ViennaPS 3.2.0__cp312-cp312-macosx_11_0_arm64.whl → 3.4.0__cp312-cp312-macosx_11_0_arm64.whl

viennaps-3.4.0.dist-info/METADATA

@@ -0,0 +1,292 @@
+Metadata-Version: 2.2
+Name: ViennaPS
+Version: 3.4.0
+Summary: Semiconductor fabrication process simulation library
+License: Parts of the code (located in the 'external/' subfolder) have different
+         licenses. The individual licenses apply for this specific part. Please consult
+         the respective LICENSE files.
+         
+         
+         Copyright (c) 2015      Institute for Microelectronics, TU Wien.
+         
+         Permission is hereby granted, free of charge, to any person obtaining a copy
+         of this software and associated documentation files (the "Software"), to deal
+         in the Software without restriction, including without limitation the rights
+         to use, copy, modify, merge, publish, distribute, sublicense, and/or sell
+         copies of the Software, and to permit persons to whom the Software is
+         furnished to do so, subject to the following conditions:
+         
+         The above copyright notice and this permission notice shall be included in
+         all copies or substantial portions of the Software.
+         
+         THE SOFTWARE IS PROVIDED "AS IS", WITHOUT WARRANTY OF ANY KIND, EXPRESS OR
+         IMPLIED, INCLUDING BUT NOT LIMITED TO THE WARRANTIES OF MERCHANTABILITY,
+         FITNESS FOR A PARTICULAR PURPOSE AND NONINFRINGEMENT. IN NO EVENT SHALL THE
+         AUTHORS OR COPYRIGHT HOLDERS BE LIABLE FOR ANY CLAIM, DAMAGES OR OTHER
+         LIABILITY, WHETHER IN AN ACTION OF CONTRACT, TORT OR OTHERWISE, ARISING FROM,
+         OUT OF OR IN CONNECTION WITH THE SOFTWARE OR THE USE OR OTHER DEALINGS IN
+         THE SOFTWARE.
+         
+Project-URL: Homepage, https://viennatools.github.io/ViennaPS/
+Project-URL: Documentation, https://viennatools.github.io/ViennaPS/
+Project-URL: Repository, https://github.com/ViennaTools/ViennaPS
+Project-URL: Issues, https://github.com/ViennaTools/ViennaPS/issues
+Requires-Dist: ViennaLS>=4.3.0
+Description-Content-Type: text/markdown
+
+<div align="center">
+
+![](assets/logo.png)
+
+<h1>ViennaPS - Process Simulation Library</h1>
+
+[![🐍 Build Bindings](https://github.com/ViennaTools/ViennaPS/actions/workflows/python.yml/badge.svg)](https://github.com/ViennaTools/ViennaPS/actions/workflows/python.yml)
+[![🧪 Run Tests](https://github.com/ViennaTools/ViennaPS/actions/workflows/build.yml/badge.svg)](https://github.com/ViennaTools/ViennaPS/actions/workflows/build.yml)
+[![PyPi Version](https://img.shields.io/pypi/v/ViennaPS?logo=pypi)](https://pypi.org/project/ViennaPS/)
+
+</div>
+
+ViennaPS is a header-only C++ library for simulating microelectronic fabrication processes. It combines surface and volume representations with advanced level-set methods and Monte Carlo flux calculations, powered by high-performance ray tracing. Users can develop custom models, use pre-configured physical models, or leverage emulation for flexible and efficient process simulations.
+
+ViennaPS is designed to be easily integrated into existing C++ projects and provides Python bindings for seamless use in Python environments. The library is under active development and is continuously improved to meet the evolving needs of process simulation in microelectronics.
+
+> [!NOTE]  
+> ViennaPS is under heavy development and improved daily. If you do have suggestions or find bugs, please let us know!
+
+## Quick Start  
+
+To install ViennaPS for Python, simply run:  
+
+```sh
+pip install ViennaPS
+```
+
+To use ViennaPS in C++, clone the repository and follow the installation steps below.
+
+For full documentation, visit [ViennaPS Documentation](https://viennatools.github.io/ViennaPS/).
+
+## Releases
+Releases are tagged on the master branch and available in the [releases section](https://github.com/ViennaTools/ViennaPS/releases).
+
+ViennaPS is also available on the [Python Package Index (PyPI)](https://pypi.org/project/ViennaPS/) for most platforms.  
