ViennaPS 3.6.1__cp311-cp311-macosx_11_0_arm64.whl → 3.7.0__cp311-cp311-macosx_11_0_arm64.whl
This diff represents the content of publicly available package versions that have been released to one of the supported registries. The information contained in this diff is provided for informational purposes only and reflects changes between package versions as they appear in their respective public registries.
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- {viennaps-3.6.1.dist-info → viennaps-3.7.0.dist-info}/METADATA +30 -23
- {viennaps-3.6.1.dist-info → viennaps-3.7.0.dist-info}/RECORD +24 -24
- {viennaps-3.6.1.dist-info → viennaps-3.7.0.dist-info}/licenses/LICENSE +1 -6
- viennaps.libs/cmake_install.cmake +1 -1
- viennaps.libs/common/cmake_install.cmake +1 -1
- viennaps.libs/common/lexers/cmake_install.cmake +1 -1
- viennaps.libs/common/math/cmake_install.cmake +1 -1
- viennaps.libs/common/simd/cmake_install.cmake +1 -1
- viennaps.libs/common/sys/cmake_install.cmake +1 -1
- viennaps.libs/common/tasking/cmake_install.cmake +1 -1
- viennaps.libs/kernels/cmake_install.cmake +1 -1
- viennaps.libs/libembree_avx2.a +0 -0
- viennaps.libs/liblexers.a +0 -0
- viennaps.libs/libmath.a +0 -0
- viennaps.libs/libsimd.a +0 -0
- viennaps.libs/libsys.a +0 -0
- viennaps.libs/libtasking.a +0 -0
- viennaps.libs/tests/cmake_install.cmake +1 -1
- viennaps2d/.dylibs/libomp.dylib +0 -0
- viennaps2d/viennaps2d.cpython-311-darwin.so +0 -0
- viennaps2d/viennaps2d.pyi +48 -24
- viennaps3d/viennaps3d.cpython-311-darwin.so +0 -0
- viennaps3d/viennaps3d.pyi +47 -23
- {viennaps-3.6.1.dist-info → viennaps-3.7.0.dist-info}/WHEEL +0 -0
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Metadata-Version: 2.2
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Name: ViennaPS
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Version: 3.
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Version: 3.7.0
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Summary: Semiconductor fabrication process simulation library
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License:
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licenses. The individual licenses apply for this specific part. Please consult
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the respective LICENSE files.
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Copyright (c) 2015 Institute for Microelectronics, TU Wien.
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License: Copyright (c) 2025 Institute for Microelectronics, TU Wien.
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Permission is hereby granted, free of charge, to any person obtaining a copy
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of this software and associated documentation files (the "Software"), to deal
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Project-URL: Documentation, https://viennatools.github.io/ViennaPS/
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Project-URL: Repository, https://github.com/ViennaTools/ViennaPS
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Project-URL: Issues, https://github.com/ViennaTools/ViennaPS/issues
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Requires-Dist: ViennaLS>=4.
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Requires-Dist: ViennaLS>=4.5.0
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Description-Content-Type: text/markdown
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<div align="center">
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</div>
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ViennaPS is a header-only C++ library for simulating microelectronic fabrication processes. It combines surface and volume representations with advanced level-set methods and Monte Carlo flux calculations, powered by high-performance ray tracing. Users can develop custom models, use pre-configured physical models, or
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ViennaPS is a header-only C++ library for simulating microelectronic fabrication processes. It combines surface and volume representations with advanced level-set methods and Monte Carlo flux calculations, powered by high-performance ray tracing. Users can develop custom models, use pre-configured physical models, or use fast emulation models for flexible and efficient process development.
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ViennaPS is designed to be easily integrated into existing C++ projects and provides Python bindings for seamless use in Python environments. The library is under active development and is continuously improved to meet the evolving needs of process simulation in microelectronics.
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> [!NOTE]
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> ViennaPS is under heavy development and improved daily. If you do have suggestions or find bugs, please let us know!
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## Quick Start
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To install ViennaPS for Python, simply run:
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For full documentation, visit [ViennaPS Documentation](https://viennatools.github.io/ViennaPS/).
