ViennaPS 3.0.1__cp311-cp311-macosx_11_0_arm64.whl

viennaps-3.0.1.dist-info/METADATA

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+Metadata-Version: 2.1
+Name: ViennaPS
+Version: 3.0.1
+Summary: Semiconductor fabrication process simulation library
+License: Parts of the code (located in the 'external/' subfolder) have different
+        licenses. The individual licenses apply for this specific part. Please consult
+        the respective LICENSE files.
+        
+        
+        Copyright (c) 2015      Institute for Microelectronics, TU Wien.
+        
+        Permission is hereby granted, free of charge, to any person obtaining a copy
+        of this software and associated documentation files (the "Software"), to deal
+        in the Software without restriction, including without limitation the rights
+        to use, copy, modify, merge, publish, distribute, sublicense, and/or sell
+        copies of the Software, and to permit persons to whom the Software is
+        furnished to do so, subject to the following conditions:
+        
+        The above copyright notice and this permission notice shall be included in
+        all copies or substantial portions of the Software.
+        
+        THE SOFTWARE IS PROVIDED "AS IS", WITHOUT WARRANTY OF ANY KIND, EXPRESS OR
+        IMPLIED, INCLUDING BUT NOT LIMITED TO THE WARRANTIES OF MERCHANTABILITY,
+        FITNESS FOR A PARTICULAR PURPOSE AND NONINFRINGEMENT. IN NO EVENT SHALL THE
+        AUTHORS OR COPYRIGHT HOLDERS BE LIABLE FOR ANY CLAIM, DAMAGES OR OTHER
+        LIABILITY, WHETHER IN AN ACTION OF CONTRACT, TORT OR OTHERWISE, ARISING FROM,
+        OUT OF OR IN CONNECTION WITH THE SOFTWARE OR THE USE OR OTHER DEALINGS IN
+        THE SOFTWARE.
+Project-URL: Homepage, https://viennatools.github.io/ViennaPS/
+Project-URL: Documentation, https://viennatools.github.io/ViennaPS/
+Project-URL: Repository, https://github.com/ViennaTools/ViennaPS
+Project-URL: Issues, https://github.com/ViennaTools/ViennaPS/issues
+Requires-Dist: ViennaLS
+Description-Content-Type: text/markdown
+
+<div align="center">
+
+![](assets/logo.png)
+
+<h1>ViennaPS - Process Simulation Library</h1>
+
+[![🐍 Build Bindings](https://github.com/ViennaTools/ViennaPS/actions/workflows/python.yml/badge.svg)](https://github.com/ViennaTools/ViennaPS/actions/workflows/python.yml)
+[![🧪 Run Tests](https://github.com/ViennaTools/ViennaPS/actions/workflows/build.yml/badge.svg)](https://github.com/ViennaTools/ViennaPS/actions/workflows/build.yml)
+
+</div>
+
+ViennaPS is a header-only C++ process simulation library, which includes surface and volume representations, a ray tracer, and physical models for the simulation of microelectronic fabrication processes. This library seamlessly integrates advanced level-set functionalities with top-down Monte Carlo flux calculations, powered by state-of-the-art ray tracing techniques. This combination brings a new level of accuracy and efficiency to process simulations, empowering engineers and researchers to model complex systems.
+
+> [!NOTE]  
+> ViennaPS is under heavy development and improved daily. If you do have suggestions or find bugs, please let us know!
+
+## Releases
+Releases are tagged on the master branch and available in the [releases section](https://github.com/ViennaTools/ViennaPS/releases).
+
+## Building
+
+### Supported Operating Systems
+
+* Linux (g++ / clang)
+
+* macOS (XCode)
+
+* Windows (Visual Studio)
+
+### System Requirements
+
+* C++17 Compiler with OpenMP support
+
+### Dependencies (installed automatically)
+
+* [ViennaCore](https://github.com/ViennaTools/viennacore) >= 1.0.0
+
+* [ViennaLS](https://github.com/ViennaTools/viennals) >= 4.0.0
+  * [ViennaHRLE](https://github.com/ViennaTools/viennahrle) >= 0.4.0
+  * [VTK](https://vtk.org/) >= 9.0.0
+
+* [ViennaRay](https://github.com/ViennaTools/viennaray) >= 3.0.1
+  * [Embree](https://www.embree.org/) >= 4.0.0
+
+* [ViennaCS](https://github.com/ViennaTools/viennacs) >= 1.0.0
+
+* [pybind11](https://github.com/pybind/pybind11) >= 2.12.0 (only for building Python libs)
+
+The CMake configuration automatically checks if the dependencies are installed.