+
+## Building
+
+### Supported Operating Systems
+
+* Linux (g++ / clang)
+
+* macOS (XCode)
+
+* Windows (Visual Studio)
+
+### System Requirements
+
+* C++17 Compiler with OpenMP support
+
+### Dependencies (installed automatically)
+
+* [ViennaCore](https://github.com/ViennaTools/viennacore) >= 1.2.0
+
+* [ViennaLS](https://github.com/ViennaTools/viennals) >= 4.2.1
+  * [ViennaHRLE](https://github.com/ViennaTools/viennahrle) >= 0.5.0
+  * [VTK](https://vtk.org/) >= 9.0.0
+
+* [ViennaRay](https://github.com/ViennaTools/viennaray) >= 3.1.4
+  * [Embree](https://www.embree.org/) >= 4.0.0
+
+* [ViennaCS](https://github.com/ViennaTools/viennacs) >= 1.0.0
+
+* [pybind11](https://github.com/pybind/pybind11) >= 2.12.0 (only for building Python libs)
+
+The CMake configuration automatically checks if the dependencies are installed.
+If the dependencies are not found on the system, they will be built from source. To use local installations of the dependencies, the `VIENNAPS_LOOKUP_DIRS` variable can be set to the installation path of the dependencies.
+
+## Installing
+
+> [!NOTE]  
+> __For more detailed installation instructions and troubleshooting tips, please refer to the ViennaPS [documentation](https://viennatools.github.io/ViennaPS/inst/).__
+
+ViennaPS is a header-only library, so no formal installation is required. However, following the steps below helps organize and manage dependencies more effectively:
+
+```bash
+git clone https://github.com/ViennaTools/ViennaPS.git
+cd ViennaPS
+
+cmake -B build && cmake --build build
+cmake --install build --prefix "/path/to/your/custom/install/"
+```
+
+This will install the necessary headers and CMake files to the specified path. If `--prefix` is not specified, it will be installed to the standard path for your system, usually `/usr/local/` . 
+
+## Building the Python package
+
+The Python package can be built and installed using the `pip` command:
+
+```bash
+git clone https://github.com/ViennaTools/ViennaPS.git
+cd ViennaPS
+
+pip install .
+```
+
+> Some features of the ViennaPS Python module require the ViennaLS Python module. It is therefore recommended to additionally install the ViennaLS Python module on your system. Instructions to do so can be found in the [ViennaLS Git Repository](https://github.com/ViennaTools/viennals).
+
+## Using the Python package
+
+The 2D version of the library can be imported as follows:
+```python
+import viennaps2d as vps
+```
+
+In order to switch to three dimensions, only the import needs to be changed:
+
+```python
+import viennaps3d as vps
+```
+
+## Integration in CMake projects
+
+We recommend using [CPM.cmake](https://github.com/cpm-cmake/CPM.cmake) to consume this library.
+
+* Installation with CPM
+  ```cmake
+  CPMAddPackage("gh:viennatools/viennaps@3.4.0")
+  ```
+
+* With a local installation
+    > In case you have ViennaPS installed in a custom directory, make sure to properly specify the [`CMAKE_PREFIX_PATH`](https://cmake.org/cmake/help/latest/envvar/CMAKE_PREFIX_PATH.html#envvar:CMAKE_PREFIX_PATH).
+
+    ```cmake
+    list(APPEND CMAKE_PREFIX_PATH "/your/local/installation")
+
+    find_package(ViennaPS)
+    target_link_libraries(${PROJECT_NAME} PUBLIC ViennaTools::ViennaPS)
+    ```
+
+## GPU Acceleration (Experimental)
+
+As of version 3.4.0, ViennaPS supports GPU acceleration for the ray tracing part of the library. This feature is still experimental and may not work on all systems. Details on how to enable GPU functionality can be found in the [documentation](https://viennatools.github.io/ViennaPS/inst/).
+
+## Basic Examples
+
+### Building
+
+The examples can be built using CMake:
+> __Important__: Make sure all dependencies are installed and have been built previously
+
+```bash
+git clone https://github.com/ViennaTools/ViennaPS.git
+cd ViennaPS
+
+cmake -B build -DVIENNAPS_BUILD_EXAMPLES=ON
+cmake --build build
+```
+
+The examples can then be executed in their respective build folders with the config files, e.g.:
+```bash
+cd examples/exampleName
+./exampleName.bat config.txt # (Windows)
+./exampleName config.txt # (Other)
+```
+
+Individual examples can also be build by calling `make` in their respective build folder. An equivalent Python script, using the ViennaPS Python bindings, is also given for each example. 
+
+### Trench Deposition
+
+This [example](https://github.com/ViennaTools/ViennaPS/tree/master/examples/trenchDeposition) focuses on a particle deposition process within a trench geometry. By default, the simulation presents a 2D representation of the trench. Nevertheless, users have the flexibility to conduct 3D simulations by adjusting the value of the constant _D_ in __trenchDeposition.cpp__ to 3. Customization of process and geometry parameters is achieved through the __config.txt__ file. The accompanying image illustrates instances of the trench deposition process, showcasing variations in the particle sticking probability _s_.
