ViennaPS 3.3.0__pp37-pypy37_pp73-win_amd64.whl → 3.4.0__pp37-pypy37_pp73-win_amd64.whl

{viennaps-3.3.0.dist-info → viennaps-3.4.0.dist-info}/METADATA

@@ -1,6 +1,6 @@
 Metadata-Version: 2.1
 Name: ViennaPS
-Version: 3.3.0
+Version: 3.4.0
 Summary: Semiconductor fabrication process simulation library
 License: Parts of the code (located in the 'external/' subfolder) have different
         licenses. The individual licenses apply for this specific part. Please consult
@@ -30,7 +30,7 @@ Project-URL: Homepage, https://viennatools.github.io/ViennaPS/
 Project-URL: Documentation, https://viennatools.github.io/ViennaPS/
 Project-URL: Repository, https://github.com/ViennaTools/ViennaPS
 Project-URL: Issues, https://github.com/ViennaTools/ViennaPS/issues
-Requires-Dist: ViennaLS>=4.2.1
+Requires-Dist: ViennaLS>=4.3.0
 Description-Content-Type: text/markdown
 
 <div align="center">
@@ -41,17 +41,34 @@ Description-Content-Type: text/markdown
 
 [![🐍 Build Bindings](https://github.com/ViennaTools/ViennaPS/actions/workflows/python.yml/badge.svg)](https://github.com/ViennaTools/ViennaPS/actions/workflows/python.yml)
 [![🧪 Run Tests](https://github.com/ViennaTools/ViennaPS/actions/workflows/build.yml/badge.svg)](https://github.com/ViennaTools/ViennaPS/actions/workflows/build.yml)
+[![PyPi Version](https://img.shields.io/pypi/v/ViennaPS?logo=pypi)](https://pypi.org/project/ViennaPS/)
 
 </div>
 
-ViennaPS is a header-only C++ process simulation library, which includes surface and volume representations, a ray tracer, and physical models for the simulation of microelectronic fabrication processes. This library seamlessly integrates advanced level-set functionalities with top-down Monte Carlo flux calculations, powered by state-of-the-art ray tracing techniques. This combination brings a new level of accuracy and efficiency to process simulations, empowering engineers and researchers to model complex systems.
+ViennaPS is a header-only C++ library for simulating microelectronic fabrication processes. It combines surface and volume representations with advanced level-set methods and Monte Carlo flux calculations, powered by high-performance ray tracing. Users can develop custom models, use pre-configured physical models, or leverage emulation for flexible and efficient process simulations.
+
+ViennaPS is designed to be easily integrated into existing C++ projects and provides Python bindings for seamless use in Python environments. The library is under active development and is continuously improved to meet the evolving needs of process simulation in microelectronics.
 
 > [!NOTE]  
 > ViennaPS is under heavy development and improved daily. If you do have suggestions or find bugs, please let us know!
 
+## Quick Start  
+
+To install ViennaPS for Python, simply run:  
+
+```sh
+pip install ViennaPS
+```
+
+To use ViennaPS in C++, clone the repository and follow the installation steps below.
+
+For full documentation, visit [ViennaPS Documentation](https://viennatools.github.io/ViennaPS/).
+
 ## Releases
 Releases are tagged on the master branch and available in the [releases section](https://github.com/ViennaTools/ViennaPS/releases).
 
+ViennaPS is also available on the [Python Package Index (PyPI)](https://pypi.org/project/ViennaPS/) for most platforms.  
+
 ## Building
 
 ### Supported Operating Systems
@@ -89,7 +106,7 @@ If the dependencies are not found on the system, they will be built from source.
 > [!NOTE]  
 > __For more detailed installation instructions and troubleshooting tips, please refer to the ViennaPS [documentation](https://viennatools.github.io/ViennaPS/inst/).__
 
-ViennaPS operates as a header-only library, eliminating the need for a formal installation process. Nonetheless, we advise following the procedure to neatly organize and relocate all header files to a designated directory:
+ViennaPS is a header-only library, so no formal installation is required. However, following the steps below helps organize and manage dependencies more effectively:
 
 ```bash
 git clone https://github.com/ViennaTools/ViennaPS.git
@@ -112,7 +129,7 @@ cd ViennaPS
 pip install .
 ```
 
-> Some functionalities of the ViennaPS Python module only work in combination with the ViennaLS Python module. It is therefore recommended to additionally install the ViennaLS Python module on your system. Instructions to do so can be found in the [ViennaLS Git Repository](https://github.com/ViennaTools/viennals).
+> Some features of the ViennaPS Python module require the ViennaLS Python module. It is therefore recommended to additionally install the ViennaLS Python module on your system. Instructions to do so can be found in the [ViennaLS Git Repository](https://github.com/ViennaTools/viennals).
 