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## Releases
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> ViennaPS is under heavy development and improved daily. If you do have suggestions or find bugs, please let us know!
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Releases are tagged on the master branch and available in the [releases section](https://github.com/ViennaTools/ViennaPS/releases).
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ViennaPS is also available on the [Python Package Index (PyPI)](https://pypi.org/project/ViennaPS/) for most platforms.
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cmake --install build --prefix "/path/to/your/custom/install/"
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```
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This will install the necessary headers and CMake files to the specified path. If `--prefix` is not specified, it will be installed to the standard path for your system, usually `/usr/local/` .
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This will install the necessary headers and CMake files to the specified path. If `--prefix` is not specified, it will be installed to the standard path for your system, usually `/usr/local/` on Linux-based systems.
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## Building the Python package
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pip install .
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```
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> Some features of the ViennaPS Python module
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> Some features of the ViennaPS Python module depend on the ViennaLS Python module. You’ll need to install ViennaLS separately — instructions are available in the [ViennaLS GitHub repository](https://github.com/ViennaTools/ViennaLS).
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> Note: A locally built ViennaPS Python module is typically not compatible with the ViennaLS package from PyPI. For details and troubleshooting, see [this guide](https://viennatools.github.io/ViennaPS/inst/troubleshooting.html#python-importerror).
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## Using the Python package
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* Installation with CPM
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```cmake
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CPMAddPackage("gh:viennatools/viennaps@3.
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CPMAddPackage("gh:viennatools/viennaps@3.7.0")
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```
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* With a local installation
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<img src="assets/deposition.svg" width=700 style="background-color:white;">
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</div>
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### SF<sub>6</sub
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### SF<sub>6</sub>/O<sub>2</sub> Hole Etching
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This [example](https://github.com/ViennaTools/ViennaPS/tree/master/examples/holeEtching) demonstrates a hole etching process with a SF<sub>6</sub
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This [example](https://github.com/ViennaTools/ViennaPS/tree/master/examples/holeEtching) demonstrates a hole etching process with a SF<sub>6</sub>/O<sub>2</sub> plasma etching chemistry with ion bombardment. The process is controlled by various parameters, including geometry and plasma conditions, which can be adjusted in the __config.txt__ file.
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The image presents the results of different flux configurations, as tested in _testFluxes.py_. Each structure represents a variation in flux conditions, leading to differences in hole shape, depth, and profile characteristics. The variations highlight the influence of ion and neutral fluxes on the etching process.
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### Wet Etching
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This [example](https://github.com/ViennaTools/ViennaPS/tree/master/examples/cantileverWetEtching) demonstrates the wet etching process, specifically focusing on the cantilever structure. The simulation captures the etching dynamics and the influence of crystallographic directions on the etch profile.
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### Selective Epitaxy
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This [example](https://github.com/ViennaTools/ViennaPS/tree/master/examples/selectiveEpitaxy) demonstrates the selective epitaxy process, focusing on the growth of SiGe on a Si substrate. Similar to wet etching, the process is influenced by crystallographic directions, which can be adjusted in the __config.txt__ file. The simulation captures the growth dynamics and the resulting SiGe structure.
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</div>
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### Redeposition During Selective Etching
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ViennaPS was developed under the aegis of the 'Institute for Microelectronics' at the 'TU Wien'.
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http://www.iue.tuwien.ac.at/
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License
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## License
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ViennaPS is licensed under the [MIT License](./LICENSE).
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Some third-party libraries used by ViennaPS are under their own permissive licenses (MIT, BSD, Apache-2.0).
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See [`THIRD_PARTY_LICENSES.md`](./THIRD_PARTY_LICENSES.md) for details.
