ViennaPS 3.3.0__cp310-cp310-win_amd64.whl → 3.5.0__cp310-cp310-win_amd64.whl

viennaps2d/viennaps2d.pyi

@@ -7,7 +7,7 @@ __version__: str
 version: str
 
 class AdvectionCallback:
-    domain: Domain
+    domain: Incomplete
     def __init__(self) -> None: ...
     def applyPostAdvect(self, arg0: float) -> bool: ...
     def applyPreAdvect(self, arg0: float) -> bool: ...
@@ -51,7 +51,7 @@ class AtomicLayerProcess:
     def setNumberOfRaysPerPoint(self, arg0: int) -> None: ...
     def setProcessModel(self, arg0: ProcessModel) -> None: ...
     def setPulseTime(self, arg0: float) -> None: ...
-    def setSourceDirection(self, arg0: rayTraceDirection) -> None: ...
+    def setSourceDirection(self, arg0) -> None: ...
 
 class BoxDistribution(ProcessModel):
     @overload
@@ -61,7 +61,159 @@ class BoxDistribution(ProcessModel):
     @overload
     def __init__(self, halfAxes, gridDelta: float) -> None: ...
 
-class DirectionalEtching(ProcessModel):
+class CF4O2Etching(ProcessModel):
+    @overload
+    def __init__(self) -> None: ...
+    @overload
+    def __init__(
+        self,
+        ionFlux: float,
+        etchantFlux: float,
+        oxygenFlux: float,
+        polymerFlux: float,
+        meanIonEnergy: float = ...,
+        sigmaIonEnergy: float = ...,
+        ionExponent: float = ...,
+        oxySputterYield: float = ...,
+        polySputterYield: float = ...,
+        etchStopDepth: float = ...,
+    ) -> None: ...
+    @overload
+    def __init__(self, parameters: CF4O2Parameters) -> None: ...
+    def getParameters(self) -> CF4O2Parameters: ...
+    def setParameters(self, arg0: CF4O2Parameters) -> None: ...
+
+class CF4O2Parameters:
+    Ions: CF4O2ParametersIons
+    Mask: CF4O2ParametersMask
+    Passivation: CF4O2ParametersPassivation
+    Si: CF4O2ParametersSi
+    SiGe: CF4O2ParametersSiGe
+    etchStopDepth: float
+    etchantFlux: float
+    fluxIncludeSticking: bool
+    gamma_C: dict[Material, float]
+    gamma_C_oxidized: dict[Material, float]
+    gamma_F: dict[Material, float]
+    gamma_F_oxidized: dict[Material, float]
+    gamma_O: dict[Material, float]
+    gamma_O_passivated: dict[Material, float]
+    ionFlux: float
+    oxygenFlux: float
+    polymerFlux: float
+    def __init__(self) -> None: ...
+
+class CF4O2ParametersIons:
+    exponent: float
+    inflectAngle: float
+    meanEnergy: float
+    minAngle: float
+    n_l: float
+    sigmaEnergy: float
+    def __init__(self) -> None: ...
+
+class CF4O2ParametersMask:
+    A_sp: float
+    Eth_sp: float
+    rho: float
+    def __init__(self) -> None: ...
+
+class CF4O2ParametersPassivation:
+    A_C_ie: float
+    A_O_ie: float
+    Eth_C_ie: float
+    Eth_O_ie: float
+    def __init__(self) -> None: ...
+
+class CF4O2ParametersSi:
+    A_ie: float
+    A_sp: float
+    Eth_ie: float
+    Eth_sp: float
+    beta_sigma: float
+    k_sigma: float
+    rho: float
+    def __init__(self) -> None: ...
+
+class CF4O2ParametersSiGe:
+    A_ie: float
+    A_sp: float
+    Eth_ie: float
+    Eth_sp: float
+    beta_sigma: float
+    k_sigma: float
+    rho: float
+    x: float
+    def __init__(self) -> None: ...
+    def k_sigma_SiGe(self, arg0: float) -> float: ...
+
+class CSVFileProcess(ProcessModel):
+    def __init__(
+        self,
+        ratesFile: str,
+        direction,
+        offset,
+        isotropicComponent: float = ...,
+        directionalComponent: float = ...,
+        maskMaterials: list[Material] = ...,
+        calculateVisibility: bool = ...,
+    ) -> None: ...
+    def setCustomInterpolator(self, function: Callable) -> None: ...
+    def setIDWNeighbors(self, k: int = ...) -> None: ...
+    @overload
+    def setInterpolationMode(self, mode: Interpolation) -> None: ...
+    @overload
+    def setInterpolationMode(self, mode: str) -> None: ...
+    def setOffset(self, offset) -> None: ...
+
+class DenseCellSet:
+    def __init__(self) -> None: ...
+    @overload
+    def addFillingFraction(self, arg0: int, arg1: float) -> bool: ...