 ## Using the Python package
 
@@ -133,7 +150,7 @@ We recommend using [CPM.cmake](https://github.com/cpm-cmake/CPM.cmake) to consum
 
 * Installation with CPM
   ```cmake
-  CPMAddPackage("gh:viennatools/viennaps@3.3.0")
+  CPMAddPackage("gh:viennatools/viennaps@3.4.0")
   ```
 
 * With a local installation
@@ -146,6 +163,10 @@ We recommend using [CPM.cmake](https://github.com/cpm-cmake/CPM.cmake) to consum
     target_link_libraries(${PROJECT_NAME} PUBLIC ViennaTools::ViennaPS)
     ```
 
+## GPU Acceleration (Experimental)
+
+As of version 3.4.0, ViennaPS supports GPU acceleration for the ray tracing part of the library. This feature is still experimental and may not work on all systems. Details on how to enable GPU functionality can be found in the [documentation](https://viennatools.github.io/ViennaPS/inst/).
+
 ## Basic Examples
 
 ### Building
@@ -184,6 +205,10 @@ This [example](https://github.com/ViennaTools/ViennaPS/tree/master/examples/hole
 
 The image presents the results of different flux configurations, as tested in _testFluxes.py_. Each structure represents a variation in flux conditions, leading to differences in hole shape, depth, and profile characteristics. The variations highlight the influence of ion and neutral fluxes on the etching process.
 
+> [!NOTE] 
+> The underlying model may change in future releases, so running this example in newer versions of ViennaPS might not always reproduce exactly the same results.  
+> The images shown here were generated using **ViennaPS v3.3.0**.
+
 <div align="center">
   <img src="assets/sf6o2_results.png" width=700 style="background-color:white;">
 </div>
@@ -219,38 +244,29 @@ This [example](https://github.com/ViennaTools/ViennaPS/tree/master/examples/oxid
   <img src="assets/redeposition.gif" width=700 style="background-color:white;">
 </div>
 
-## Tests
+### GDS Mask Import Example
 
-ViennaPS uses CTest to run its tests. In order to check whether ViennaPS runs without issues on your system, you can run:
+This [example](https://github.com/ViennaTools/ViennaPS/tree/master/examples/GDSReader) tests the full GDS mask import, blurring, rotation, scaling, and flipping as well as the level set conversion pipeline. Shown below is the result after applying proximity correction and extrusion on a simple test.
 
-```bash
-git clone https://github.com/ViennaTools/ViennaPS.git
-cd ViennaPS
+<div align="center">
+  <img src="assets/masks.png" width=1200 style="background-color:white;">
+</div>
 
-cmake -B build -DVIENNAPS_BUILD_TESTS=ON
-cmake --build build
-ctest -E "Benchmark|Performance" --test-dir build
-```
 
-## Application
 
-> [!WARNING] 
-> The ViennaPS application is no longer updated with new functionalities added to ViennaPS after release 1.2.0. Please use the __Python bindings__ instead.
+## Tests
 
-It is also possible to build an application which can parse a custom configuration file and execute pre-defined processes. The application can be built using CMake:
+ViennaPS uses CTest to run its tests. In order to check whether ViennaPS runs without issues on your system, you can run:
 
 ```bash
 git clone https://github.com/ViennaTools/ViennaPS.git
 cd ViennaPS
 
-cmake -B build -DVIENNAPS_BUILD_APPLICATION=ON
+cmake -B build -DVIENNAPS_BUILD_TESTS=ON
 cmake --build build
+ctest -E "Benchmark|Performance" --test-dir build
 ```
 
-This creates 2 executables `ViennaPS2D` and `ViennaPS3D` which run processes in 2 or 3 dimensions respectively. Every configuration file can be run in 2D or 3D mode.
-
-The configuration file must obey a certain structure in order to be parsed correctly. An example for a configuration file can be seen in `SampleConfig.txt`. The configuration file is parsed line by line and each successfully parsed line is executed immediately. A detailed documentation for the configuration file can be found in the [app readme](app/README.md).
-
 ## Contributing
 
 If you want to contribute to ViennaPS, make sure to follow the [LLVM Coding guidelines](https://llvm.org/docs/CodingStandards.html).
@@ -263,7 +279,7 @@ cmake --build build --target format
 
 ## Authors
 
-Current contributors: Tobias Reiter, Noah Karnel, Lado Filipovic
+Current contributors: Tobias Reiter, Lado Filipovic, Roman Kostal, Noah Karnel
 
 Contact us via: viennatools@iue.tuwien.ac.at
 

viennaps-3.4.0.dist-info/RECORD

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viennaps2d/viennaps2d.pyi

@@ -61,6 +61,92 @@ class BoxDistribution(ProcessModel):
     @overload
     def __init__(self, halfAxes, gridDelta: float) -> None: ...
 
+class CF4O2Etching(ProcessModel):
+    @overload
+    def __init__(self) -> None: ...
+    @overload
+    def __init__(
+        self,
+        ionFlux: float,
+        etchantFlux: float,
+        oxygenFlux: float,
+        polymerFlux: float,
+        meanIonEnergy: float = ...,
+        sigmaIonEnergy: float = ...,
+        ionExponent: float = ...,
+        oxySputterYield: float = ...,
+        polySputterYield: float = ...,
+        etchStopDepth: float = ...,
+    ) -> None: ...
+    @overload
+    def __init__(self, parameters: CF4O2Parameters) -> None: ...
+    def getParameters(self) -> CF4O2Parameters: ...
+    def setParameters(self, arg0: CF4O2Parameters) -> None: ...
+
+class CF4O2Parameters:
+    Ions: CF4O2ParametersIons
+    Mask: CF4O2ParametersMask
+    Passivation: CF4O2ParametersPassivation
+    Si: CF4O2ParametersSi
+    SiGe: CF4O2ParametersSiGe
+    etchStopDepth: float
+    etchantFlux: float
+    fluxIncludeSticking: bool
+    gamma_C: dict[Material, float]
+    gamma_C_oxidized: dict[Material, float]
+    gamma_F: dict[Material, float]
+    gamma_F_oxidized: dict[Material, float]
+    gamma_O: dict[Material, float]
+    gamma_O_passivated: dict[Material, float]
+    ionFlux: float
+    oxygenFlux: float
+    polymerFlux: float
+    def __init__(self) -> None: ...
+
+class CF4O2ParametersIons:
+    exponent: float
+    inflectAngle: float
+    meanEnergy: float
+    minAngle: float
+    n_l: float
+    sigmaEnergy: float
+    def __init__(self) -> None: ...
+
+class CF4O2ParametersMask:
+    A_sp: float
+    Eth_sp: float
+    rho: float
+    def __init__(self) -> None: ...
+
+class CF4O2ParametersPassivation:
+    A_C_ie: float
+    A_O_ie: float
+    Eth_C_ie: float
+    Eth_O_ie: float
+    def __init__(self) -> None: ...
+
+class CF4O2ParametersSi:
+    A_ie: float
+    A_sp: float
+    Eth_ie: float
+    Eth_sp: float
+    beta_sigma: float
+    k_sigma: float
+    rho: float
+    def __init__(self) -> None: ...
+
+class CF4O2ParametersSiGe:
+    A_ie: float
+    A_sp: float
+    Eth_ie: float
+    Eth_sp: float
+    beta_sigma: float
+    k_sigma: float
+    rho: float
+    x: float
+    def __init__(self) -> None: ...
+    def k_sigma_SiGe(self, arg0: float) -> float: ...
+
 class DirectionalEtching(ProcessModel):
     @overload
     def __init__(
@@ -377,6 +463,7 @@ class HoleShape:
 class IBEParameters:
     exponent: float
     inflectAngle: float
+    materialPlaneWaferRate: dict[Material, float]
     meanEnergy: float
     minAngle: float
     n_l: float
@@ -618,6 +705,7 @@ class Material:
     Dielectric: ClassVar[Material] = ...
     GAS: ClassVar[Material] = ...
     GaN: ClassVar[Material] = ...
+    HfO2: ClassVar[Material] = ...
     Mask: ClassVar[Material] = ...
     Metal: ClassVar[Material] = ...
     PolySi: ClassVar[Material] = ...
@@ -867,6 +955,8 @@ class SF6O2ParametersIons:
     minAngle: float
     n_l: float
     sigmaEnergy: float
+    thetaRMin: float
+    thetaRMax: float
     def __init__(self) -> None: ...
 
 class SF6O2ParametersMask:

viennaps3d/viennaps3d/gpu.pyi

@@ -0,0 +1,60 @@
+import viennals3d.viennals3d
+import viennaps3d.viennaps3d
+from typing import Callable, overload
+
+class Context:
+    deviceID: int
+    def __init__(self) -> None: ...
+    def addModule(self, arg0: str) -> None: ...
+    def create(self, modulePath: Path = ..., deviceID: int = ...) -> None: ...
+    def destroy(self) -> None: ...
+
+class MultiParticleProcess(ProcessModel):
+    def __init__(self) -> None: ...
+    def addIonParticle(self, sourcePower: float, thetaRMin: float = ..., thetaRMax: float = ..., minAngle: float = ..., B_sp: float = ..., meanEnergy: float = ..., sigmaEnergy: float = ..., thresholdEnergy: float = ..., inflectAngle: float = ..., n: float = ..., label: str = ...) -> None: ...
+    @overload
+    def addNeutralParticle(self, stickingProbability: float, label: str = ...) -> None: ...
+    @overload
+    def addNeutralParticle(self, materialSticking: dict[viennaps3d.viennaps3d.Material, float], defaultStickingProbability: float = ..., label: str = ...) -> None: ...
+    def setRateFunction(self, arg0: Callable[[list[float], viennaps3d.viennaps3d.Material], float]) -> None: ...
+
+class Path:
+    def __init__(self, arg0: str) -> None: ...
+
+class Process:
+    @overload
+    def __init__(self, context: Context) -> None: ...
+    @overload
+    def __init__(self, context: Context, domain: viennaps3d.viennaps3d.Domain, model: ProcessModel, duration: float) -> None: ...
+    def apply(self) -> None: ...
+    def calculateFlux(self) -> viennals3d.viennals3d.Mesh: ...
+    def disableAdvectionVelocityOutput(self) -> None: ...
+    def disableRandomSeeds(self) -> None: ...
+    def enableAdvectionVelocityOutput(self) -> None: ...
+    def enableRandomSeeds(self) -> None: ...
+    def getAdvectionParameters(self) -> viennaps3d.viennaps3d.AdvectionParameters: ...
+    def getProcessDuration(self) -> float: ...
+    def getRayTracingParameters(self) -> viennaps3d.viennaps3d.RayTracingParameters: ...
+    def setAdvectionParameters(self, arg0: viennaps3d.viennaps3d.AdvectionParameters) -> None: ...
+    def setDomain(self, arg0: viennaps3d.viennaps3d.Domain) -> None: ...
+    def setIntegrationScheme(self, arg0) -> None: ...
+    def setMaxCoverageInitIterations(self, arg0: int) -> None: ...
+    def setNumberOfRaysPerPoint(self, arg0: int) -> None: ...
+    def setProcessDuration(self, arg0: float) -> None: ...
+    def setProcessModel(self, arg0: ProcessModel) -> None: ...
+    def setRayTracingParameters(self, arg0: viennaps3d.viennaps3d.RayTracingParameters) -> None: ...
+    def setTimeStepRatio(self, arg0: float) -> None: ...
+
+class ProcessModel:
+    def __init__(self, *args, **kwargs) -> None: ...
+
+class SF6O2Etching(viennaps3d.viennaps3d.ProcessModel):
+    def __init__(self, parameters: viennaps3d.viennaps3d.SF6O2Parameters) -> None: ...
+
+class SingleParticleProcess(ProcessModel):
+    @overload
+    def __init__(self, rate: float = ..., stickingProbability: float = ..., sourceExponent: float = ..., maskMaterial: viennaps3d.viennaps3d.Material = ...) -> None: ...
+    @overload
+    def __init__(self, rate: float, stickingProbability: float, sourceExponent: float, maskMaterials: list[viennaps3d.viennaps3d.Material]) -> None: ...
+    @overload
+    def __init__(self, materialRates: dict[viennaps3d.viennaps3d.Material, float], stickingProbability: float, sourceExponent: float) -> None: ...

viennaps3d/viennaps3d.pyi

@@ -61,6 +61,92 @@ class BoxDistribution(ProcessModel):
     @overload
     def __init__(self, halfAxes, gridDelta: float) -> None: ...
 