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viennaps-3.6.1.dist-info/RECORD,,
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viennaps-3.6.1.dist-info/METADATA,sha256=iDyewEL7MMl2Vr6FHXHS_Yl27owpxQb0YSWIEYdk4sY,13542
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viennaps-3.6.1.dist-info/licenses/LICENSE,sha256=MNYkmq2gcK-pjelXoZxaEkGjd1EvoFMfCZpVJGf8PeI,1272
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def print(self,
|
|
363
|
+
def print(self, hrleInfo: bool = ...) -> None: ...
|
|
379
364
|
def removeLevelSet(self, arg0: typing.SupportsInt, arg1: bool) -> None: ...
|
|
380
365
|
def removeMaterial(self, arg0: Material) -> None: ...
|
|
381
366
|
def removeTopLevelSet(self) -> None: ...
|
|
@@ -637,9 +622,9 @@ class HBrO2Etching(ProcessModel):
|
|
|
637
622
|
|
|
638
623
|
class HoleShape:
|
|
639
624
|
__members__: ClassVar[dict] = ... # read-only
|
|
640
|
-
|
|
641
|
-
|
|
642
|
-
|
|
625
|
+
FULL: ClassVar[HoleShape] = ...
|
|
626
|
+
HALF: ClassVar[HoleShape] = ...
|
|
627
|
+
QUARTER: ClassVar[HoleShape] = ...
|
|
643
628
|
__entries: ClassVar[dict] = ...
|
|
644
629
|
def __init__(self, value: typing.SupportsInt) -> None: ...
|
|
645
630
|
def __eq__(self, other: object) -> bool: ...
|
|
@@ -765,11 +750,17 @@ class Logger:
|
|
|
765
750
|
) -> Logger: ...
|
|
766
751
|
def addWarning(self, arg0: str) -> Logger: ...
|
|
767
752
|
@staticmethod
|
|
753
|
+
def appendToLogFile(arg0: str) -> bool: ...
|
|
754
|
+
@staticmethod
|
|
755
|
+
def closeLogFile() -> None: ...
|
|
756
|
+
@staticmethod
|
|
768
757
|
def getInstance() -> Logger: ...
|
|
769
758
|
@staticmethod
|
|
770
759
|
def getLogLevel() -> int: ...
|
|
771
760
|
def print(self) -> None: ...
|
|
772
761
|
@staticmethod
|
|
762
|
+
def setLogFile(arg0: str) -> bool: ...
|
|
763
|
+
@staticmethod
|
|
773
764
|
def setLogLevel(arg0: LogLevel) -> None: ...
|
|
774
765
|
|
|
775
766
|
class MakeFin:
|
|
@@ -972,8 +963,8 @@ class MaterialMap:
|
|
|
972
963
|
|
|
973
964
|
class MetaDataLevel:
|
|
974
965
|
__members__: ClassVar[dict] = ... # read-only
|
|
975
|
-
DOMAIN: ClassVar[MetaDataLevel] = ...
|
|
976
966
|
FULL: ClassVar[MetaDataLevel] = ...
|
|
967
|
+
GRID: ClassVar[MetaDataLevel] = ...
|
|
977
968
|
NONE: ClassVar[MetaDataLevel] = ...
|
|
978
969
|
PROCESS: ClassVar[MetaDataLevel] = ...
|
|
979
970
|
__entries: ClassVar[dict] = ...
|
|
@@ -1238,13 +1229,15 @@ class RayTracingParameters:
|
|
|
1238
1229
|
sourceDirection: Incomplete
|
|
1239
1230
|
useRandomSeeds: bool
|
|
1240
1231
|
def __init__(self) -> None: ...
|
|
1232
|
+
def toMetaData(self) -> dict[str, list[float]]: ...
|
|
1233
|
+
def toMetaDataString(self) -> str: ...
|
|
1241
1234
|
|
|
1242
1235
|
class Reader:
|
|
1243
1236
|
@overload
|
|
1244
1237
|
def __init__(self) -> None: ...
|
|
1245
1238
|
@overload
|
|
1246
1239
|
def __init__(self, fileName: str) -> None: ...
|
|
1247
|
-
def apply(self) ->
|
|
1240
|
+
def apply(self) -> None: ...
|
|
1248
1241
|
def setFileName(self, arg0: str) -> None: ...
|
|
1249
1242
|
|
|
1250
1243
|
class SF6C4F8Etching(ProcessModel):
|
|
@@ -1289,6 +1282,14 @@ class SF6O2Etching(ProcessModel):
|
|
|
1289
1282
|
def getParameters(self) -> PlasmaEtchingParameters: ...
|
|
1290
1283
|
def setParameters(self, arg0: PlasmaEtchingParameters) -> None: ...
|
|
1291
1284
|
|
|
1285
|
+
class SelectiveEpitaxy(ProcessModel):
|
|
1286
|
+
def __init__(
|
|
1287
|
+
self,
|
|
1288
|
+
materialRates: collections.abc.Sequence[tuple[Material, typing.SupportsFloat]],
|
|
1289
|
+
rate111: typing.SupportsFloat = ...,
|
|
1290
|
+
rate100: typing.SupportsFloat = ...,
|
|
1291
|
+
) -> None: ...
|
|
1292
|
+
|
|
1292
1293
|
class SingleParticleALD(ProcessModel):
|
|
1293
1294
|
def __init__(
|
|
1294
1295
|
self,
|
|
@@ -1341,6 +1342,11 @@ class SphereDistribution(ProcessModel):
|
|
|
1341
1342
|
self, radius: typing.SupportsFloat, gridDelta: typing.SupportsFloat
|
|
1342
1343
|
) -> None: ...
|
|
1343
1344
|
|
|
1345
|
+
class StencilLocalLaxFriedrichsScalar:
|
|
1346
|
+
def __init__(self, *args, **kwargs) -> None: ...
|
|
1347
|
+
@staticmethod
|
|
1348
|
+
def setMaxDissipation(maxDissipation: typing.SupportsFloat) -> None: ...
|
|
1349
|
+
|
|
1344
1350
|
class TEOSDeposition(ProcessModel):
|
|
1345
1351
|
def __init__(
|
|
1346
1352
|
self,
|
|
@@ -1385,6 +1391,24 @@ class ToDiskMesh:
|
|
|
1385
1391
|
def setDomain(self, arg0: Domain) -> None: ...
|
|
1386
1392
|
def setMesh(self, arg0: viennals2d.viennals2d.Mesh) -> None: ...
|
|
1387
1393
|
|
|
1394
|
+
class WetEtching(ProcessModel):
|
|
1395
|
+
@overload
|
|
1396
|
+
def __init__(
|
|
1397
|
+
self,
|
|
1398
|
+
materialRates: collections.abc.Sequence[tuple[Material, typing.SupportsFloat]],
|
|
1399
|
+
) -> None: ...
|
|
1400
|
+
@overload
|
|
1401
|
+
def __init__(
|
|
1402
|
+
self,
|
|
1403
|
+
direction100,
|
|
1404
|
+
direction010,
|
|
1405
|
+
rate100: typing.SupportsFloat,
|
|
1406
|
+
rate110: typing.SupportsFloat,
|
|
1407
|
+
rate111: typing.SupportsFloat,
|
|
1408
|
+
rate311: typing.SupportsFloat,
|
|
1409
|
+
materialRates: collections.abc.Sequence[tuple[Material, typing.SupportsFloat]],
|
|
1410
|
+
) -> None: ...
|
|
1411
|
+
|
|
1388
1412
|
class Writer:
|
|
1389
1413
|
@overload
|
|
1390
1414
|
def __init__(self) -> None: ...
|
|
Binary file
|
viennaps3d/viennaps3d.pyi
CHANGED
|
@@ -22,23 +22,8 @@ class AdvectionParameters:
|
|
|
22
22
|
timeStepRatio: float
|
|
23
23
|
velocityOutput: bool
|
|
24
24
|
def __init__(self) -> None: ...
|
|
25
|
-
|
|
26
|
-
|
|
27
|
-
@overload
|
|
28
|
-
def __init__(
|
|
29
|
-
self, materials: collections.abc.Sequence[tuple[Material, typing.SupportsFloat]]
|
|
30
|
-
) -> None: ...