+
+<div align="center">
+  <img src="assets/deposition.svg" width=700 style="background-color:white;">
+</div>
+
+### SF<sub>6</sub>O<sub>2</sub> Hole Etching
+
+This [example](https://github.com/ViennaTools/ViennaPS/tree/master/examples/holeEtching) demonstrates a hole etching process with a SF<sub>6</sub>O<sub>2</sub> plasma etching chemistry with ion bombardment. The process is controlled by various parameters, including geometry and plasma conditions, which can be adjusted in the __config.txt__ file.
+
+The image presents the results of different flux configurations, as tested in _testFluxes.py_. Each structure represents a variation in flux conditions, leading to differences in hole shape, depth, and profile characteristics. The variations highlight the influence of ion and neutral fluxes on the etching process.
+
+> [!NOTE] 
+> The underlying model may change in future releases, so running this example in newer versions of ViennaPS might not always reproduce exactly the same results.  
+> The images shown here were generated using **ViennaPS v3.3.0**.
+
+<div align="center">
+  <img src="assets/sf6o2_results.png" width=700 style="background-color:white;">
+</div>
+
+### Bosch Process
+
+This [example](https://github.com/ViennaTools/ViennaPS/tree/master/examples/boschProcess) compares different approaches to simulating the Bosch process, a deep reactive ion etching (DRIE) technique. The three structures illustrate how different modeling methods influence the predicted etch profile.
+
+- Left: The structure generated through process emulation, which captures the characteristic scalloping effect of the Bosch process in a simplified yet effective way.
+- Middle: The result of a simple simulation model, which approximates the etching dynamics but may lack finer physical details.
+- Right: The outcome of a more physical simulation model, leading to a more realistic etch profile.
+  
+This comparison highlights the trade-offs between computational efficiency and physical accuracy in DRIE simulations.
+
+<div align="center">
+  <img src="assets/bosch_process.png" width=700 style="background-color:white;">
+</div>
+
+
+### Anisotropic Processes
+
+In the anisotropic process model, the etch or deposition rates are dependent on the crystallographic directions of the surface. This enables the accurate modeling of intricate processes like [epitaxial growth](https://github.com/ViennaTools/ViennaPS/tree/master/examples/selectiveEpitaxy) or [anisotropic wet etching](https://github.com/ViennaTools/ViennaPS/tree/master/examples/cantileverWetEtching). Basic examples, illustrating these processes are provided with the library and shown below.
+
+<div align="center">
+  <img src="assets/anisotropic_process.svg" width=700 style="background-color:white;">
+</div>
+
+### Redeposition During Selective Etching
+
+This [example](https://github.com/ViennaTools/ViennaPS/tree/master/examples/oxideRegrowth) demonstrates capturing etching byproducts and the subsequent redeposition during a selective etching process in a Si<sub>3</sub>N<sub>4</sub>/SiO<sub>2</sub> stack. The etching byproducts are captured in a cell set description of the etching plasma. To model the dynamics of these etching byproducts, a convection-diffusion equation is solved on the cell set using finite differences. The redeposition is then captured by adding up the byproducts in every step and using this information to generate a velocity field on the etched surface. 
+
+<div align="center">
+  <img src="assets/redeposition.gif" width=700 style="background-color:white;">
+</div>
+
+### GDS Mask Import Example
+
+This [example](https://github.com/ViennaTools/ViennaPS/tree/master/examples/GDSReader) tests the full GDS mask import, blurring, rotation, scaling, and flipping as well as the level set conversion pipeline. Shown below is the result after applying proximity correction and extrusion on a simple test.
+
+<div align="center">
+  <img src="assets/masks.png" width=1200 style="background-color:white;">
+</div>
+
+
+
+## Tests
+
+ViennaPS uses CTest to run its tests. In order to check whether ViennaPS runs without issues on your system, you can run:
+
+```bash
+git clone https://github.com/ViennaTools/ViennaPS.git
+cd ViennaPS
+
+cmake -B build -DVIENNAPS_BUILD_TESTS=ON
+cmake --build build
+ctest -E "Benchmark|Performance" --test-dir build
+```
+
+## Contributing
+
+If you want to contribute to ViennaPS, make sure to follow the [LLVM Coding guidelines](https://llvm.org/docs/CodingStandards.html).
+
+Make sure to format all files before creating a pull request:
+```bash
+cmake -B build
+cmake --build build --target format
+```
+
+## Authors
+
+Current contributors: Tobias Reiter, Lado Filipovic, Roman Kostal, Noah Karnel
+
+Contact us via: viennatools@iue.tuwien.ac.at
+
+ViennaPS was developed under the aegis of the 'Institute for Microelectronics' at the 'TU Wien'.
+http://www.iue.tuwien.ac.at/
+
+License
+--------------------------
+See file LICENSE in the base directory.

{viennaps-3.2.0.dist-info → viennaps-3.4.0.dist-info}/RECORD

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