ViennaPS 3.4.0__pp38-pypy38_pp73-win_amd64.whl → 3.5.0__pp38-pypy38_pp73-win_amd64.whl

{viennaps-3.4.0.dist-info → viennaps-3.5.0.dist-info}/METADATA

@@ -1,6 +1,6 @@
 Metadata-Version: 2.2
 Name: ViennaPS
-Version: 3.4.0
+Version: 3.5.0
 Summary: Semiconductor fabrication process simulation library
 License: Parts of the code (located in the 'external/' subfolder) have different
          licenses. The individual licenses apply for this specific part. Please consult
@@ -151,7 +151,7 @@ We recommend using [CPM.cmake](https://github.com/cpm-cmake/CPM.cmake) to consum
 
 * Installation with CPM
   ```cmake
-  CPMAddPackage("gh:viennatools/viennaps@3.4.0")
+  CPMAddPackage("gh:viennatools/viennaps@3.5.0")
   ```
 
 * With a local installation
@@ -289,4 +289,4 @@ http://www.iue.tuwien.ac.at/
 
 License
 --------------------------
-See file LICENSE in the base directory.
+See file LICENSE in the base directory.

viennaps-3.5.0.dist-info/RECORD

@@ -0,0 +1,63 @@
+viennaps.libs/embree4.dll,sha256=sEwTCsccvr1CriJXJE1ekDe_To-13iRoiMrst_CmWvw,24705024
+viennaps.libs/embree4.exp,sha256=yEveGkxobt96pg8J4ZCO4IfFYpRo-D2FGhG7oOESj6s,17003
+viennaps.libs/embree4.lib,sha256=8alXjQ2_f8tRvDeXkR4QychcEHCqlgkkttkt51zjaAo,28462
+viennaps.libs/embree_avx.lib,sha256=ieU8CR7NX3DIHMq2R5wLBjaGTESXbdWidGGv8XXi93c,48649506
+viennaps.libs/embree_avx2.lib,sha256=INhjYDMiWbNtO8fWUr3FVxv2YCHCte4bOFgbfSyAWvw,46907266
+viennaps.libs/embree_sse42.lib,sha256=t67grBJqSNO9nsMISJlJ9L_dA90cmGp3J0-F--EsCkA,5618148
+viennaps.libs/lexers.lib,sha256=teHREfksT7WzltNAk7qhjjp0pw18jcn9vOQPjpQv9fI,279552
+viennaps.libs/math.lib,sha256=HYFC-TGt-ZHuSnD8EMvU-h-1s3nA5c1IZuoUncD3pXo,5430
+viennaps.libs/simd.lib,sha256=EJtRBhM28_lBFqVpfCY-t-ZzoN6tQrdukMiauA3FOWI,10944
+viennaps.libs/sys.lib,sha256=qJBDeZ5NJPZ6vPF2Rxz0MZIvQzVZIc0tV_gJyQbWGi0,378472
+viennaps.libs/tasking.lib,sha256=_VnTdAvfzuhuA0JRXtGuvCs0ksm2dAPrhUhUSP1XhFk,63170
+viennaps.libs/tbb12.dll,sha256=LbrH8QrxDobSLZQ_-G3_rcPZ7PkPfDK1eWWEbzi5WN8,337920
+viennaps.libs/tbb12.exp,sha256=xKM9_i4tq71NUi2crojfLBWhbHLZIfIqeouNKK9Bj9Y,27773
+viennaps.libs/tbb12.lib,sha256=npIEoA7s2b0Eiakm3VAubMi51J6VYW1zmcsmlwRCnq4,46030
+viennaps.libs/vtkCommonComputationalGeometry-9.3.dll,sha256=U-fT9NZ7HcT2arL0C2a_Bu06E_kXrIqEvLHwZW6FFVM,174080