+If the dependencies are not found on the system, they will be built from source. To use local installations of the dependencies, the `VIENNAPS_LOOKUP_DIRS` variable can be set to the installation path of the dependencies.
+
+## Installing
+
+> [!NOTE]  
+> __For more detailed installation instructions and troubleshooting tips, please refer to the ViennaPS [documentation](https://viennatools.github.io/ViennaPS/inst/).__
+
+ViennaPS operates as a header-only library, eliminating the need for a formal installation process. Nonetheless, we advise following the procedure to neatly organize and relocate all header files to a designated directory:
+
+```bash
+git clone https://github.com/ViennaTools/ViennaPS.git
+cd ViennaPS
+
+cmake -B build && cmake --build build
+cmake --install build --prefix "/path/to/your/custom/install/"
+```
+
+This will install the necessary headers and CMake files to the specified path. If `--prefix` is not specified, it will be installed to the standard path for your system, usually `/usr/local/` . 
+
+## Building the Python package
+
+The Python package can be built and installed using the `pip` command:
+
+```bash
+git clone https://github.com/ViennaTools/ViennaPS.git
+cd ViennaPS
+
+pip install .
+```
+
+> Some functionalities of the ViennaPS Python module only work in combination with the ViennaLS Python module. It is therefore recommended to additionally install the ViennaLS Python module on your system. Instructions to do so can be found in the [ViennaLS Git Repository](https://github.com/ViennaTools/viennals).
+
+## Using the Python package
+
+The 2D version of the library can be imported as follows:
+```python
+import viennaps2d as vps
+```
+
+In order to switch to three dimensions, only the import needs to be changed:
+
+```python
+import viennaps3d as vps
+```
+
+## Integration in CMake projects
+
+We recommend using [CPM.cmake](https://github.com/cpm-cmake/CPM.cmake) to consume this library.
+
+* Installation with CPM
+  ```cmake
+  CPMAddPackage("gh:viennatools/viennaps@3.0.1")
+  ```
+
+* With a local installation
+    > In case you have ViennaPS installed in a custom directory, make sure to properly specify the [`CMAKE_PREFIX_PATH`](https://cmake.org/cmake/help/latest/envvar/CMAKE_PREFIX_PATH.html#envvar:CMAKE_PREFIX_PATH).
+
+    ```cmake
+    list(APPEND CMAKE_PREFIX_PATH "/your/local/installation")
+
+    find_package(ViennaPS)
+    target_link_libraries(${PROJECT_NAME} PUBLIC ViennaTools::ViennaPS)
+    ```
+
+## Basic Examples
+
+### Building
+
+The examples can be built using CMake:
+> __Important__: Make sure all dependencies are installed and have been built previously
+
+```bash
+git clone https://github.com/ViennaTools/ViennaPS.git
+cd ViennaPS
+
+cmake -B build -DVIENNAPS_BUILD_EXAMPLES=ON
+cmake --build build
+```
+
+The examples can then be executed in their respective build folders with the config files, e.g.:
+```bash
+cd examples/exampleName
+./ExampleName.bat config.txt # (Windows)
+./ExampleName config.txt # (Other)
+```
+
+Individual examples can also be build by calling `make` in their respective build folder. An equivalent Python script, using the ViennaPS Python bindings, is also given for each example. 
+
+### Trench Deposition
+
+This example focuses on a particle deposition process within a trench geometry. By default, the simulation presents a 2D representation of the trench. Nevertheless, users have the flexibility to conduct 3D simulations by adjusting the value of the constant _D_ in __trenchDeposition.cpp__ to 3. Customization of process and geometry parameters is achieved through the __config.txt__ file. The accompanying image illustrates instances of the trench deposition process, showcasing variations in the particle sticking probability _s_.
+
+<div align="center">
+  <img src="assets/deposition.svg" width=700 style="background-color:white;">
+</div>
+
+### SF<sub>6</sub>O<sub>2</sub> Hole Etching
+
+This example demonstrates a hole etching process with a SF<sub>6</sub>O<sub>2</sub> plasma etching chemistry with ion bombardment. The process and geometry parameters can be varied in the __config.txt__ file. 
+Below the results after 10, 20, and 30 seconds of etching are shown.
+
+<div align="center">
+  <img src="assets/hole_etching.svg" width=700 style="background-color:white;">
+</div>
+
+By changing the dimension of the hole etching example (_D = 2_), we can easily simulate the profile of a trench etching process with the same plasma chemistry. Here we can, for example, vary the mask tapering angle to observe increased micro-trenching, as shown below.
