ViennaPS 3.3.0__cp310-cp310-macosx_11_0_arm64.whl → 3.4.0__cp310-cp310-macosx_11_0_arm64.whl

viennaps2d/viennaps2d.pyi

@@ -61,6 +61,92 @@ class BoxDistribution(ProcessModel):
     @overload
     def __init__(self, halfAxes, gridDelta: float) -> None: ...
 
+class CF4O2Etching(ProcessModel):
+    @overload
+    def __init__(self) -> None: ...
+    @overload
+    def __init__(
+        self,
+        ionFlux: float,
+        etchantFlux: float,
+        oxygenFlux: float,
+        polymerFlux: float,
+        meanIonEnergy: float = ...,
+        sigmaIonEnergy: float = ...,
+        ionExponent: float = ...,
+        oxySputterYield: float = ...,
+        polySputterYield: float = ...,
+        etchStopDepth: float = ...,
+    ) -> None: ...
+    @overload
+    def __init__(self, parameters: CF4O2Parameters) -> None: ...
+    def getParameters(self) -> CF4O2Parameters: ...
+    def setParameters(self, arg0: CF4O2Parameters) -> None: ...
+
+class CF4O2Parameters:
+    Ions: CF4O2ParametersIons
+    Mask: CF4O2ParametersMask
+    Passivation: CF4O2ParametersPassivation
+    Si: CF4O2ParametersSi
+    SiGe: CF4O2ParametersSiGe
+    etchStopDepth: float
+    etchantFlux: float
+    fluxIncludeSticking: bool
+    gamma_C: dict[Material, float]
+    gamma_C_oxidized: dict[Material, float]
+    gamma_F: dict[Material, float]
+    gamma_F_oxidized: dict[Material, float]
+    gamma_O: dict[Material, float]
+    gamma_O_passivated: dict[Material, float]
+    ionFlux: float
+    oxygenFlux: float
+    polymerFlux: float
+    def __init__(self) -> None: ...
+
+class CF4O2ParametersIons:
+    exponent: float
+    inflectAngle: float
+    meanEnergy: float
+    minAngle: float
+    n_l: float
+    sigmaEnergy: float
+    def __init__(self) -> None: ...
+
+class CF4O2ParametersMask:
+    A_sp: float
+    Eth_sp: float
+    rho: float
+    def __init__(self) -> None: ...
+
+class CF4O2ParametersPassivation:
+    A_C_ie: float
+    A_O_ie: float
+    Eth_C_ie: float
+    Eth_O_ie: float
+    def __init__(self) -> None: ...
+
+class CF4O2ParametersSi:
+    A_ie: float
+    A_sp: float
+    Eth_ie: float
+    Eth_sp: float
+    beta_sigma: float
+    k_sigma: float
+    rho: float
+    def __init__(self) -> None: ...
+
+class CF4O2ParametersSiGe:
+    A_ie: float
+    A_sp: float
+    Eth_ie: float
+    Eth_sp: float
+    beta_sigma: float
+    k_sigma: float
+    rho: float
+    x: float
+    def __init__(self) -> None: ...
+    def k_sigma_SiGe(self, arg0: float) -> float: ...
+
 class DirectionalEtching(ProcessModel):
     @overload
     def __init__(
@@ -377,6 +463,7 @@ class HoleShape:
 class IBEParameters:
     exponent: float
     inflectAngle: float
+    materialPlaneWaferRate: dict[Material, float]
     meanEnergy: float
     minAngle: float
     n_l: float
@@ -618,6 +705,7 @@ class Material:
     Dielectric: ClassVar[Material] = ...
     GAS: ClassVar[Material] = ...
     GaN: ClassVar[Material] = ...
+    HfO2: ClassVar[Material] = ...
     Mask: ClassVar[Material] = ...
     Metal: ClassVar[Material] = ...
     PolySi: ClassVar[Material] = ...
@@ -867,6 +955,8 @@ class SF6O2ParametersIons:
     minAngle: float
     n_l: float
     sigmaEnergy: float
+    thetaRMin: float
+    thetaRMax: float
     def __init__(self) -> None: ...
 