+viennaps.libs/vtkCommonCore-9.3.dll,sha256=cXdSt_EzjfViCCvplpsospcKhPRcHJ2UKBoqK1vutlc,10911744
+viennaps.libs/vtkCommonDataModel-9.3.dll,sha256=ZC1ozRbVY-DmJ_lskLdeM_iuZVwQTMDLDJRuy4KUsyE,4310528
+viennaps.libs/vtkCommonExecutionModel-9.3.dll,sha256=8ioCn_pMXlg63TewblidhCPunU-dhVo8uVO9KQwzI94,797696
+viennaps.libs/vtkCommonMath-9.3.dll,sha256=83ZeBFXOrHyh4D5JDFENFQQfdc7EP8PKZ3kxE39jCP0,153600
+viennaps.libs/vtkCommonMisc-9.3.dll,sha256=1H3w0p2J8xZZ0aQh-79T7j660pDYVA6pELZyvKyiHwQ,2795008
+viennaps.libs/vtkCommonSystem-9.3.dll,sha256=4MYs75LM1q0n0Tcm7r4tE3i20bZ56V43vxwVX6JDAyg,124928
+viennaps.libs/vtkCommonTransforms-9.3.dll,sha256=7B9iLpA22iAqZlKQSrqHuwtLXiUxHM-5hy-7qHKAZYY,204800
+viennaps.libs/vtkdoubleconversion-9.3.dll,sha256=sDqb_1o_eIoxTOfe2XUVMc24KkdZy7jojkRbIByv0E0,64512
+viennaps.libs/vtkexpat-9.3.dll,sha256=qVOImUHWjp-aSA2qrAPfaxjyTBl9glqCdyjjAlLhJ3g,158208
+viennaps.libs/vtkFiltersCore-9.3.dll,sha256=T5YpUi6DCijUZoy_4eQbwatsrC7eVdSYHb2czuaw6dQ,5890048
+viennaps.libs/vtkFiltersGeneral-9.3.dll,sha256=PZLqLO0m3eA2abeXtPeJAlp5WZJXnWoNQfso_xUU-BI,3282944
+viennaps.libs/vtkFiltersGeometry-9.3.dll,sha256=qXocxIbhwp1Ri01Afk7dFTMzAGZ79Ir3N36b5i-1Mt4,965120
+viennaps.libs/vtkFiltersVerdict-9.3.dll,sha256=gZJmrEIGCOBQ0fIFbyf50SDOqnKnLEKCNQtfNITjC4I,199680
+viennaps.libs/vtkfmt-9.3.dll,sha256=wshn4CBW2i1FqsrPxRSXpOAv_djUANYQmPas6eBtTnY,139264
+viennaps.libs/vtkIOCore-9.3.dll,sha256=bCph6EcNchr7o4e0X6prfOp51KBzyIPidyhWlYvlowc,450560
+viennaps.libs/vtkIOXML-9.3.dll,sha256=x9kVjVIGEPRbBI-uAJoqaYbQhfIPvbaQPaLHRQEx-Eg,846848
+viennaps.libs/vtkIOXMLParser-9.3.dll,sha256=8fKVt5JtDuM0G6MhwAyM2bDmKt2zvUIjUQThZ95G1S8,111616
+viennaps.libs/vtkkissfft-9.3.dll,sha256=xwfEe0oKcYj2dong83RWoM-GscPoLCCK9L9Rhi59ucU,22016
+viennaps.libs/vtkloguru-9.3.dll,sha256=3QooocNYZqTyRu3b2xP5_HqgOC0tEfxd3d0P2HqDZbE,76288
+viennaps.libs/vtklz4-9.3.dll,sha256=_WbHqGsiQWfLdQppovbr8Wdo5QDkBU7CduSNnZ5og2k,115200
+viennaps.libs/vtklzma-9.3.dll,sha256=mJQ4PFVYnSMXjstu8TE48oeC8nTw1YcMuinyB2_uLoA,154624
+viennaps.libs/vtkpugixml-9.3.dll,sha256=sSUbLrgk5GOPVB3eCLQ0guVKf7mn7JouYP-7lNzkDRg,207360
+viennaps.libs/vtksys-9.3.dll,sha256=n6ZjJ0Xra6GiSIctu6dtPLPzY3ci9eypVvT09Nqusr0,325120
+viennaps.libs/vtkverdict-9.3.dll,sha256=54voK-EKlyQuJ7ceazVlolBzoZ2HEoVbsSjXyu-aMxc,192512
