ViennaPS 3.6.1__cp311-cp311-macosx_11_0_arm64.whl → 3.7.1__cp311-cp311-macosx_11_0_arm64.whl

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@@ -1,13 +1,8 @@
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  Metadata-Version: 2.2
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  Name: ViennaPS
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- Version: 3.6.1
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- Summary: Semiconductor fabrication process simulation library
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- License: Parts of the code (located in the 'external/' subfolder) have different
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- licenses. The individual licenses apply for this specific part. Please consult
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- the respective LICENSE files.
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-
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-
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- Copyright (c) 2015 Institute for Microelectronics, TU Wien.
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+ Version: 3.7.1
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+ Summary: Topography simulation library for microelectronic fabrication processes
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+ License: Copyright (c) 2025 Institute for Microelectronics, TU Wien.
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  Permission is hereby granted, free of charge, to any person obtaining a copy
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  of this software and associated documentation files (the "Software"), to deal
@@ -31,7 +26,7 @@ Project-URL: Homepage, https://viennatools.github.io/ViennaPS/
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  Project-URL: Documentation, https://viennatools.github.io/ViennaPS/
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  Project-URL: Repository, https://github.com/ViennaTools/ViennaPS
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  Project-URL: Issues, https://github.com/ViennaTools/ViennaPS/issues
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- Requires-Dist: ViennaLS>=4.4.0
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+ Requires-Dist: ViennaLS>=4.5.0
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  Description-Content-Type: text/markdown
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  <div align="center">
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  </div>
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- ViennaPS is a header-only C++ library for simulating microelectronic fabrication processes. It combines surface and volume representations with advanced level-set methods and Monte Carlo flux calculations, powered by high-performance ray tracing. Users can develop custom models, use pre-configured physical models, or leverage emulation for flexible and efficient process simulations.
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-
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- ViennaPS is designed to be easily integrated into existing C++ projects and provides Python bindings for seamless use in Python environments. The library is under active development and is continuously improved to meet the evolving needs of process simulation in microelectronics.
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+ ViennaPS is a header-only C++ library for topography simulation in microelectronic fabrication processes. It models the evolution of 2D and 3D surfaces during etching, deposition, and related steps, combining advanced level-set methods for surface evolution with Monte Carlo ray tracing for flux calculation. This allows accurate, feature-scale simulation of complex fabrication geometries.
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- > [!NOTE]
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- > ViennaPS is under heavy development and improved daily. If you do have suggestions or find bugs, please let us know!
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+ ViennaPS supports both physical process models and fast emulation approaches, enabling flexible and efficient development of semiconductor processes. It can be easily integrated into existing C++ projects and also provides Python bindings for use in Python-based workflows. The library is actively developed and continuously improved to address the needs of process and topography simulation in microelectronics.
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  ## Quick Start
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@@ -66,6 +58,10 @@ To use ViennaPS in C++, clone the repository and follow the installation steps b
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  For full documentation, visit [ViennaPS Documentation](https://viennatools.github.io/ViennaPS/).
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  ## Releases
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+
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+ > [!NOTE]
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+ > ViennaPS is under heavy development and improved daily. If you do have suggestions or find bugs, please let us know!
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+
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  Releases are tagged on the master branch and available in the [releases section](https://github.com/ViennaTools/ViennaPS/releases).
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  ViennaPS is also available on the [Python Package Index (PyPI)](https://pypi.org/project/ViennaPS/) for most platforms.
@@ -105,7 +101,7 @@ If the dependencies are not found on the system, they will be built from source.
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  ## Installing
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  > [!NOTE]
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- > __For more detailed installation instructions and troubleshooting tips, please refer to the ViennaPS [documentation](https://viennatools.github.io/ViennaPS/inst/).__
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+ > __For more detailed installation instructions and troubleshooting tips, have a look at the ViennaPS [documentation](https://viennatools.github.io/ViennaPS/inst/).__
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  ViennaPS is a header-only library, so no formal installation is required. However, following the steps below helps organize and manage dependencies more effectively:
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@@ -117,7 +113,7 @@ cmake -B build && cmake --build build
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  cmake --install build --prefix "/path/to/your/custom/install/"
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  ```
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- This will install the necessary headers and CMake files to the specified path. If `--prefix` is not specified, it will be installed to the standard path for your system, usually `/usr/local/` .
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+ This will install the necessary headers and CMake files to the specified path. If `--prefix` is not specified, it will be installed to the standard path for your system, usually `/usr/local/` on Linux-based systems.
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  ## Building the Python package
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@@ -130,7 +126,8 @@ cd ViennaPS
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  pip install .
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  ```
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- > Some features of the ViennaPS Python module require the ViennaLS Python module. It is therefore recommended to additionally install the ViennaLS Python module on your system. Instructions to do so can be found in the [ViennaLS Git Repository](https://github.com/ViennaTools/viennals).
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+ > Some features of the ViennaPS Python module depend on the ViennaLS Python module. You’ll need to install ViennaLS separately instructions are available in the [ViennaLS GitHub repository](https://github.com/ViennaTools/ViennaLS).