+    @overload
+    def addFillingFraction(self, arg0, arg1: float) -> bool: ...
+    def addFillingFractionInMaterial(self, arg0, arg1: float, arg2: int) -> bool: ...
+    def addScalarData(self, arg0: str, arg1: float) -> None: ...
+    def buildNeighborhood(self, forceRebuild: bool = ...) -> None: ...
+    def clear(self) -> None: ...
+    def fromLevelSets(
+        self,
+        levelSets: list[viennals2d.viennals2d.Domain],
+        materialMap: viennals2d.viennals2d.MaterialMap = ...,
+        depth: float = ...,
+    ) -> None: ...
+    def getAverageFillingFraction(self, arg0, arg1: float) -> float: ...
+    def getBoundingBox(self, *args, **kwargs): ...
+    def getCellCenter(self, *args, **kwargs): ...
+    def getCellGrid(self) -> viennals2d.viennals2d.Mesh: ...
+    def getDepth(self) -> float: ...
+    def getElement(self, *args, **kwargs): ...
+    def getElements(self, *args, **kwargs): ...
+    def getFillingFraction(self, arg0) -> float: ...
+    def getFillingFractions(self) -> list[float]: ...
+    def getGridDelta(self) -> float: ...
+    def getIndex(self, arg0) -> int: ...
+    def getNeighbors(self, *args, **kwargs): ...
+    def getNode(self, *args, **kwargs): ...
+    def getNodes(self, *args, **kwargs): ...
+    def getNumberOfCells(self) -> int: ...
+    def getScalarData(self, arg0: str) -> list[float]: ...
+    def getScalarDataLabels(self) -> list[str]: ...
+    def getSurface(self) -> viennals2d.viennals2d.Domain: ...
+    def readCellSetData(self, arg0: str) -> None: ...
+    def setCellSetPosition(self, arg0: bool) -> None: ...
+    def setCoverMaterial(self, arg0: int) -> None: ...
+    @overload
+    def setFillingFraction(self, arg0: int, arg1: float) -> bool: ...
+    @overload
+    def setFillingFraction(self, arg0, arg1: float) -> bool: ...
+    def setPeriodicBoundary(self, arg0) -> None: ...
+    def updateMaterials(self) -> None: ...
+    def updateSurface(self) -> None: ...
+    def writeCellSetData(self, arg0: str) -> None: ...
+    def writeVTU(self, arg0: str) -> None: ...
+
+class DirectionalProcess(ProcessModel):
     @overload
     def __init__(
         self,
@@ -95,12 +247,18 @@ class Domain:
         self,
         gridDelta: float,
         xExtent: float,
+        yExtent: float,
         boundary: viennals2d.viennals2d.BoundaryConditionEnum = ...,
     ) -> None: ...
-    def applyBooleanOperation(
+    @overload
+    def __init__(
         self,
-        arg0: viennals2d.viennals2d.Domain,
-        arg1: viennals2d.viennals2d.BooleanOperationEnum,
+        gridDelta: float,
+        xExtent: float,
+        boundary: viennals2d.viennals2d.BoundaryConditionEnum = ...,
+    ) -> None: ...
+    def applyBooleanOperation(
+        self, arg0: viennals2d.viennals2d.Domain, arg1
     ) -> None: ...
     def clear(self) -> None: ...
     def deepCopy(self, arg0: Domain) -> None: ...
@@ -108,8 +266,8 @@ class Domain:
     def generateCellSet(self, arg0: float, arg1: Material, arg2: bool) -> None: ...
     def getBoundaryConditions(self, *args, **kwargs): ...
     def getBoundingBox(self, *args, **kwargs): ...
-    def getCellSet(self, *args, **kwargs): ...
-    def getGrid(self, *args, **kwargs): ...
+    def getCellSet(self) -> DenseCellSet: ...
+    def getGrid(self) -> viennals2d.viennals2d.hrleGrid: ...
     def getGridDelta(self) -> float: ...
     def getLevelSets(self) -> list[viennals2d.viennals2d.Domain]: ...
     def getMaterialMap(self, *args, **kwargs): ...
@@ -209,7 +367,7 @@ class DomainSetup:
     def boundaryCons(self, *args, **kwargs): ...
     def bounds(self, *args, **kwargs): ...
     def check(self) -> None: ...
-    def grid(self, *args, **kwargs): ...
+    def grid(self) -> viennals2d.viennals2d.hrleGrid: ...
     def gridDelta(self) -> float: ...
     def halveXAxis(self) -> None: ...
     def halveYAxis(self) -> None: ...
@@ -346,6 +504,40 @@ class FluorocarbonParametersSiO2:
     rho: float
     def __init__(self) -> None: ...
 
+class GDSGeometry:
+    @overload
+    def __init__(self) -> None: ...
+    @overload
+    def __init__(self, gridDelta: float) -> None: ...
+    @overload
+    def __init__(self, gridDelta: float, boundaryConditions) -> None: ...
+    def addBlur(
+        self,
+        sigmas: list[float],
+        weights: list[float],
+        threshold: float = ...,
+        delta: float = ...,
+        gridRefinement: int = ...,
+    ) -> None: ...
+    def getAllLayers(self) -> set[int]: ...
+    def getBounds(self, *args, **kwargs): ...
+    def getNumberOfStructures(self) -> int: ...
+    def layerToLevelSet(
+        self, layer: int, blurLayer: bool = ...
+    ) -> viennals2d.viennals2d.Domain: ...
+    def print(self) -> None: ...
+    def setBoundaryConditions(
+        self, arg0: list[viennals2d.viennals2d.BoundaryConditionEnum]
+    ) -> None: ...
+    def setBoundaryPadding(self, arg0: float, arg1: float) -> None: ...
+    def setGridDelta(self, arg0: float) -> None: ...
+
+class GDSReader:
+    def __init__(self) -> None: ...
+    def apply(self) -> None: ...
+    def setFileName(self, arg0: str) -> None: ...
+    def setGeometry(self, *args, **kwargs): ...
+
 class GeometryFactory:
     def __init__(self, *args, **kwargs) -> None: ...
     def makeBoxStencil(
@@ -357,6 +549,28 @@ class GeometryFactory:
     def makeMask(self, base: float, height: float) -> viennals2d.viennals2d.Domain: ...
     def makeSubstrate(self, base: float) -> viennals2d.viennals2d.Domain: ...
 
+class HBrO2Etching(ProcessModel):
+    @overload
+    def __init__(self) -> None: ...
+    @overload
+    def __init__(
+        self,
+        ionFlux: float,
+        etchantFlux: float,
+        oxygenFlux: float,
+        meanIonEnergy: float = ...,
+        sigmaIonEnergy: float = ...,
+        ionExponent: float = ...,
+        oxySputterYield: float = ...,
+        etchStopDepth: float = ...,
+    ) -> None: ...
+    @overload
+    def __init__(self, parameters: PlasmaEtchingParameters) -> None: ...
+    @staticmethod
+    def defaultParameters() -> PlasmaEtchingParameters: ...
+    def getParameters(self) -> PlasmaEtchingParameters: ...
+    def setParameters(self, arg0: PlasmaEtchingParameters) -> None: ...
+
 class HoleShape:
     __members__: ClassVar[dict] = ...  # read-only
     Full: ClassVar[HoleShape] = ...
@@ -377,6 +591,7 @@ class HoleShape:
 class IBEParameters:
     exponent: float
     inflectAngle: float
+    materialPlaneWaferRate: dict[Material, float]
     meanEnergy: float
     minAngle: float
     n_l: float
@@ -389,6 +604,23 @@ class IBEParameters:
     yieldFunction: Callable[[float], float]
     def __init__(self) -> None: ...
 
+class Interpolation:
+    __members__: ClassVar[dict] = ...  # read-only
+    CUSTOM: ClassVar[Interpolation] = ...
+    IDW: ClassVar[Interpolation] = ...
+    LINEAR: ClassVar[Interpolation] = ...
+    __entries: ClassVar[dict] = ...
+    def __init__(self, value: int) -> None: ...
+    def __eq__(self, other: object) -> bool: ...
+    def __hash__(self) -> int: ...
+    def __index__(self) -> int: ...
+    def __int__(self) -> int: ...
+    def __ne__(self, other: object) -> bool: ...
+    @property
+    def name(self) -> str: ...
+    @property
+    def value(self) -> int: ...
+
 class IonBeamEtching(ProcessModel):
     @overload
     def __init__(self) -> None: ...
@@ -618,6 +850,7 @@ class Material:
     Dielectric: ClassVar[Material] = ...
     GAS: ClassVar[Material] = ...
     GaN: ClassVar[Material] = ...
+    HfO2: ClassVar[Material] = ...
     Mask: ClassVar[Material] = ...
     Metal: ClassVar[Material] = ...
     PolySi: ClassVar[Material] = ...
@@ -725,8 +958,10 @@ class Particle:
     def __init__(self, *args, **kwargs) -> None: ...
     def getLocalDataLabels(self) -> list[str]: ...
     def getSourceDistributionPower(self) -> float: ...
-    def initNew(self, *args, **kwargs): ...
-    def surfaceCollision(self, *args, **kwargs): ...
+    def initNew(self, arg0) -> None: ...
+    def surfaceCollision(
+        self, arg0: float, arg1, arg2, arg3: int, arg4: int, arg5, arg6, arg7
+    ) -> None: ...
     def surfaceReflection(self, *args, **kwargs): ...
 
 class Planarize:
@@ -738,6 +973,54 @@ class Planarize:
     def setCutoffPosition(self, arg0: float) -> None: ...
     def setDomain(self, arg0: Domain) -> None: ...
 
+class PlasmaEtchingParameters:
+    Ions: PlasmaEtchingParametersIons
+    Mask: PlasmaEtchingParametersMask
+    Passivation: PlasmaEtchingParametersPassivation
+    Substrate: PlasmaEtchingParametersSubstrate
+    beta_E: dict[int, float]
+    beta_P: dict[int, float]
+    etchStopDepth: float
+    etchantFlux: float
+    ionFlux: float
+    passivationFlux: float
+    def __init__(self) -> None: ...
+
+class PlasmaEtchingParametersIons:
+    exponent: float
+    inflectAngle: float
+    meanEnergy: float
+    minAngle: float
+    n_l: float
+    sigmaEnergy: float
+    thetaRMax: float
+    thetaRMin: float
+    def __init__(self) -> None: ...
+
+class PlasmaEtchingParametersMask:
+    A_sp: float
+    B_sp: float
+    Eth_sp: float
+    rho: float
+    def __init__(self) -> None: ...
+
+class PlasmaEtchingParametersPassivation:
+    A_ie: float
+    Eth_ie: float
+    def __init__(self) -> None: ...
+
+class PlasmaEtchingParametersSubstrate:
+    A_ie: float
+    A_sp: float
+    B_ie: float
+    B_sp: float
+    Eth_ie: float
+    Eth_sp: float
+    beta_sigma: float
+    k_sigma: float
+    rho: float
+    def __init__(self) -> None: ...
+
 class Process:
     def __init__(self) -> None: ...
     def apply(self) -> None: ...
@@ -763,7 +1046,7 @@ class Process:
     def setProcessModel(self, arg0: ProcessModel) -> None: ...
     def setRayTracingDiskRadius(self, arg0: float) -> None: ...
     def setRayTracingParameters(self, arg0: RayTracingParameters) -> None: ...
-    def setSourceDirection(self, arg0: rayTraceDirection) -> None: ...
+    def setSourceDirection(self, arg0) -> None: ...
     def setTimeStepRatio(self, arg0: float) -> None: ...
 
 class ProcessModel:
@@ -800,6 +1083,18 @@ class ProcessParams:
     def getScalarDataLabel(self, arg0: int) -> str: ...
     def insertNextScalar(self, arg0: float, arg1: str) -> None: ...
 
+class RateGrid:
+    def __init__(self) -> None: ...
+    def interpolate(self, coord) -> float: ...
+    def loadFromCSV(self, filename: str) -> bool: ...
+    def setCustomInterpolator(self, function: Callable) -> None: ...
+    def setIDWNeighbors(self, k: int) -> None: ...
+    @overload
+    def setInterpolationMode(self, mode: Interpolation) -> None: ...
+    @overload
+    def setInterpolationMode(self, mode: str) -> None: ...
+    def setOffset(self, offset) -> None: ...
+
 class RateSet:
     calculateVisibility: bool
     direction: Incomplete
@@ -822,7 +1117,7 @@ class RayTracingParameters:
     normalizationType: NormalizationType
     raysPerPoint: int
     smoothingNeighbors: int
-    sourceDirection: rayTraceDirection
+    sourceDirection: Incomplete
     useRandomSeeds: bool
     def __init__(self) -> None: ...
 
@@ -842,58 +1137,11 @@ class SF6O2Etching(ProcessModel):
         etchStopDepth: float = ...,
     ) -> None: ...
     @overload
-    def __init__(self, parameters: SF6O2Parameters) -> None: ...
-    def getParameters(self) -> SF6O2Parameters: ...
-    def setParameters(self, arg0: SF6O2Parameters) -> None: ...
-
-class SF6O2Parameters:
-    Ions: SF6O2ParametersIons
-    Mask: SF6O2ParametersMask
-    Passivation: SF6O2ParametersPassivation
-    Si: SF6O2ParametersSi
-    beta_F: dict[int, float]
-    beta_O: dict[int, float]
-    etchStopDepth: float
-    etchantFlux: float
-    fluxIncludeSticking: bool
-    ionFlux: float
-    oxygenFlux: float
-    def __init__(self) -> None: ...
-
-class SF6O2ParametersIons:
-    exponent: float
-    inflectAngle: float
-    meanEnergy: float
-    minAngle: float
-    n_l: float
-    sigmaEnergy: float
-    def __init__(self) -> None: ...
-
-class SF6O2ParametersMask:
-    A_sp: float
-    B_sp: float
-    Eth_sp: float
-    rho: float
-    def __init__(self) -> None: ...
-
-class SF6O2ParametersPassivation:
-    A_ie: float
-    Eth_ie: float
-    def __init__(self) -> None: ...
-
-class SF6O2ParametersSi:
-    A_ie: float
-    A_sp: float
-    B_ie: float
-    B_sp: float
-    Eth_ie: float
-    Eth_sp: float
-    beta_sigma: float
-    k_sigma: float
-    rho: float
-    theta_g_ie: float
-    theta_g_sp: float
-    def __init__(self) -> None: ...
+    def __init__(self, parameters: PlasmaEtchingParameters) -> None: ...
+    @staticmethod
+    def defaultParameters() -> PlasmaEtchingParameters: ...
+    def getParameters(self) -> PlasmaEtchingParameters: ...
+    def setParameters(self, arg0: PlasmaEtchingParameters) -> None: ...
 
 class SingleParticleALD(ProcessModel):
     def __init__(
@@ -986,24 +1234,4 @@ class ToDiskMesh:
     def setDomain(self, arg0: Domain) -> None: ...
     def setMesh(self, arg0: viennals2d.viennals2d.Mesh) -> None: ...
 
-class rayTraceDirection:
-    __members__: ClassVar[dict] = ...  # read-only
-    NEG_X: ClassVar[rayTraceDirection] = ...
-    NEG_Y: ClassVar[rayTraceDirection] = ...
-    NEG_Z: ClassVar[rayTraceDirection] = ...
-    POS_X: ClassVar[rayTraceDirection] = ...
-    POS_Y: ClassVar[rayTraceDirection] = ...
-    POS_Z: ClassVar[rayTraceDirection] = ...
-    __entries: ClassVar[dict] = ...
-    def __init__(self, value: int) -> None: ...
-    def __eq__(self, other: object) -> bool: ...
-    def __hash__(self) -> int: ...
-    def __index__(self) -> int: ...
-    def __int__(self) -> int: ...
-    def __ne__(self, other: object) -> bool: ...
-    @property
-    def name(self) -> str: ...
-    @property
-    def value(self) -> int: ...
-
 def setNumThreads(arg0: int) -> None: ...

viennaps3d/__init__.py

@@ -24,6 +24,15 @@ def _windows_dll_path():
         os.add_dll_directory(path)
         os.environ["PATH"] = path + os.pathsep + os.environ["PATH"]
 
+def _module_ptx_path():
+    from importlib.util import find_spec
+    import os
+
+    spec = find_spec("viennaps3d")
+    install_path = os.path.dirname(os.path.abspath(spec.origin))
+    return os.path.join(install_path, "ptx")
+
+
 if sys.platform == "win32":
     _windows_dll_path()
 
@@ -32,6 +41,9 @@ from viennals3d import IntegrationSchemeEnum as IntegrationScheme
 from viennals3d import BoundaryConditionEnum as BoundaryType
 from .viennaps3d import *
 
+if D == 3:
+    ptxPath = _module_ptx_path()
+
 # Config file reader helper function
 def ReadConfigFile(fileName: str):
     """Read a config file in the ViennaPS standard config file format.
@@ -39,7 +51,7 @@ def ReadConfigFile(fileName: str):
     Parameters
     ----------
     fileName: str
-              Name of the config file.
+                Name of the config file.
     
     Returns
     -------
@@ -60,7 +72,8 @@ def ReadConfigFile(fileName: str):
 
                 try:
                     val = float(par_value) 
-                except: val = par_value
+                except: 
+                    val = par_value
 
                 par_dict[par_name] = val
 

viennaps3d/viennaps3d/gpu.pyi

@@ -0,0 +1,111 @@
+import viennals3d.viennals3d
+import viennaps3d.viennaps3d
+from typing import Callable, overload
+
+class Context:
+    deviceID: int
+    def __init__(self) -> None: ...
+    def addModule(self, arg0: str) -> None: ...
+    def create(self, modulePath: Path = ..., deviceID: int = ...) -> None: ...
+    def destroy(self) -> None: ...
+
+class MultiParticleProcess(ProcessModel):
+    def __init__(self) -> None: ...
+    def addIonParticle(
+        self,
+        sourcePower: float,
+        thetaRMin: float = ...,
+        thetaRMax: float = ...,
+        minAngle: float = ...,
+        B_sp: float = ...,
+        meanEnergy: float = ...,
+        sigmaEnergy: float = ...,
+        thresholdEnergy: float = ...,
+        inflectAngle: float = ...,
+        n: float = ...,
+        label: str = ...,
+    ) -> None: ...
+    @overload
+    def addNeutralParticle(
+        self, stickingProbability: float, label: str = ...
+    ) -> None: ...
+    @overload
+    def addNeutralParticle(
+        self,
+        materialSticking: dict[viennaps3d.viennaps3d.Material, float],
+        defaultStickingProbability: float = ...,
+        label: str = ...,
+    ) -> None: ...
+    def setRateFunction(
+        self, arg0: Callable[[list[float], viennaps3d.viennaps3d.Material], float]
+    ) -> None: ...
+
+class Path:
+    def __init__(self, arg0: str) -> None: ...
+
+class Process:
+    @overload
+    def __init__(self, context: Context) -> None: ...
+    @overload
+    def __init__(
+        self,
+        context: Context,
+        domain: viennaps3d.viennaps3d.Domain,
+        model: ProcessModel,
+        duration: float,
+    ) -> None: ...
+    def apply(self) -> None: ...
+    def calculateFlux(self) -> viennals3d.viennals3d.Mesh: ...
+    def disableAdvectionVelocityOutput(self) -> None: ...
+    def disableRandomSeeds(self) -> None: ...
+    def enableAdvectionVelocityOutput(self) -> None: ...
+    def enableRandomSeeds(self) -> None: ...
+    def getAdvectionParameters(self) -> viennaps3d.viennaps3d.AdvectionParameters: ...
+    def getProcessDuration(self) -> float: ...
+    def getRayTracingParameters(self) -> viennaps3d.viennaps3d.RayTracingParameters: ...
+    def setAdvectionParameters(
+        self, arg0: viennaps3d.viennaps3d.AdvectionParameters
+    ) -> None: ...
+    def setDomain(self, arg0: viennaps3d.viennaps3d.Domain) -> None: ...
+    def setIntegrationScheme(self, arg0) -> None: ...
+    def setMaxCoverageInitIterations(self, arg0: int) -> None: ...
+    def setNumberOfRaysPerPoint(self, arg0: int) -> None: ...
+    def setProcessDuration(self, arg0: float) -> None: ...
+    def setProcessModel(self, arg0: ProcessModel) -> None: ...
+    def setRayTracingParameters(
+        self, arg0: viennaps3d.viennaps3d.RayTracingParameters
+    ) -> None: ...
+    def setTimeStepRatio(self, arg0: float) -> None: ...
+
+class ProcessModel:
+    def __init__(self, *args, **kwargs) -> None: ...
+
+class SF6O2Etching(viennaps3d.viennaps3d.ProcessModel):
+    def __init__(
+        self, parameters: viennaps3d.viennaps3d.PlasmaEtchingParameters
+    ) -> None: ...
+
+class SingleParticleProcess(ProcessModel):
+    @overload
+    def __init__(
+        self,
+        rate: float = ...,
+        stickingProbability: float = ...,
+        sourceExponent: float = ...,
+        maskMaterial: viennaps3d.viennaps3d.Material = ...,
+    ) -> None: ...
+    @overload
+    def __init__(
+        self,
+        rate: float,
+        stickingProbability: float,
+        sourceExponent: float,
+        maskMaterials: list[viennaps3d.viennaps3d.Material],
+    ) -> None: ...
+    @overload
+    def __init__(
+        self,
+        materialRates: dict[viennaps3d.viennaps3d.Material, float],
+        stickingProbability: float,
+        sourceExponent: float,
+    ) -> None: ...