 class SF6O2ParametersMask:

viennaps3d/viennaps3d/gpu.pyi

@@ -0,0 +1,60 @@
+import viennals3d.viennals3d
+import viennaps3d.viennaps3d
+from typing import Callable, overload
+
+class Context:
+    deviceID: int
+    def __init__(self) -> None: ...
+    def addModule(self, arg0: str) -> None: ...
+    def create(self, modulePath: Path = ..., deviceID: int = ...) -> None: ...
+    def destroy(self) -> None: ...
+
+class MultiParticleProcess(ProcessModel):
+    def __init__(self) -> None: ...
+    def addIonParticle(self, sourcePower: float, thetaRMin: float = ..., thetaRMax: float = ..., minAngle: float = ..., B_sp: float = ..., meanEnergy: float = ..., sigmaEnergy: float = ..., thresholdEnergy: float = ..., inflectAngle: float = ..., n: float = ..., label: str = ...) -> None: ...
+    @overload
+    def addNeutralParticle(self, stickingProbability: float, label: str = ...) -> None: ...
+    @overload
+    def addNeutralParticle(self, materialSticking: dict[viennaps3d.viennaps3d.Material, float], defaultStickingProbability: float = ..., label: str = ...) -> None: ...
+    def setRateFunction(self, arg0: Callable[[list[float], viennaps3d.viennaps3d.Material], float]) -> None: ...
+
+class Path:
+    def __init__(self, arg0: str) -> None: ...
+
+class Process:
+    @overload
+    def __init__(self, context: Context) -> None: ...
+    @overload
+    def __init__(self, context: Context, domain: viennaps3d.viennaps3d.Domain, model: ProcessModel, duration: float) -> None: ...
+    def apply(self) -> None: ...
+    def calculateFlux(self) -> viennals3d.viennals3d.Mesh: ...
+    def disableAdvectionVelocityOutput(self) -> None: ...
+    def disableRandomSeeds(self) -> None: ...
+    def enableAdvectionVelocityOutput(self) -> None: ...
+    def enableRandomSeeds(self) -> None: ...
+    def getAdvectionParameters(self) -> viennaps3d.viennaps3d.AdvectionParameters: ...
+    def getProcessDuration(self) -> float: ...
+    def getRayTracingParameters(self) -> viennaps3d.viennaps3d.RayTracingParameters: ...
+    def setAdvectionParameters(self, arg0: viennaps3d.viennaps3d.AdvectionParameters) -> None: ...
+    def setDomain(self, arg0: viennaps3d.viennaps3d.Domain) -> None: ...
+    def setIntegrationScheme(self, arg0) -> None: ...
+    def setMaxCoverageInitIterations(self, arg0: int) -> None: ...
+    def setNumberOfRaysPerPoint(self, arg0: int) -> None: ...
+    def setProcessDuration(self, arg0: float) -> None: ...
+    def setProcessModel(self, arg0: ProcessModel) -> None: ...
+    def setRayTracingParameters(self, arg0: viennaps3d.viennaps3d.RayTracingParameters) -> None: ...
+    def setTimeStepRatio(self, arg0: float) -> None: ...
+
+class ProcessModel:
+    def __init__(self, *args, **kwargs) -> None: ...
+
+class SF6O2Etching(viennaps3d.viennaps3d.ProcessModel):
+    def __init__(self, parameters: viennaps3d.viennaps3d.SF6O2Parameters) -> None: ...
+
+class SingleParticleProcess(ProcessModel):
+    @overload
+    def __init__(self, rate: float = ..., stickingProbability: float = ..., sourceExponent: float = ..., maskMaterial: viennaps3d.viennaps3d.Material = ...) -> None: ...
+    @overload
+    def __init__(self, rate: float, stickingProbability: float, sourceExponent: float, maskMaterials: list[viennaps3d.viennaps3d.Material]) -> None: ...
+    @overload
+    def __init__(self, materialRates: dict[viennaps3d.viennaps3d.Material, float], stickingProbability: float, sourceExponent: float) -> None: ...

viennaps3d/viennaps3d.pyi

@@ -61,6 +61,92 @@ class BoxDistribution(ProcessModel):
     @overload
     def __init__(self, halfAxes, gridDelta: float) -> None: ...
 