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+ > Note: A locally built ViennaPS Python module is typically not compatible with the ViennaLS package from PyPI. For details and troubleshooting, see [this guide](https://viennatools.github.io/ViennaPS/inst/troubleshooting.html#python-importerror).
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  ## Using the Python package
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@@ -151,7 +148,7 @@ We recommend using [CPM.cmake](https://github.com/cpm-cmake/CPM.cmake) to consum
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  * Installation with CPM
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  ```cmake
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- CPMAddPackage("gh:viennatools/viennaps@3.6.1")
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+ CPMAddPackage("gh:viennatools/viennaps@3.7.1")
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  ```
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  * With a local installation
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  target_link_libraries(${PROJECT_NAME} PUBLIC ViennaTools::ViennaPS)
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  ```
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+ ### Shared Library
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+ In order to save build time during development, dynamically linked shared libraries can be used if ViennaPS was built with them. This is done by precompiling the most common template specialisations. In order to use shared libraries, use
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+
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+ ```bash
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+ cmake -B build -DVIENNALS_PRECOMPILE_HEADERS=ON
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+ ```
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+
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+ If ViennaPS was built with shared libraries and you use ViennaPS in your project (see above), CMake will automatically link them to your project.
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  ## GPU Acceleration (Experimental)
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  As of version 3.4.0, ViennaPS supports GPU acceleration for the ray tracing part of the library. This feature is still experimental and may not work on all systems. Details on how to enable GPU functionality can be found in the [documentation](https://viennatools.github.io/ViennaPS/inst/).
@@ -200,9 +207,9 @@ This [example](https://github.com/ViennaTools/ViennaPS/tree/master/examples/tren
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  <img src="assets/deposition.svg" width=700 style="background-color:white;">
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  </div>
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- ### SF<sub>6</sub>O<sub>2</sub> Hole Etching
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+ ### SF<sub>6</sub>/O<sub>2</sub> Hole Etching
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- This [example](https://github.com/ViennaTools/ViennaPS/tree/master/examples/holeEtching) demonstrates a hole etching process with a SF<sub>6</sub>O<sub>2</sub> plasma etching chemistry with ion bombardment. The process is controlled by various parameters, including geometry and plasma conditions, which can be adjusted in the __config.txt__ file.
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+ This [example](https://github.com/ViennaTools/ViennaPS/tree/master/examples/holeEtching) demonstrates a hole etching process with a SF<sub>6</sub>/O<sub>2</sub> plasma etching chemistry with ion bombardment. The process is controlled by various parameters, including geometry and plasma conditions, which can be adjusted in the __config.txt__ file.
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  The image presents the results of different flux configurations, as tested in _testFluxes.py_. Each structure represents a variation in flux conditions, leading to differences in hole shape, depth, and profile characteristics. The variations highlight the influence of ion and neutral fluxes on the etching process.
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@@ -228,13 +235,20 @@ This comparison highlights the trade-offs between computational efficiency and p
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  <img src="assets/bosch_process.png" width=700 style="background-color:white;">
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  </div>
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+ ### Wet Etching
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+ This [example](https://github.com/ViennaTools/ViennaPS/tree/master/examples/cantileverWetEtching) demonstrates the wet etching process, specifically focusing on the cantilever structure. The simulation captures the etching dynamics and the influence of crystallographic directions on the etch profile.
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- ### Anisotropic Processes
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+ <div align="center">
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+ <img src="assets/wet_etching.png" width=700 style="background-color:white;">
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+ </div>
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+
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+ ### Selective Epitaxy
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- In the anisotropic process model, the etch or deposition rates are dependent on the crystallographic directions of the surface. This enables the accurate modeling of intricate processes like [epitaxial growth](https://github.com/ViennaTools/ViennaPS/tree/master/examples/selectiveEpitaxy) or [anisotropic wet etching](https://github.com/ViennaTools/ViennaPS/tree/master/examples/cantileverWetEtching). Basic examples, illustrating these processes are provided with the library and shown below.
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+ This [example](https://github.com/ViennaTools/ViennaPS/tree/master/examples/selectiveEpitaxy) demonstrates the selective epitaxy process, focusing on the growth of SiGe on a Si substrate. Similar to wet etching, the process is influenced by crystallographic directions, which can be adjusted in the __config.txt__ file. The simulation captures the growth dynamics and the resulting SiGe structure.
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  <div align="center">
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- <img src="assets/anisotropic_process.svg" width=700 style="background-color:white;">
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+ <img src="assets/epitaxy.png" width=700 style="background-color:white;">
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  </div>
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  ### Redeposition During Selective Etching
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  ViennaPS was developed under the aegis of the 'Institute for Microelectronics' at the 'TU Wien'.
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  http://www.iue.tuwien.ac.at/
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- License
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- --------------------------
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- See file LICENSE in the base directory.
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+ ## License
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+
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+ ViennaPS is licensed under the [MIT License](./LICENSE).
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+ Some third-party libraries used by ViennaPS are under their own permissive licenses (MIT, BSD, Apache-2.0).
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+ See [`THIRD_PARTY_LICENSES.md`](./THIRD_PARTY_LICENSES.md) for details.
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4
-
5
-
6
- Copyright (c) 2015 Institute for Microelectronics, TU Wien.
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7
2
 
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3
  Permission is hereby granted, free of charge, to any person obtaining a copy
9
4
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@@ -2,7 +2,7 @@
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3
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4
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- set(CMAKE_INSTALL_PREFIX "/var/folders/y6/nj790rtn62lfktb1sh__79hc0000gn/T/tmp3unfl6bw/wheel/platlib")
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3
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4
4
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5
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viennaps2d/viennaps2d.pyi CHANGED
@@ -22,23 +22,8 @@ class AdvectionParameters:
22
22
  timeStepRatio: float
23
23
  velocityOutput: bool
24
24
  def __init__(self) -> None: ...
25
-
26
- class AnisotropicProcess(ProcessModel):
27
- @overload
28
- def __init__(
29
- self, materials: collections.abc.Sequence[tuple[Material, typing.SupportsFloat]]
30
- ) -> None: ...
31
- @overload
32
- def __init__(
33
- self,
34
- direction100,
35
- direction010,
36
- rate100: typing.SupportsFloat,
37
- rate110: typing.SupportsFloat,
38
- rate111: typing.SupportsFloat,
39
- rate311: typing.SupportsFloat,
40
- materials: collections.abc.Sequence[tuple[Material, typing.SupportsFloat]],
41
- ) -> None: ...
25
+ def toMetaData(self) -> dict[str, list[float]]: ...
26
+ def toMetaDataString(self) -> str: ...
42
27
 
43
28
  class AtomicLayerProcess:
44
29
  def __init__(self) -> None: ...
@@ -321,7 +306,7 @@ class Domain:
321
306
  material: Material,
322
307
  wrapLowerLevelSet: bool = ...,
323
308
  ) -> None: ...
324
- def print(self, arg0, arg1: bool) -> None: ...
309
+ def print(self, hrleInfo: bool = ...) -> None: ...
325
310
  def removeLevelSet(self, arg0: typing.SupportsInt, arg1: bool) -> None: ...
326
311
  def removeMaterial(self, arg0: Material) -> None: ...
327
312
  def removeTopLevelSet(self) -> None: ...
@@ -375,7 +360,7 @@ class Domain3D:
375
360
  def getSetup(self, *args, **kwargs): ...
376
361
  def insertNextLevelSet(self, *args, **kwargs): ...
377
362
  def insertNextLevelSetAsMaterial(self, *args, **kwargs): ...
378
- def print(self, arg0, arg1: bool) -> None: ...
363
+ def print(self, hrleInfo: bool = ...) -> None: ...
379
364
  def removeLevelSet(self, arg0: typing.SupportsInt, arg1: bool) -> None: ...
380
365
  def removeMaterial(self, arg0: Material) -> None: ...
381
366
  def removeTopLevelSet(self) -> None: ...
@@ -637,9 +622,9 @@ class HBrO2Etching(ProcessModel):
637
622
 