+class CF4O2Etching(ProcessModel):
+    @overload
+    def __init__(self) -> None: ...
+    @overload
+    def __init__(
+        self,
+        ionFlux: float,
+        etchantFlux: float,
+        oxygenFlux: float,
+        polymerFlux: float,
+        meanIonEnergy: float = ...,
+        sigmaIonEnergy: float = ...,
+        ionExponent: float = ...,
+        oxySputterYield: float = ...,
+        polySputterYield: float = ...,
+        etchStopDepth: float = ...,
+    ) -> None: ...
+    @overload
+    def __init__(self, parameters: CF4O2Parameters) -> None: ...
+    def getParameters(self) -> CF4O2Parameters: ...
+    def setParameters(self, arg0: CF4O2Parameters) -> None: ...
+
+class CF4O2Parameters:
+    Ions: CF4O2ParametersIons
+    Mask: CF4O2ParametersMask
+    Passivation: CF4O2ParametersPassivation
+    Si: CF4O2ParametersSi
+    SiGe: CF4O2ParametersSiGe
+    etchStopDepth: float
+    etchantFlux: float
+    fluxIncludeSticking: bool
+    gamma_C: dict[Material, float]
+    gamma_C_oxidized: dict[Material, float]
+    gamma_F: dict[Material, float]
+    gamma_F_oxidized: dict[Material, float]
+    gamma_O: dict[Material, float]
+    gamma_O_passivated: dict[Material, float]
+    ionFlux: float
+    oxygenFlux: float
+    polymerFlux: float
+    def __init__(self) -> None: ...
+
+class CF4O2ParametersIons:
+    exponent: float
+    inflectAngle: float
+    meanEnergy: float
+    minAngle: float
+    n_l: float
+    sigmaEnergy: float
+    def __init__(self) -> None: ...
+
+class CF4O2ParametersMask:
+    A_sp: float
+    Eth_sp: float
+    rho: float
+    def __init__(self) -> None: ...
+
+class CF4O2ParametersPassivation:
+    A_C_ie: float
+    A_O_ie: float
+    Eth_C_ie: float
+    Eth_O_ie: float
+    def __init__(self) -> None: ...
+
+class CF4O2ParametersSi:
+    A_ie: float
+    A_sp: float
+    Eth_ie: float
+    Eth_sp: float
+    beta_sigma: float
+    k_sigma: float
+    rho: float
+    def __init__(self) -> None: ...
+
+class CF4O2ParametersSiGe:
+    A_ie: float
+    A_sp: float
+    Eth_ie: float
+    Eth_sp: float
+    beta_sigma: float
+    k_sigma: float
+    rho: float
+    x: float
+    def __init__(self) -> None: ...
+    def k_sigma_SiGe(self, arg0: float) -> float: ...
+
 class DirectionalEtching(ProcessModel):
     @overload
     def __init__(
@@ -334,6 +420,7 @@ class HoleShape:
 class IBEParameters:
     exponent: float
     inflectAngle: float
+    materialPlaneWaferRate: dict[Material, float]
     meanEnergy: float
     minAngle: float
     n_l: float
@@ -575,6 +662,7 @@ class Material:
     Dielectric: ClassVar[Material] = ...
     GAS: ClassVar[Material] = ...
     GaN: ClassVar[Material] = ...
+    HfO2: ClassVar[Material] = ...
     Mask: ClassVar[Material] = ...
     Metal: ClassVar[Material] = ...
     PolySi: ClassVar[Material] = ...
@@ -824,6 +912,8 @@ class SF6O2ParametersIons:
     minAngle: float
     n_l: float
     sigmaEnergy: float
+    thetaRMin: float
+    thetaRMax: float
     def __init__(self) -> None: ...
 
 class SF6O2ParametersMask:

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