+class CF4O2Etching(ProcessModel):
+    @overload
+    def __init__(self) -> None: ...
+    @overload
+    def __init__(
+        self,
+        ionFlux: float,
+        etchantFlux: float,
+        oxygenFlux: float,
+        polymerFlux: float,
+        meanIonEnergy: float = ...,
+        sigmaIonEnergy: float = ...,
+        ionExponent: float = ...,
+        oxySputterYield: float = ...,
+        polySputterYield: float = ...,
+        etchStopDepth: float = ...,
+    ) -> None: ...
+    @overload
+    def __init__(self, parameters: CF4O2Parameters) -> None: ...
+    def getParameters(self) -> CF4O2Parameters: ...
+    def setParameters(self, arg0: CF4O2Parameters) -> None: ...
+
+class CF4O2Parameters:
+    Ions: CF4O2ParametersIons
+    Mask: CF4O2ParametersMask
+    Passivation: CF4O2ParametersPassivation
+    Si: CF4O2ParametersSi
+    SiGe: CF4O2ParametersSiGe
+    etchStopDepth: float
+    etchantFlux: float
+    fluxIncludeSticking: bool
+    gamma_C: dict[Material, float]
+    gamma_C_oxidized: dict[Material, float]
+    gamma_F: dict[Material, float]
+    gamma_F_oxidized: dict[Material, float]
+    gamma_O: dict[Material, float]
+    gamma_O_passivated: dict[Material, float]
+    ionFlux: float
+    oxygenFlux: float
+    polymerFlux: float
+    def __init__(self) -> None: ...
+
+class CF4O2ParametersIons:
+    exponent: float
+    inflectAngle: float
+    meanEnergy: float
+    minAngle: float
+    n_l: float
+    sigmaEnergy: float
+    def __init__(self) -> None: ...
+
+class CF4O2ParametersMask:
+    A_sp: float
+    Eth_sp: float
+    rho: float
+    def __init__(self) -> None: ...
+
+class CF4O2ParametersPassivation:
+    A_C_ie: float
+    A_O_ie: float
+    Eth_C_ie: float
+    Eth_O_ie: float
+    def __init__(self) -> None: ...
+
+class CF4O2ParametersSi:
+    A_ie: float
+    A_sp: float
+    Eth_ie: float
+    Eth_sp: float
+    beta_sigma: float
+    k_sigma: float
+    rho: float
+    def __init__(self) -> None: ...
+
+class CF4O2ParametersSiGe:
+    A_ie: float
+    A_sp: float
+    Eth_ie: float
+    Eth_sp: float
+    beta_sigma: float
+    k_sigma: float
+    rho: float
+    x: float
+    def __init__(self) -> None: ...
+    def k_sigma_SiGe(self, arg0: float) -> float: ...
+
 class DirectionalEtching(ProcessModel):
     @overload
     def __init__(
@@ -334,6 +420,7 @@ class HoleShape:
 class IBEParameters:
     exponent: float
     inflectAngle: float
+    materialPlaneWaferRate: dict[Material, float]
     meanEnergy: float
     minAngle: float
     n_l: float
@@ -575,6 +662,7 @@ class Material:
     Dielectric: ClassVar[Material] = ...
     GAS: ClassVar[Material] = ...
     GaN: ClassVar[Material] = ...
+    HfO2: ClassVar[Material] = ...
     Mask: ClassVar[Material] = ...
     Metal: ClassVar[Material] = ...
     PolySi: ClassVar[Material] = ...
@@ -824,6 +912,8 @@ class SF6O2ParametersIons:
     minAngle: float
     n_l: float
     sigmaEnergy: float
+    thetaRMin: float
+    thetaRMax: float
     def __init__(self) -> None: ...
 
 class SF6O2ParametersMask: