1.dist-info → viennaps-3.7.2.dist-info}/WHEEL +0 -0
  38. {viennaps-3.7.1.dist-info → viennaps-3.7.2.dist-info}/licenses/LICENSE +0 -0
{viennaps-3.7.1.dist-info → viennaps-3.7.2.dist-info}/METADATA RENAMED
@@ -1,6 +1,6 @@
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  Metadata-Version: 2.2
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  Name: ViennaPS
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- Version: 3.7.1
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+ Version: 3.7.2
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  Summary: Topography simulation library for microelectronic fabrication processes
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  License: Copyright (c) 2025 Institute for Microelectronics, TU Wien.
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@@ -31,10 +31,14 @@ Description-Content-Type: text/markdown
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  <div align="center">
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- ![](assets/logo.png)
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-
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- <h1>ViennaPS - Process Simulation Library</h1>
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+ <picture>
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+ <source srcset="https://raw.githubusercontent.com/ViennaTools/ViennaPS/master/assets/ViennaPS_title-dark.png" media="(prefers-color-scheme: dark)">
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+ <source srcset="https://raw.githubusercontent.com/ViennaTools/ViennaPS/master/assets/ViennaPS_title.png" media="(prefers-color-scheme: light)">
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+ <img src="https://raw.githubusercontent.com/ViennaTools/ViennaPS/master/assets/ViennaPS_title.png" alt="ViennaPS" width=500>
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+ </picture>
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+ ---
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+
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  [![🐍 Build Bindings](https://github.com/ViennaTools/ViennaPS/actions/workflows/python.yml/badge.svg)](https://github.com/ViennaTools/ViennaPS/actions/workflows/python.yml)
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  [![🧪 Run Tests](https://github.com/ViennaTools/ViennaPS/actions/workflows/build.yml/badge.svg)](https://github.com/ViennaTools/ViennaPS/actions/workflows/build.yml)
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  [![PyPi Version](https://img.shields.io/pypi/v/ViennaPS?logo=pypi)](https://pypi.org/project/ViennaPS/)
@@ -93,7 +97,7 @@ ViennaPS is also available on the [Python Package Index (PyPI)](https://pypi.org
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  * [ViennaCS](https://github.com/ViennaTools/viennacs)
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- * [pybind11](https://github.com/pybind/pybind11) (2.12.0+, only for building Python libs)
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+ * [pybind11](https://github.com/pybind/pybind11) (3.0.0+, only for building Python libs)
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  The CMake configuration automatically checks if the dependencies are installed.
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  If the dependencies are not found on the system, they will be built from source. To use local installations of the dependencies, the `VIENNAPS_LOOKUP_DIRS` variable can be set to the installation path of the dependencies.
@@ -148,7 +152,7 @@ We recommend using [CPM.cmake](https://github.com/cpm-cmake/CPM.cmake) to consum
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  * Installation with CPM
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  ```cmake
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- CPMAddPackage("gh:viennatools/viennaps@3.7.1")
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+ CPMAddPackage("gh:viennatools/viennaps@3.7.2")
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  ```
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  * With a local installation
@@ -204,7 +208,7 @@ Individual examples can also be build by calling `make` in their respective buil
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  This [example](https://github.com/ViennaTools/ViennaPS/tree/master/examples/trenchDeposition) focuses on a particle deposition process within a trench geometry. By default, the simulation presents a 2D representation of the trench. Nevertheless, users have the flexibility to conduct 3D simulations by adjusting the value of the constant _D_ in __trenchDeposition.cpp__ to 3. Customization of process and geometry parameters is achieved through the __config.txt__ file. The accompanying image illustrates instances of the trench deposition process, showcasing variations in the particle sticking probability _s_.
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  <div align="center">
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- <img src="assets/deposition.svg" width=700 style="background-color:white;">
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+ <img src="https://raw.githubusercontent.com/ViennaTools/ViennaPS/master/assets/deposition.png" width=700 style="background-color:white;">
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  </div>
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  ### SF<sub>6</sub>/O<sub>2</sub> Hole Etching
@@ -218,7 +222,7 @@ The image presents the results of different flux configurations, as tested in _t
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  > The images shown here were generated using **ViennaPS v3.6.0**.
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  <div align="center">
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- <img src="assets/sf6o2_results.png" width=700 style="background-color:white;">
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+ <img src="https://raw.githubusercontent.com/ViennaTools/ViennaPS/master/assets/sf6o2_results.png" width=700 style="background-color:white;">
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  </div>
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  ### Bosch Process
@@ -232,7 +236,7 @@ This [example](https://github.com/ViennaTools/ViennaPS/tree/master/examples/bosc
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  This comparison highlights the trade-offs between computational efficiency and physical accuracy in DRIE simulations.