|
|
31
|
-
@overload
|
|
32
|
-
def __init__(
|
|
33
|
-
self,
|
|
34
|
-
direction100,
|
|
35
|
-
direction010,
|
|
36
|
-
rate100: typing.SupportsFloat,
|
|
37
|
-
rate110: typing.SupportsFloat,
|
|
38
|
-
rate111: typing.SupportsFloat,
|
|
39
|
-
rate311: typing.SupportsFloat,
|
|
40
|
-
materials: collections.abc.Sequence[tuple[Material, typing.SupportsFloat]],
|
|
41
|
-
) -> None: ...
|
|
25
|
+
def toMetaData(self) -> dict[str, list[float]]: ...
|
|
26
|
+
def toMetaDataString(self) -> str: ...
|
|
42
27
|
|
|
43
28
|
class AtomicLayerProcess:
|
|
44
29
|
def __init__(self) -> None: ...
|
|
@@ -314,7 +299,7 @@ class Domain:
|
|
|
314
299
|
material: Material,
|
|
315
300
|
wrapLowerLevelSet: bool = ...,
|
|
316
301
|
) -> None: ...
|
|
317
|
-
def print(self,
|
|
302
|
+
def print(self, hrleInfo: bool = ...) -> None: ...
|
|
318
303
|
def removeLevelSet(self, arg0: typing.SupportsInt, arg1: bool) -> None: ...
|
|
319
304
|
def removeMaterial(self, arg0: Material) -> None: ...
|
|
320
305
|
def removeTopLevelSet(self) -> None: ...
|
|
@@ -562,9 +547,9 @@ class HBrO2Etching(ProcessModel):
|
|
|
562
547
|
|
|
563
548
|
class HoleShape:
|
|
564
549
|
__members__: ClassVar[dict] = ... # read-only
|
|
565
|
-
|
|
566
|
-
|
|
567
|
-
|
|
550
|
+
FULL: ClassVar[HoleShape] = ...
|
|
551
|
+
HALF: ClassVar[HoleShape] = ...
|
|
552
|
+
QUARTER: ClassVar[HoleShape] = ...
|
|
568
553
|
__entries: ClassVar[dict] = ...
|
|
569
554
|
def __init__(self, value: typing.SupportsInt) -> None: ...
|
|
570
555
|
def __eq__(self, other: object) -> bool: ...
|
|
@@ -690,11 +675,17 @@ class Logger:
|
|
|
690
675
|
) -> Logger: ...
|
|
691
676
|
def addWarning(self, arg0: str) -> Logger: ...
|
|
692
677
|
@staticmethod
|
|
678
|
+
def appendToLogFile(arg0: str) -> bool: ...
|
|
679
|
+
@staticmethod
|
|
680
|
+
def closeLogFile() -> None: ...
|
|
681
|
+
@staticmethod
|
|
693
682
|
def getInstance() -> Logger: ...
|
|
694
683
|
@staticmethod
|
|
695
684
|
def getLogLevel() -> int: ...
|
|
696
685
|
def print(self) -> None: ...
|
|
697
686
|
@staticmethod
|
|
687
|
+
def setLogFile(arg0: str) -> bool: ...
|
|
688
|
+
@staticmethod
|
|
698
689
|
def setLogLevel(arg0: LogLevel) -> None: ...
|
|
699
690
|
|
|
700
691
|
class MakeFin:
|
|
@@ -897,8 +888,8 @@ class MaterialMap:
|
|
|
897
888
|
|
|
898
889
|
class MetaDataLevel:
|
|
899
890
|
__members__: ClassVar[dict] = ... # read-only
|
|
900
|
-
DOMAIN: ClassVar[MetaDataLevel] = ...
|
|
901
891
|
FULL: ClassVar[MetaDataLevel] = ...
|
|
892
|
+
GRID: ClassVar[MetaDataLevel] = ...
|
|
902
893
|
NONE: ClassVar[MetaDataLevel] = ...
|
|
903
894
|
PROCESS: ClassVar[MetaDataLevel] = ...
|
|
904
895
|
__entries: ClassVar[dict] = ...
|
|
@@ -1163,13 +1154,15 @@ class RayTracingParameters:
|
|
|
1163
1154
|
sourceDirection: Incomplete
|
|
1164
1155
|
useRandomSeeds: bool
|
|
1165
1156
|
def __init__(self) -> None: ...