638
623
  class HoleShape:
639
624
  __members__: ClassVar[dict] = ... # read-only
640
- Full: ClassVar[HoleShape] = ...
641
- Half: ClassVar[HoleShape] = ...
642
- Quarter: ClassVar[HoleShape] = ...
625
+ FULL: ClassVar[HoleShape] = ...
626
+ HALF: ClassVar[HoleShape] = ...
627
+ QUARTER: ClassVar[HoleShape] = ...
643
628
  __entries: ClassVar[dict] = ...
644
629
  def __init__(self, value: typing.SupportsInt) -> None: ...
645
630
  def __eq__(self, other: object) -> bool: ...
@@ -765,11 +750,17 @@ class Logger:
765
750
  ) -> Logger: ...
766
751
  def addWarning(self, arg0: str) -> Logger: ...
767
752
  @staticmethod
753
+ def appendToLogFile(arg0: str) -> bool: ...
754
+ @staticmethod
755
+ def closeLogFile() -> None: ...
756
+ @staticmethod
768
757
  def getInstance() -> Logger: ...
769
758
  @staticmethod
770
759
  def getLogLevel() -> int: ...
771
760
  def print(self) -> None: ...
772
761
  @staticmethod
762
+ def setLogFile(arg0: str) -> bool: ...
763
+ @staticmethod
773
764
  def setLogLevel(arg0: LogLevel) -> None: ...
774
765
 
775
766
  class MakeFin:
@@ -972,8 +963,8 @@ class MaterialMap:
972
963
 
973
964
  class MetaDataLevel:
974
965
  __members__: ClassVar[dict] = ... # read-only
975
- DOMAIN: ClassVar[MetaDataLevel] = ...
976
966
  FULL: ClassVar[MetaDataLevel] = ...
967
+ GRID: ClassVar[MetaDataLevel] = ...
977
968
  NONE: ClassVar[MetaDataLevel] = ...
978
969
  PROCESS: ClassVar[MetaDataLevel] = ...
979
970
  __entries: ClassVar[dict] = ...
@@ -1238,13 +1229,15 @@ class RayTracingParameters:
1238
1229
  sourceDirection: Incomplete
1239
1230
  useRandomSeeds: bool
1240
1231
  def __init__(self) -> None: ...
1232
+ def toMetaData(self) -> dict[str, list[float]]: ...
1233
+ def toMetaDataString(self) -> str: ...
1241
1234
 
1242
1235
  class Reader:
1243
1236
  @overload
1244
1237
  def __init__(self) -> None: ...
1245
1238
  @overload
1246
1239
  def __init__(self, fileName: str) -> None: ...
1247
- def apply(self) -> Domain: ...
1240
+ def apply(self) -> None: ...
1248
1241
  def setFileName(self, arg0: str) -> None: ...
1249
1242
 
1250
1243
  class SF6C4F8Etching(ProcessModel):
@@ -1289,6 +1282,14 @@ class SF6O2Etching(ProcessModel):
1289
1282
  def getParameters(self) -> PlasmaEtchingParameters: ...
1290
1283
  def setParameters(self, arg0: PlasmaEtchingParameters) -> None: ...
1291
1284
 
1285
+ class SelectiveEpitaxy(ProcessModel):
1286
+ def __init__(
1287
+ self,
1288
+ materialRates: collections.abc.Sequence[tuple[Material, typing.SupportsFloat]],
1289
+ rate111: typing.SupportsFloat = ...,
1290
+ rate100: typing.SupportsFloat = ...,
1291
+ ) -> None: ...
1292
+
1292
1293
  class SingleParticleALD(ProcessModel):
1293
1294
  def __init__(
1294
1295
  self,
@@ -1341,6 +1342,11 @@ class SphereDistribution(ProcessModel):
1341
1342
  self, radius: typing.SupportsFloat, gridDelta: typing.SupportsFloat
1342
1343
  ) -> None: ...
1343
1344
 
1345
+ class StencilLocalLaxFriedrichsScalar:
1346
+ def __init__(self, *args, **kwargs) -> None: ...
1347
+ @staticmethod
1348
+ def setMaxDissipation(maxDissipation: typing.SupportsFloat) -> None: ...
1349
+
1344
1350
  class TEOSDeposition(ProcessModel):
1345
1351
  def __init__(
1346
1352
  self,
@@ -1385,6 +1391,24 @@ class ToDiskMesh:
1385
1391
  def setDomain(self, arg0: Domain) -> None: ...
1386
1392
  def setMesh(self, arg0: viennals2d.viennals2d.Mesh) -> None: ...
1387
1393
 
1394
+ class WetEtching(ProcessModel):
1395
+ @overload
1396
+ def __init__(
1397
+ self,
1398
+ materialRates: collections.abc.Sequence[tuple[Material, typing.SupportsFloat]],
1399
+ ) -> None: ...
1400
+ @overload
1401
+ def __init__(
1402
+ self,
1403
+ direction100,
1404
+ direction010,
1405
+ rate100: typing.SupportsFloat,
1406
+ rate110: typing.SupportsFloat,
1407
+ rate111: typing.SupportsFloat,
1408
+ rate311: typing.SupportsFloat,
1409
+ materialRates: collections.abc.Sequence[tuple[Material, typing.SupportsFloat]],
1410
+ ) -> None: ...
1411
+
1388
1412
  class Writer:
1389
1413
  @overload
1390
1414
  def __init__(self) -> None: ...
Binary file
viennaps3d/viennaps3d.pyi CHANGED
@@ -22,23 +22,8 @@ class AdvectionParameters:
22
22
  timeStepRatio: float
23
23
  velocityOutput: bool
24
24
  def __init__(self) -> None: ...
25
-
26
- class AnisotropicProcess(ProcessModel):
27
- @overload
28
- def __init__(
29
- self, materials: collections.abc.Sequence[tuple[Material, typing.SupportsFloat]]
30
- ) -> None: ...
31
- @overload
32
- def __init__(
33
- self,
34
- direction100,
35
- direction010,
36
- rate100: typing.SupportsFloat,
37
- rate110: typing.SupportsFloat,
38
- rate111: typing.SupportsFloat,
39
- rate311: typing.SupportsFloat,
40
- materials: collections.abc.Sequence[tuple[Material, typing.SupportsFloat]],
41
- ) -> None: ...
25
+ def toMetaData(self) -> dict[str, list[float]]: ...
26
+ def toMetaDataString(self) -> str: ...
42
27
 
43
28
  class AtomicLayerProcess:
44
29
  def __init__(self) -> None: ...
@@ -314,7 +299,7 @@ class Domain:
314
299
  material: Material,
315
300
  wrapLowerLevelSet: bool = ...,
316
301
  ) -> None: ...
317
- def print(self, arg0, arg1: bool) -> None: ...
302
+ def print(self, hrleInfo: bool = ...) -> None: ...
318
303
  def removeLevelSet(self, arg0: typing.SupportsInt, arg1: bool) -> None: ...
319
304
  def removeMaterial(self, arg0: Material) -> None: ...
320
305
  def removeTopLevelSet(self) -> None: ...
@@ -562,9 +547,9 @@ class HBrO2Etching(ProcessModel):
562
547
 
563
548
  class HoleShape:
564
549
  __members__: ClassVar[dict] = ... # read-only
565
- Full: ClassVar[HoleShape] = ...
566
- Half: ClassVar[HoleShape] = ...
567
- Quarter: ClassVar[HoleShape] = ...
550
+ FULL: ClassVar[HoleShape] = ...
551
+ HALF: ClassVar[HoleShape] = ...
552
+ QUARTER: ClassVar[HoleShape] = ...
568
553
  __entries: ClassVar[dict] = ...
569
554
  def __init__(self, value: typing.SupportsInt) -> None: ...
570
555
  def __eq__(self, other: object) -> bool: ...
@@ -690,11 +675,17 @@ class Logger:
690
675
  ) -> Logger: ...
691
676
  def addWarning(self, arg0: str) -> Logger: ...
692
677
  @staticmethod
678
+ def appendToLogFile(arg0: str) -> bool: ...
679
+ @staticmethod
680
+ def closeLogFile() -> None: ...
681
+ @staticmethod
693
682
  def getInstance() -> Logger: ...
694
683
  @staticmethod
695
684
  def getLogLevel() -> int: ...
696
685
  def print(self) -> None: ...
697
686
  @staticmethod
687
+ def setLogFile(arg0: str) -> bool: ...
688
+ @staticmethod
698
689
  def setLogLevel(arg0: LogLevel) -> None: ...
699
690
 
700
691
  class MakeFin:
@@ -897,8 +888,8 @@ class MaterialMap:
897
888
 
898
889
  class MetaDataLevel:
899
890
  __members__: ClassVar[dict] = ... # read-only
900
- DOMAIN: ClassVar[MetaDataLevel] = ...
901
891
  FULL: ClassVar[MetaDataLevel] = ...
892
+ GRID: ClassVar[MetaDataLevel] = ...
902
893
  NONE: ClassVar[MetaDataLevel] = ...
903
894
  PROCESS: ClassVar[MetaDataLevel] = ...
904
895
  __entries: ClassVar[dict] = ...
@@ -1163,13 +1154,15 @@ class RayTracingParameters:
1163
1154
  sourceDirection: Incomplete
1164
1155
  useRandomSeeds: bool
1165
1156
  def __init__(self) -> None: ...
1157
+ def toMetaData(self) -> dict[str, list[float]]: ...
1158
+ def toMetaDataString(self) -> str: ...
1166
1159
 
1167
1160
  class Reader:
1168
1161
  @overload
1169
1162
  def __init__(self) -> None: ...
1170
1163
  @overload
1171
1164
  def __init__(self, fileName: str) -> None: ...
1172
- def apply(self) -> Domain: ...
1165
+ def apply(self) -> None: ...
1173
1166
  def setFileName(self, arg0: str) -> None: ...
1174
1167
 
1175
1168
  class SF6C4F8Etching(ProcessModel):
@@ -1214,6 +1207,14 @@ class SF6O2Etching(ProcessModel):
1214
1207
  def getParameters(self) -> PlasmaEtchingParameters: ...
1215
1208
  def setParameters(self, arg0: PlasmaEtchingParameters) -> None: ...
1216
1209
 
1210
+ class SelectiveEpitaxy(ProcessModel):
1211
+ def __init__(
1212
+ self,
1213
+ materialRates: collections.abc.Sequence[tuple[Material, typing.SupportsFloat]],
1214
+ rate111: typing.SupportsFloat = ...,
1215
+ rate100: typing.SupportsFloat = ...,
1216
+ ) -> None: ...
1217
+
1217
1218
  class SingleParticleALD(ProcessModel):
1218
1219
  def __init__(
1219
1220
  self,
@@ -1266,6 +1267,11 @@ class SphereDistribution(ProcessModel):
1266
1267
  self, radius: typing.SupportsFloat, gridDelta: typing.SupportsFloat
1267
1268
  ) -> None: ...
1268
1269
 
1270
+ class StencilLocalLaxFriedrichsScalar:
1271
+ def __init__(self, *args, **kwargs) -> None: ...
1272
+ @staticmethod
1273
+ def setMaxDissipation(maxDissipation: typing.SupportsFloat) -> None: ...
1274
+
1269
1275
  class TEOSDeposition(ProcessModel):
1270
1276
  def __init__(
1271
1277
  self,
@@ -1310,6 +1316,24 @@ class ToDiskMesh:
1310
1316
  def setDomain(self, arg0: Domain) -> None: ...
1311
1317
  def setMesh(self, arg0: viennals3d.viennals3d.Mesh) -> None: ...
1312
1318
 
1319
+ class WetEtching(ProcessModel):
1320
+ @overload
1321
+ def __init__(
1322
+ self,
1323
+ materialRates: collections.abc.Sequence[tuple[Material, typing.SupportsFloat]],
1324
+ ) -> None: ...
1325
+ @overload
1326
+ def __init__(
1327
+ self,
1328
+ direction100,
1329
+ direction010,
1330
+ rate100: typing.SupportsFloat,
1331
+ rate110: typing.SupportsFloat,
1332
+ rate111: typing.SupportsFloat,
1333
+ rate311: typing.SupportsFloat,
1334
+ materialRates: collections.abc.Sequence[tuple[Material, typing.SupportsFloat]],
1335
+ ) -> None: ...
1336
+
1313
1337
  class Writer:
1314
1338
  @overload
1315
1339
  def __init__(self) -> None: ...