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  <div align="center">
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- <img src="assets/bosch_process.png" width=700 style="background-color:white;">
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+ <img src="https://raw.githubusercontent.com/ViennaTools/ViennaPS/master/assets/bosch_process.png" width=700 style="background-color:white;">
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  </div>
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  ### Wet Etching
@@ -240,7 +244,7 @@ This comparison highlights the trade-offs between computational efficiency and p
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  This [example](https://github.com/ViennaTools/ViennaPS/tree/master/examples/cantileverWetEtching) demonstrates the wet etching process, specifically focusing on the cantilever structure. The simulation captures the etching dynamics and the influence of crystallographic directions on the etch profile.
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  <div align="center">
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- <img src="assets/wet_etching.png" width=700 style="background-color:white;">
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+ <img src="https://raw.githubusercontent.com/ViennaTools/ViennaPS/master/assets/wet_etching.png" width=700 style="background-color:white;">
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  </div>
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  ### Selective Epitaxy
@@ -248,7 +252,7 @@ This [example](https://github.com/ViennaTools/ViennaPS/tree/master/examples/cant
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  This [example](https://github.com/ViennaTools/ViennaPS/tree/master/examples/selectiveEpitaxy) demonstrates the selective epitaxy process, focusing on the growth of SiGe on a Si substrate. Similar to wet etching, the process is influenced by crystallographic directions, which can be adjusted in the __config.txt__ file. The simulation captures the growth dynamics and the resulting SiGe structure.
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- <img src="assets/epitaxy.png" width=700 style="background-color:white;">
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+ <img src="https://raw.githubusercontent.com/ViennaTools/ViennaPS/master/assets/epitaxy.png" width=700 style="background-color:white;">
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  </div>
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  ### Redeposition During Selective Etching
@@ -256,7 +260,7 @@ This [example](https://github.com/ViennaTools/ViennaPS/tree/master/examples/sele
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  This [example](https://github.com/ViennaTools/ViennaPS/tree/master/examples/oxideRegrowth) demonstrates capturing etching byproducts and the subsequent redeposition during a selective etching process in a Si<sub>3</sub>N<sub>4</sub>/SiO<sub>2</sub> stack. The etching byproducts are captured in a cell set description of the etching plasma. To model the dynamics of these etching byproducts, a convection-diffusion equation is solved on the cell set using finite differences. The redeposition is then captured by adding up the byproducts in every step and using this information to generate a velocity field on the etched surface.
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- <img src="assets/redeposition.gif" width=700 style="background-color:white;">
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+ <img src="https://raw.githubusercontent.com/ViennaTools/ViennaPS/master/assets/redeposition.gif" width=700 style="background-color:white;">
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  </div>
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  ### GDS Mask Import Example
@@ -264,7 +268,7 @@ This [example](https://github.com/ViennaTools/ViennaPS/tree/master/examples/oxid
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  This [example](https://github.com/ViennaTools/ViennaPS/tree/master/examples/GDSReader) tests the full GDS mask import, blurring, rotation, scaling, and flipping as well as the level set conversion pipeline. Shown below is the result after applying proximity correction and extrusion on a simple test.
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- <img src="assets/masks.png" width=1200 style="background-color:white;">
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+ <img src="https://raw.githubusercontent.com/ViennaTools/ViennaPS/master/assets/masks.png" width=1200 style="background-color:white;">
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  </div>
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{viennaps-3.7.1.dist-info → viennaps-3.7.2.dist-info}/RECORD RENAMED
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4
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4
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5
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4
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5
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viennaps2d/.dylibs/libomp.dylib CHANGED
Binary file
viennaps2d/__init__.pyi CHANGED
@@ -1,6 +1,218 @@
1
- from .viennaps2d import *
2
- from _typeshed import Incomplete
1
+ """
3
2
 
4
- ptxPath: Incomplete
3
+ ViennaPS
4
+ ========
5
5
 
6
- def ReadConfigFile(fileName: str): ...
6
+ ViennaPS is a header-only C++ process simulation library,
7
+ which includes surface and volume representations,
8
+ a ray tracer, and physical models for the simulation of
9
+ microelectronic fabrication processes.
10
+ """
11
+
12
+ from __future__ import annotations
13
+ import sys as sys
14
+ import viennals2d as ls
15
+ from viennals2d.viennals2d import BoundaryConditionEnum as BoundaryType
16
+ from viennals2d.viennals2d import IntegrationSchemeEnum as IntegrationScheme
17
+ from viennaps2d.viennaps2d import AdvectionCallback
18
+ from viennaps2d.viennaps2d import AdvectionParameters
19
+ from viennaps2d.viennaps2d import AtomicLayerProcess
20
+ from viennaps2d.viennaps2d import BoxDistribution
21
+ from viennaps2d.viennaps2d import CF4O2Etching
22
+ from viennaps2d.viennaps2d import CF4O2Parameters
23
+ from viennaps2d.viennaps2d import CF4O2ParametersIons
24
+ from viennaps2d.viennaps2d import CF4O2ParametersMask
25
+ from viennaps2d.viennaps2d import CF4O2ParametersPassivation
26
+ from viennaps2d.viennaps2d import CF4O2ParametersSi
27
+ from viennaps2d.viennaps2d import CF4O2ParametersSiGe
28
+ from viennaps2d.viennaps2d import CSVFileProcess
29
+ from viennaps2d.viennaps2d import DenseCellSet
30
+ from viennaps2d.viennaps2d import DirectionalProcess
31
+ from viennaps2d.viennaps2d import Domain
32
+ from viennaps2d.viennaps2d import Domain3D
33
+ from viennaps2d.viennaps2d import DomainSetup
34
+ from viennaps2d.viennaps2d import Extrude
35
+ from viennaps2d.viennaps2d import FaradayCageEtching
36
+ from viennaps2d.viennaps2d import FaradayCageParameters
37
+ from viennaps2d.viennaps2d import FluorocarbonEtching
38
+ from viennaps2d.viennaps2d import FluorocarbonParameters
39
+ from viennaps2d.viennaps2d import FluorocarbonParametersIons
40
+ from viennaps2d.viennaps2d import FluorocarbonParametersMask
41
+ from viennaps2d.viennaps2d import FluorocarbonParametersPolymer
42
+ from viennaps2d.viennaps2d import FluorocarbonParametersSi
43
+ from viennaps2d.viennaps2d import FluorocarbonParametersSi3N4
44
+ from viennaps2d.viennaps2d import FluorocarbonParametersSiO2
45
+ from viennaps2d.viennaps2d import GDSGeometry
46
+ from viennaps2d.viennaps2d import GDSReader
47
+ from viennaps2d.viennaps2d import GeometryFactory
48
+ from viennaps2d.viennaps2d import HBrO2Etching
49
+ from viennaps2d.viennaps2d import HoleShape
50
+ from viennaps2d.viennaps2d import IBEParameters
51
+ from viennaps2d.viennaps2d import Interpolation
52
+ from viennaps2d.viennaps2d import IonBeamEtching
53
+ from viennaps2d.viennaps2d import IsotropicProcess
54
+ from viennaps2d.viennaps2d import Length
55
+ from viennaps2d.viennaps2d import LengthUnit
56
+ from viennaps2d.viennaps2d import LogLevel
57
+ from viennaps2d.viennaps2d import Logger
58
+ from viennaps2d.viennaps2d import MakeFin
59
+ from viennaps2d.viennaps2d import MakeHole
60
+ from viennaps2d.viennaps2d import MakePlane
61
+ from viennaps2d.viennaps2d import MakeStack
62
+ from viennaps2d.viennaps2d import MakeTrench
63
+ from viennaps2d.viennaps2d import Material
64
+ from viennaps2d.viennaps2d import MaterialMap
65
+ from viennaps2d.viennaps2d import MetaDataLevel
66
+ from viennaps2d.viennaps2d import MultiParticleProcess
67
+ from viennaps2d.viennaps2d import NormalizationType
68
+ from viennaps2d.viennaps2d import OxideRegrowth
69
+ from viennaps2d.viennaps2d import Planarize
70
+ from viennaps2d.viennaps2d import PlasmaEtchingParameters
71
+ from viennaps2d.viennaps2d import PlasmaEtchingParametersIons
72
+ from viennaps2d.viennaps2d import PlasmaEtchingParametersMask
73
+ from viennaps2d.viennaps2d import PlasmaEtchingParametersPassivation
74
+ from viennaps2d.viennaps2d import PlasmaEtchingParametersPolymer
75
+ from viennaps2d.viennaps2d import PlasmaEtchingParametersSubstrate
76
+ from viennaps2d.viennaps2d import Process
77
+ from viennaps2d.viennaps2d import ProcessModel
78
+ from viennaps2d.viennaps2d import ProcessParams
79
+ from viennaps2d.viennaps2d import RateGrid
80
+ from viennaps2d.viennaps2d import RateSet
81
+ from viennaps2d.viennaps2d import RayTracingParameters
82
+ from viennaps2d.viennaps2d import Reader
83
+ from viennaps2d.viennaps2d import SF6C4F8Etching
84
+ from viennaps2d.viennaps2d import SF6O2Etching
85
+ from viennaps2d.viennaps2d import SelectiveEpitaxy
86
+ from viennaps2d.viennaps2d import SingleParticleALD
87
+ from viennaps2d.viennaps2d import SingleParticleProcess
88
+ from viennaps2d.viennaps2d import SphereDistribution
89
+ from viennaps2d.viennaps2d import StencilLocalLaxFriedrichsScalar
90
+ from viennaps2d.viennaps2d import TEOSDeposition
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+ from viennaps2d.viennaps2d import TEOSPECVD
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+ from viennaps2d.viennaps2d import Time
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+ from viennaps2d.viennaps2d import TimeUnit
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+ from viennaps2d.viennaps2d import ToDiskMesh
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+ from viennaps2d.viennaps2d import WetEtching
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+ from viennaps2d.viennaps2d import Writer
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+ from viennaps2d.viennaps2d import constants
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+ from viennaps2d.viennaps2d import ray
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+ from viennaps2d.viennaps2d import setNumThreads
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+ from viennaps2d.viennaps2d import util
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+ from . import viennaps2d
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+
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+ __all__: list[str] = [
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+ "AdvectionCallback",
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+ "AdvectionParameters",
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+ "AtomicLayerProcess",
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+ "BoundaryType",
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+ "BoxDistribution",
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+ "CF4O2Etching",
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+ "CF4O2Parameters",
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+ "CF4O2ParametersIons",
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+ "CF4O2ParametersMask",
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+ "CF4O2ParametersPassivation",
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+ "CF4O2ParametersSi",
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+ "CF4O2ParametersSiGe",
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+ "CSVFileProcess",
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+ "D",
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+ "DenseCellSet",
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+ "DirectionalProcess",
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+ "Domain",
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+ "Domain3D",
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+ "DomainSetup",
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+ "Extrude",
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+ "FaradayCageEtching",
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+ "FaradayCageParameters",
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+ "FluorocarbonEtching",
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+ "FluorocarbonParameters",
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+ "FluorocarbonParametersIons",
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+ "FluorocarbonParametersMask",
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+ "FluorocarbonParametersPolymer",
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+ "FluorocarbonParametersSi",
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+ "FluorocarbonParametersSi3N4",
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+ "FluorocarbonParametersSiO2",
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+ "GDSGeometry",
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+ "GDSReader",
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+ "GeometryFactory",
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+ "HBrO2Etching",
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+ "HoleShape",
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+ "IBEParameters",
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+ "IntegrationScheme",
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+ "Interpolation",
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+ "IonBeamEtching",
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+ "IsotropicProcess",
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+ "Length",
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+ "LengthUnit",
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+ "LogLevel",
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+ "Logger",
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+ "MakeFin",
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+ "MakeHole",
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+ "MakePlane",
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+ "MakeStack",
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+ "MakeTrench",
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+ "Material",
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+ "MaterialMap",
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+ "MetaDataLevel",
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+ "MultiParticleProcess",
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+ "NormalizationType",
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+ "OxideRegrowth",
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+ "Planarize",
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+ "PlasmaEtchingParameters",
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+ "PlasmaEtchingParametersIons",
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+ "PlasmaEtchingParametersMask",
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+ "PlasmaEtchingParametersPassivation",
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+ "PlasmaEtchingParametersPolymer",
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+ "PlasmaEtchingParametersSubstrate",
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+ "Process",
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+ "ProcessModel",
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+ "ProcessParams",
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+ "RateGrid",
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+ "RateSet",
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+ "RayTracingParameters",
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+ "ReadConfigFile",
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+ "Reader",
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+ "SF6C4F8Etching",
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+ "SF6O2Etching",
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+ "SelectiveEpitaxy",
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+ "SingleParticleALD",
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+ "SingleParticleProcess",
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+ "SphereDistribution",
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+ "StencilLocalLaxFriedrichsScalar",
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+ "TEOSDeposition",
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+ "TEOSPECVD",
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+ "Time",
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+ "TimeUnit",
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+ "ToDiskMesh",
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+ "WetEtching",
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+ "Writer",
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+ "constants",
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+ "ls",
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+ "ray",
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+ "setNumThreads",
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+ "sys",
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+ "util",
194
+ "version",
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+ "viennaps2d",
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+ ]
197
+
198
+ def ReadConfigFile(fileName: str):
199
+ """
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+ Read a config file in the ViennaPS standard config file format.
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+
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+ Parameters
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+ ----------
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+ fileName: str
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+ Name of the config file.
206
+
207
+ Returns
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+ -------
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+ dict
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+ A dictionary containing the parameters from the config file.
211
+
212
+ """
213
+
214
+ def _module_ptx_path(): ...
215
+ def _windows_dll_path(): ...
216
+
217
+ D: int = 2
218
+ version: str = '"3.7.2"'