+viennaps.libs/vtkzlib-9.3.dll,sha256=u5HCslHEy4EQEiJtj7W5DmQr4DopHz8_1IwjAdv7-qw,84480
+viennaps2d/__init__.py,sha256=w9QSNkwVwlBZnXOZPlviHPJ8UBZtGPhlnFR_3mhqrLA,2050
+viennaps2d/__init__.pyi,sha256=Wl1OsUFkxdU7PgcnJ0PCumKHyTDf9rF-zc0lQ7CLOgY,69
+viennaps2d/Release/viennaps2d.cp310-win_amd64.pyd,sha256=Iy_CkgzXsa7ZF4-zIUpPH1s2J9sy7GndE0f1YVsUIr4,1852416
+viennaps2d/Release/viennaps2d.cp311-win_amd64.pyd,sha256=jZV1cbgy6Dm5t8etIrpDxWGLhNh71p-_F4rK5t347FY,1854976
+viennaps2d/Release/viennaps2d.cp312-win_amd64.pyd,sha256=Syk2Nwv5bTPFJFsP_7t5qIgcJXzDZUo9NMW3c059Prw,1880064
+viennaps2d/Release/viennaps2d.pypy37-pp73-win_amd64.pyd,sha256=IIspULYGZxMADoRKJ9QmgHDGyGYD_mxOSEwQnkecatM,1850880
+viennaps2d/Release/viennaps2d.pypy38-pp73-win_amd64.pyd,sha256=PqXUh6t_4mgL53wOgViuLf4gfFYmTc3TE6cTd87w80Y,1851392
+viennaps2d/viennaps2d.pyi,sha256=hw2pEvH5V0wH2jYJ94didCF7uMl6eicGKexdes6zwxQ,40400
+viennaps2d/viennaps2d.pypy38-pp73-win_amd64.pyd,sha256=PqXUh6t_4mgL53wOgViuLf4gfFYmTc3TE6cTd87w80Y,1851392
+viennaps3d/__init__.py,sha256=mY3cWy_z3GYESXrgZSWafyOvLv6-bsIhohqyfHxP_UQ,2050
+viennaps3d/__init__.pyi,sha256=jhoJRHabClmxl-u7CzRVlWPLlVbdQf9sxTFb2vQXExo,69
+viennaps3d/Release/viennaps3d.cp310-win_amd64.pyd,sha256=XvAqusgZBVG3LgT3clfKe-vAALSipQTLtbS7II5BtO8,1760256
+viennaps3d/Release/viennaps3d.cp311-win_amd64.pyd,sha256=3mmhVrEY7lYzwz6IF-OpWCP3eX7TLPJAJZNO77UnHkw,1762816
+viennaps3d/Release/viennaps3d.cp312-win_amd64.pyd,sha256=EsPt_OaIBebPxNw6OgnpZ3jWZrTcjEOYuvEbbMuX4vI,1786368
+viennaps3d/Release/viennaps3d.pypy37-pp73-win_amd64.pyd,sha256=PQA8h2cHvmfRKqYbB8HTJ3eZAMfRU7O7iQ2ECCY6udM,1758720
+viennaps3d/Release/viennaps3d.pypy38-pp73-win_amd64.pyd,sha256=i3G4stGP2ytw7hYLYEKXxt3upaM0uczrPLY3se39gdY,1759232
+viennaps3d/viennaps3d/gpu.pyi,sha256=7rRfqph8ZzXpnR2E144csR5tqDH96PG1VkfiHlu4SnM,3835
+viennaps3d/viennaps3d.pyi,sha256=qSqvUJryMe6tUoh_zwWPSIXW1R5n-WX6zpjDCDTWMUQ,37663
+viennaps3d/viennaps3d.pypy38-pp73-win_amd64.pyd,sha256=i3G4stGP2ytw7hYLYEKXxt3upaM0uczrPLY3se39gdY,1759232
+viennaps-3.5.0.dist-info/METADATA,sha256=q8JUXC1JMsEAa0j9Gvz0wuxNAd4a431foMNPmEXyeQs,13584
+viennaps-3.5.0.dist-info/WHEEL,sha256=i1GExBSYY12rEgCOOXHdWOOM4XOi8umQBEDKzEM4ao0,111
+viennaps-3.5.0.dist-info/licenses/LICENSE,sha256=yymSujHnPkkZp_XdtiDIcgdgd2fpygXGPRGIH3ReUPA,1296
+viennaps-3.5.0.dist-info/RECORD,,

viennaps2d/__init__.py

@@ -24,6 +24,15 @@ def _windows_dll_path():
         os.add_dll_directory(path)
         os.environ["PATH"] = path + os.pathsep + os.environ["PATH"]
 
+def _module_ptx_path():
+    from importlib.util import find_spec
+    import os
+
+    spec = find_spec("viennaps3d")
+    install_path = os.path.dirname(os.path.abspath(spec.origin))
+    return os.path.join(install_path, "ptx")
+
+
 if sys.platform == "win32":
     _windows_dll_path()
 
@@ -32,6 +41,9 @@ from viennals2d import IntegrationSchemeEnum as IntegrationScheme
 from viennals2d import BoundaryConditionEnum as BoundaryType
 from .viennaps2d import *
 
+if D == 3:
+    ptxPath = _module_ptx_path()
+
 # Config file reader helper function
 def ReadConfigFile(fileName: str):
     """Read a config file in the ViennaPS standard config file format.
@@ -39,7 +51,7 @@ def ReadConfigFile(fileName: str):
     Parameters
     ----------
     fileName: str
-              Name of the config file.
+                Name of the config file.
     
     Returns
     -------
@@ -60,7 +72,8 @@ def ReadConfigFile(fileName: str):
 
                 try:
                     val = float(par_value) 
-                except: val = par_value
+                except: 
+                    val = par_value
 
                 par_dict[par_name] = val
 

viennaps2d/viennaps2d.pyi

@@ -7,7 +7,7 @@ __version__: str
 version: str
 
 class AdvectionCallback:
-    domain: Domain
+    domain: Incomplete
     def __init__(self) -> None: ...
     def applyPostAdvect(self, arg0: float) -> bool: ...
     def applyPreAdvect(self, arg0: float) -> bool: ...
@@ -51,7 +51,7 @@ class AtomicLayerProcess:
     def setNumberOfRaysPerPoint(self, arg0: int) -> None: ...
     def setProcessModel(self, arg0: ProcessModel) -> None: ...
     def setPulseTime(self, arg0: float) -> None: ...
-    def setSourceDirection(self, arg0: rayTraceDirection) -> None: ...
+    def setSourceDirection(self, arg0) -> None: ...
 
 class BoxDistribution(ProcessModel):
     @overload
@@ -147,7 +147,73 @@ class CF4O2ParametersSiGe:
     def __init__(self) -> None: ...
     def k_sigma_SiGe(self, arg0: float) -> float: ...
 