|
|
1157
|
+
def toMetaData(self) -> dict[str, list[float]]: ...
|
|
1158
|
+
def toMetaDataString(self) -> str: ...
|
|
1166
1159
|
|
|
1167
1160
|
class Reader:
|
|
1168
1161
|
@overload
|
|
1169
1162
|
def __init__(self) -> None: ...
|
|
1170
1163
|
@overload
|
|
1171
1164
|
def __init__(self, fileName: str) -> None: ...
|
|
1172
|
-
def apply(self) ->
|
|
1165
|
+
def apply(self) -> None: ...
|
|
1173
1166
|
def setFileName(self, arg0: str) -> None: ...
|
|
1174
1167
|
|
|
1175
1168
|
class SF6C4F8Etching(ProcessModel):
|
|
@@ -1214,6 +1207,14 @@ class SF6O2Etching(ProcessModel):
|
|
|
1214
1207
|
def getParameters(self) -> PlasmaEtchingParameters: ...
|
|
1215
1208
|
def setParameters(self, arg0: PlasmaEtchingParameters) -> None: ...
|
|
1216
1209
|
|
|
1210
|
+
class SelectiveEpitaxy(ProcessModel):
|
|
1211
|
+
def __init__(
|
|
1212
|
+
self,
|
|
1213
|
+
materialRates: collections.abc.Sequence[tuple[Material, typing.SupportsFloat]],
|
|
1214
|
+
rate111: typing.SupportsFloat = ...,
|
|
1215
|
+
rate100: typing.SupportsFloat = ...,
|
|
1216
|
+
) -> None: ...
|
|
1217
|
+
|
|
1217
1218
|
class SingleParticleALD(ProcessModel):
|
|
1218
1219
|
def __init__(
|
|
1219
1220
|
self,
|
|
@@ -1266,6 +1267,11 @@ class SphereDistribution(ProcessModel):
|
|
|
1266
1267
|
self, radius: typing.SupportsFloat, gridDelta: typing.SupportsFloat
|
|
1267
1268
|
) -> None: ...
|
|
1268
1269
|
|
|
1270
|
+
class StencilLocalLaxFriedrichsScalar:
|
|
1271
|
+
def __init__(self, *args, **kwargs) -> None: ...
|
|
1272
|
+
@staticmethod
|
|
1273
|
+
def setMaxDissipation(maxDissipation: typing.SupportsFloat) -> None: ...
|
|
1274
|
+
|
|
1269
1275
|
class TEOSDeposition(ProcessModel):
|
|
1270
1276
|
def __init__(
|
|
1271
1277
|
self,
|
|
@@ -1310,6 +1316,24 @@ class ToDiskMesh:
|
|
|
1310
1316
|
def setDomain(self, arg0: Domain) -> None: ...
|
|
1311
1317
|
def setMesh(self, arg0: viennals3d.viennals3d.Mesh) -> None: ...
|
|
1312
1318
|
|
|
1319
|
+
class WetEtching(ProcessModel):
|
|
1320
|
+
@overload
|
|
1321
|
+
def __init__(
|
|
1322
|
+
self,
|
|
1323
|
+
materialRates: collections.abc.Sequence[tuple[Material, typing.SupportsFloat]],
|
|
1324
|
+
) -> None: ...
|
|
1325
|
+
@overload
|
|
1326
|
+
def __init__(
|
|
1327
|
+
self,
|
|
1328
|
+
direction100,
|
|
1329
|
+
direction010,
|
|
1330
|
+
rate100: typing.SupportsFloat,
|
|
1331
|
+
rate110: typing.SupportsFloat,
|
|
1332
|
+
rate111: typing.SupportsFloat,
|
|
1333
|
+
rate311: typing.SupportsFloat,
|
|
1334
|
+
materialRates: collections.abc.Sequence[tuple[Material, typing.SupportsFloat]],
|
|
1335
|
+
) -> None: ...
|
|
1336
|
+
|
|
1313
1337
|
class Writer:
|
|
1314
1338
|
@overload
|
|
1315
1339
|
def __init__(self) -> None: ...
|
|
File without changes
|