-class DirectionalEtching(ProcessModel):
+class CSVFileProcess(ProcessModel):
+    def __init__(
+        self,
+        ratesFile: str,
+        direction,
+        offset,
+        isotropicComponent: float = ...,
+        directionalComponent: float = ...,
+        maskMaterials: list[Material] = ...,
+        calculateVisibility: bool = ...,
+    ) -> None: ...
+    def setCustomInterpolator(self, function: Callable) -> None: ...
+    def setIDWNeighbors(self, k: int = ...) -> None: ...
+    @overload
+    def setInterpolationMode(self, mode: Interpolation) -> None: ...
+    @overload
+    def setInterpolationMode(self, mode: str) -> None: ...
+    def setOffset(self, offset) -> None: ...
+
+class DenseCellSet:
+    def __init__(self) -> None: ...
+    @overload
+    def addFillingFraction(self, arg0: int, arg1: float) -> bool: ...
+    @overload
+    def addFillingFraction(self, arg0, arg1: float) -> bool: ...
+    def addFillingFractionInMaterial(self, arg0, arg1: float, arg2: int) -> bool: ...
+    def addScalarData(self, arg0: str, arg1: float) -> None: ...
+    def buildNeighborhood(self, forceRebuild: bool = ...) -> None: ...
+    def clear(self) -> None: ...
+    def fromLevelSets(
+        self,
+        levelSets: list[viennals2d.viennals2d.Domain],
+        materialMap: viennals2d.viennals2d.MaterialMap = ...,
+        depth: float = ...,
+    ) -> None: ...
+    def getAverageFillingFraction(self, arg0, arg1: float) -> float: ...
+    def getBoundingBox(self, *args, **kwargs): ...
+    def getCellCenter(self, *args, **kwargs): ...
+    def getCellGrid(self) -> viennals2d.viennals2d.Mesh: ...
+    def getDepth(self) -> float: ...
+    def getElement(self, *args, **kwargs): ...
+    def getElements(self, *args, **kwargs): ...
+    def getFillingFraction(self, arg0) -> float: ...
+    def getFillingFractions(self) -> list[float]: ...
+    def getGridDelta(self) -> float: ...
+    def getIndex(self, arg0) -> int: ...
+    def getNeighbors(self, *args, **kwargs): ...
+    def getNode(self, *args, **kwargs): ...
+    def getNodes(self, *args, **kwargs): ...
+    def getNumberOfCells(self) -> int: ...
+    def getScalarData(self, arg0: str) -> list[float]: ...
+    def getScalarDataLabels(self) -> list[str]: ...
+    def getSurface(self) -> viennals2d.viennals2d.Domain: ...
+    def readCellSetData(self, arg0: str) -> None: ...
+    def setCellSetPosition(self, arg0: bool) -> None: ...
+    def setCoverMaterial(self, arg0: int) -> None: ...
+    @overload
+    def setFillingFraction(self, arg0: int, arg1: float) -> bool: ...
+    @overload
+    def setFillingFraction(self, arg0, arg1: float) -> bool: ...
+    def setPeriodicBoundary(self, arg0) -> None: ...
+    def updateMaterials(self) -> None: ...
+    def updateSurface(self) -> None: ...
+    def writeCellSetData(self, arg0: str) -> None: ...
+    def writeVTU(self, arg0: str) -> None: ...
+
+class DirectionalProcess(ProcessModel):
     @overload
     def __init__(
         self,
@@ -181,12 +247,18 @@ class Domain:
         self,
         gridDelta: float,
         xExtent: float,
+        yExtent: float,
         boundary: viennals2d.viennals2d.BoundaryConditionEnum = ...,
     ) -> None: ...
-    def applyBooleanOperation(
+    @overload
+    def __init__(
         self,
-        arg0: viennals2d.viennals2d.Domain,
-        arg1: viennals2d.viennals2d.BooleanOperationEnum,
+        gridDelta: float,
+        xExtent: float,
+        boundary: viennals2d.viennals2d.BoundaryConditionEnum = ...,
+    ) -> None: ...
+    def applyBooleanOperation(
+        self, arg0: viennals2d.viennals2d.Domain, arg1
     ) -> None: ...
     def clear(self) -> None: ...
     def deepCopy(self, arg0: Domain) -> None: ...
@@ -194,8 +266,8 @@ class Domain:
     def generateCellSet(self, arg0: float, arg1: Material, arg2: bool) -> None: ...
     def getBoundaryConditions(self, *args, **kwargs): ...
     def getBoundingBox(self, *args, **kwargs): ...
-    def getCellSet(self, *args, **kwargs): ...
-    def getGrid(self, *args, **kwargs): ...
+    def getCellSet(self) -> DenseCellSet: ...
+    def getGrid(self) -> viennals2d.viennals2d.hrleGrid: ...
     def getGridDelta(self) -> float: ...
     def getLevelSets(self) -> list[viennals2d.viennals2d.Domain]: ...
     def getMaterialMap(self, *args, **kwargs): ...
@@ -295,7 +367,7 @@ class DomainSetup:
     def boundaryCons(self, *args, **kwargs): ...
     def bounds(self, *args, **kwargs): ...
     def check(self) -> None: ...
-    def grid(self, *args, **kwargs): ...
+    def grid(self) -> viennals2d.viennals2d.hrleGrid: ...
     def gridDelta(self) -> float: ...
     def halveXAxis(self) -> None: ...
     def halveYAxis(self) -> None: ...
@@ -432,6 +504,40 @@ class FluorocarbonParametersSiO2:
     rho: float
     def __init__(self) -> None: ...
 
+class GDSGeometry:
+    @overload
+    def __init__(self) -> None: ...
+    @overload
+    def __init__(self, gridDelta: float) -> None: ...
+    @overload
+    def __init__(self, gridDelta: float, boundaryConditions) -> None: ...
+    def addBlur(
+        self,
+        sigmas: list[float],
+        weights: list[float],
+        threshold: float = ...,
+        delta: float = ...,
+        gridRefinement: int = ...,
+    ) -> None: ...
+    def getAllLayers(self) -> set[int]: ...
+    def getBounds(self, *args, **kwargs): ...
+    def getNumberOfStructures(self) -> int: ...
+    def layerToLevelSet(
+        self, layer: int, blurLayer: bool = ...
+    ) -> viennals2d.viennals2d.Domain: ...
+    def print(self) -> None: ...
+    def setBoundaryConditions(
+        self, arg0: list[viennals2d.viennals2d.BoundaryConditionEnum]
+    ) -> None: ...
+    def setBoundaryPadding(self, arg0: float, arg1: float) -> None: ...
+    def setGridDelta(self, arg0: float) -> None: ...
+
+class GDSReader:
+    def __init__(self) -> None: ...
+    def apply(self) -> None: ...
+    def setFileName(self, arg0: str) -> None: ...
+    def setGeometry(self, *args, **kwargs): ...
+
 class GeometryFactory:
     def __init__(self, *args, **kwargs) -> None: ...
     def makeBoxStencil(
@@ -443,6 +549,28 @@ class GeometryFactory:
     def makeMask(self, base: float, height: float) -> viennals2d.viennals2d.Domain: ...
     def makeSubstrate(self, base: float) -> viennals2d.viennals2d.Domain: ...
 
+class HBrO2Etching(ProcessModel):
+    @overload
+    def __init__(self) -> None: ...
+    @overload
+    def __init__(
+        self,
+        ionFlux: float,
+        etchantFlux: float,
+        oxygenFlux: float,
+        meanIonEnergy: float = ...,
+        sigmaIonEnergy: float = ...,
+        ionExponent: float = ...,
+        oxySputterYield: float = ...,
+        etchStopDepth: float = ...,
+    ) -> None: ...
+    @overload
+    def __init__(self, parameters: PlasmaEtchingParameters) -> None: ...
+    @staticmethod
+    def defaultParameters() -> PlasmaEtchingParameters: ...
+    def getParameters(self) -> PlasmaEtchingParameters: ...
+    def setParameters(self, arg0: PlasmaEtchingParameters) -> None: ...
+
 class HoleShape:
     __members__: ClassVar[dict] = ...  # read-only
     Full: ClassVar[HoleShape] = ...
@@ -476,6 +604,23 @@ class IBEParameters:
     yieldFunction: Callable[[float], float]
     def __init__(self) -> None: ...
 
+class Interpolation:
+    __members__: ClassVar[dict] = ...  # read-only
+    CUSTOM: ClassVar[Interpolation] = ...
+    IDW: ClassVar[Interpolation] = ...
+    LINEAR: ClassVar[Interpolation] = ...
+    __entries: ClassVar[dict] = ...
+    def __init__(self, value: int) -> None: ...
+    def __eq__(self, other: object) -> bool: ...
+    def __hash__(self) -> int: ...
+    def __index__(self) -> int: ...
+    def __int__(self) -> int: ...
+    def __ne__(self, other: object) -> bool: ...
+    @property
+    def name(self) -> str: ...
+    @property
+    def value(self) -> int: ...
+
 class IonBeamEtching(ProcessModel):
     @overload
     def __init__(self) -> None: ...
@@ -813,8 +958,10 @@ class Particle:
     def __init__(self, *args, **kwargs) -> None: ...
     def getLocalDataLabels(self) -> list[str]: ...
     def getSourceDistributionPower(self) -> float: ...
-    def initNew(self, *args, **kwargs): ...
-    def surfaceCollision(self, *args, **kwargs): ...
+    def initNew(self, arg0) -> None: ...
+    def surfaceCollision(
+        self, arg0: float, arg1, arg2, arg3: int, arg4: int, arg5, arg6, arg7
+    ) -> None: ...
     def surfaceReflection(self, *args, **kwargs): ...
 
 class Planarize:
@@ -826,6 +973,54 @@ class Planarize:
     def setCutoffPosition(self, arg0: float) -> None: ...
     def setDomain(self, arg0: Domain) -> None: ...
 
+class PlasmaEtchingParameters:
+    Ions: PlasmaEtchingParametersIons
+    Mask: PlasmaEtchingParametersMask
+    Passivation: PlasmaEtchingParametersPassivation
+    Substrate: PlasmaEtchingParametersSubstrate
+    beta_E: dict[int, float]
+    beta_P: dict[int, float]
+    etchStopDepth: float
+    etchantFlux: float
+    ionFlux: float
+    passivationFlux: float
+    def __init__(self) -> None: ...
+
+class PlasmaEtchingParametersIons:
+    exponent: float
+    inflectAngle: float
+    meanEnergy: float
+    minAngle: float
+    n_l: float
+    sigmaEnergy: float
+    thetaRMax: float
+    thetaRMin: float
+    def __init__(self) -> None: ...
+
+class PlasmaEtchingParametersMask:
+    A_sp: float
+    B_sp: float
+    Eth_sp: float
+    rho: float
+    def __init__(self) -> None: ...
+
+class PlasmaEtchingParametersPassivation:
+    A_ie: float
+    Eth_ie: float
+    def __init__(self) -> None: ...
+
+class PlasmaEtchingParametersSubstrate:
+    A_ie: float
+    A_sp: float
+    B_ie: float
+    B_sp: float
+    Eth_ie: float
+    Eth_sp: float
+    beta_sigma: float
+    k_sigma: float
+    rho: float
+    def __init__(self) -> None: ...
+
 class Process:
     def __init__(self) -> None: ...
     def apply(self) -> None: ...
@@ -851,7 +1046,7 @@ class Process:
     def setProcessModel(self, arg0: ProcessModel) -> None: ...
     def setRayTracingDiskRadius(self, arg0: float) -> None: ...
     def setRayTracingParameters(self, arg0: RayTracingParameters) -> None: ...
-    def setSourceDirection(self, arg0: rayTraceDirection) -> None: ...
+    def setSourceDirection(self, arg0) -> None: ...
     def setTimeStepRatio(self, arg0: float) -> None: ...
 
 class ProcessModel:
@@ -888,6 +1083,18 @@ class ProcessParams:
     def getScalarDataLabel(self, arg0: int) -> str: ...
     def insertNextScalar(self, arg0: float, arg1: str) -> None: ...
 
+class RateGrid:
+    def __init__(self) -> None: ...
+    def interpolate(self, coord) -> float: ...
+    def loadFromCSV(self, filename: str) -> bool: ...
+    def setCustomInterpolator(self, function: Callable) -> None: ...
+    def setIDWNeighbors(self, k: int) -> None: ...
+    @overload
+    def setInterpolationMode(self, mode: Interpolation) -> None: ...
+    @overload
+    def setInterpolationMode(self, mode: str) -> None: ...
+    def setOffset(self, offset) -> None: ...
+
 class RateSet:
     calculateVisibility: bool
     direction: Incomplete
@@ -910,7 +1117,7 @@ class RayTracingParameters:
     normalizationType: NormalizationType
     raysPerPoint: int
     smoothingNeighbors: int
-    sourceDirection: rayTraceDirection
+    sourceDirection: Incomplete
     useRandomSeeds: bool
     def __init__(self) -> None: ...
 
@@ -930,60 +1137,11 @@ class SF6O2Etching(ProcessModel):
         etchStopDepth: float = ...,
     ) -> None: ...
     @overload
-    def __init__(self, parameters: SF6O2Parameters) -> None: ...
-    def getParameters(self) -> SF6O2Parameters: ...
-    def setParameters(self, arg0: SF6O2Parameters) -> None: ...
-
-class SF6O2Parameters:
-    Ions: SF6O2ParametersIons
-    Mask: SF6O2ParametersMask
-    Passivation: SF6O2ParametersPassivation
-    Si: SF6O2ParametersSi
-    beta_F: dict[int, float]
-    beta_O: dict[int, float]
-    etchStopDepth: float
-    etchantFlux: float
-    fluxIncludeSticking: bool
-    ionFlux: float
-    oxygenFlux: float
-    def __init__(self) -> None: ...
-
-class SF6O2ParametersIons:
-    exponent: float
-    inflectAngle: float
-    meanEnergy: float
-    minAngle: float
-    n_l: float
-    sigmaEnergy: float
-    thetaRMin: float
-    thetaRMax: float
-    def __init__(self) -> None: ...
-
-class SF6O2ParametersMask:
-    A_sp: float
-    B_sp: float
-    Eth_sp: float
-    rho: float
-    def __init__(self) -> None: ...
-
-class SF6O2ParametersPassivation:
-    A_ie: float
-    Eth_ie: float
-    def __init__(self) -> None: ...
-
-class SF6O2ParametersSi:
-    A_ie: float
-    A_sp: float
-    B_ie: float
-    B_sp: float
-    Eth_ie: float
-    Eth_sp: float
-    beta_sigma: float
-    k_sigma: float
-    rho: float
-    theta_g_ie: float
-    theta_g_sp: float
-    def __init__(self) -> None: ...
+    def __init__(self, parameters: PlasmaEtchingParameters) -> None: ...
+    @staticmethod
+    def defaultParameters() -> PlasmaEtchingParameters: ...
+    def getParameters(self) -> PlasmaEtchingParameters: ...
+    def setParameters(self, arg0: PlasmaEtchingParameters) -> None: ...
 
 class SingleParticleALD(ProcessModel):
     def __init__(
@@ -1076,24 +1234,4 @@ class ToDiskMesh:
     def setDomain(self, arg0: Domain) -> None: ...
     def setMesh(self, arg0: viennals2d.viennals2d.Mesh) -> None: ...
 
-class rayTraceDirection:
-    __members__: ClassVar[dict] = ...  # read-only
-    NEG_X: ClassVar[rayTraceDirection] = ...
-    NEG_Y: ClassVar[rayTraceDirection] = ...
-    NEG_Z: ClassVar[rayTraceDirection] = ...
-    POS_X: ClassVar[rayTraceDirection] = ...
-    POS_Y: ClassVar[rayTraceDirection] = ...
-    POS_Z: ClassVar[rayTraceDirection] = ...
-    __entries: ClassVar[dict] = ...
-    def __init__(self, value: int) -> None: ...
-    def __eq__(self, other: object) -> bool: ...
-    def __hash__(self) -> int: ...
-    def __index__(self) -> int: ...
-    def __int__(self) -> int: ...
-    def __ne__(self, other: object) -> bool: ...
-    @property
-    def name(self) -> str: ...
-    @property
-    def value(self) -> int: ...
-
 def setNumThreads(arg0: int) -> None: ...