+
+<div align="center">
+  <img src="assets/sidewall_tapering.svg" width=700 style="background-color:white;">
+</div>
+
+### Anisotropic Processes
+
+In the anisotropic process model, the etch or deposition rates are dependent on the crystallographic directions of the surface. This enables the accurate modeling of intricate processes like epitaxial growth or anisotropic wet etching. Basic examples, illustrating these processes are provided with the library and shown below.
+
+<div align="center">
+  <img src="assets/anisotropic_process.svg" width=700 style="background-color:white;">
+</div>
+
+### Redeposition During Selective Etching
+
+This example demonstrates capturing etching byproducts and the subsequent redeposition during a selective etching process in a Si<sub>3</sub>N<sub>4</sub>/SiO<sub>2</sub> stack. The etching byproducts are captured in a cell set description of the etching plasma. To model the dynamics of these etching byproducts, a convection-diffusion equation is solved on the cell set using finite differences. The redeposition is then captured by adding up the byproducts in every step and using this information to generate a velocity field on the etched surface. 
+
+<div align="center">
+  <img src="assets/redeposition.gif" width=700 style="background-color:white;">
+</div>
+
+## Tests
+
+ViennaPS uses CTest to run its tests. In order to check whether ViennaPS runs without issues on your system, you can run:
+
+```bash
+git clone https://github.com/ViennaTools/ViennaPS.git
+cd ViennaPS
+
+cmake -B build -DVIENNAPS_BUILD_TESTS=ON
+cmake --build build
+ctest -E "Benchmark|Performance" --test-dir build
+```
+
+## Application
+
+> [!WARNING] 
+> The ViennaPS application is no longer updated with new functionalities added to ViennaPS after release 1.2.0. Please use the Python bindings instead.
+
+It is also possible to build an application which can parse a custom configuration file and execute pre-defined processes. The application can be built using CMake:
+
+```bash
+git clone https://github.com/ViennaTools/ViennaPS.git
+cd ViennaPS
+
+cmake -B build -DVIENNAPS_BUILD_APPLICATION=ON
+cmake --build build
+```
+
+This creates 2 executables `ViennaPS2D` and `ViennaPS3D` which run processes in 2 or 3 dimensions respectively. Every configuration file can be run in 2D or 3D mode.
+
+The configuration file must obey a certain structure in order to be parsed correctly. An example for a configuration file can be seen in `SampleConfig.txt`. The configuration file is parsed line by line and each successfully parsed line is executed immediately. A detailed documentation for the configuration file can be found in the [app readme](app/README.md).
+
+## Contributing
+
+If you want to contribute to ViennaCS, make sure to follow the [LLVM Coding guidelines](https://llvm.org/docs/CodingStandards.html).
+
+Make sure to format all files before creating a pull request:
+```bash
+cmake -B build
+cmake --build build --target format
+```
+
+## Authors
+
+Current contributors: Tobias Reiter, Noah Karnel, Julius Piso
+
+Contact us via: viennatools@iue.tuwien.ac.at
+
+ViennaPS was developed under the aegis of the 'Institute for Microelectronics' at the 'TU Wien'.
+http://www.iue.tuwien.ac.at/
+
+License
+--------------------------
+See file LICENSE in the base directory.

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viennaps-3.0.1.dist-info/licenses/LICENSE

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+Parts of the code (located in the 'external/' subfolder) have different
+licenses. The individual licenses apply for this specific part. Please consult
+the respective LICENSE files.
+
+
+Copyright (c) 2015      Institute for Microelectronics, TU Wien.
+
+Permission is hereby granted, free of charge, to any person obtaining a copy
+of this software and associated documentation files (the "Software"), to deal
+in the Software without restriction, including without limitation the rights
+to use, copy, modify, merge, publish, distribute, sublicense, and/or sell
+copies of the Software, and to permit persons to whom the Software is
+furnished to do so, subject to the following conditions:
+
+The above copyright notice and this permission notice shall be included in
+all copies or substantial portions of the Software.
+
+THE SOFTWARE IS PROVIDED "AS IS", WITHOUT WARRANTY OF ANY KIND, EXPRESS OR
+IMPLIED, INCLUDING BUT NOT LIMITED TO THE WARRANTIES OF MERCHANTABILITY,
+FITNESS FOR A PARTICULAR PURPOSE AND NONINFRINGEMENT. IN NO EVENT SHALL THE
+AUTHORS OR COPYRIGHT HOLDERS BE LIABLE FOR ANY CLAIM, DAMAGES OR OTHER
+LIABILITY, WHETHER IN AN ACTION OF CONTRACT, TORT OR OTHERWISE, ARISING FROM,
+OUT OF OR IN CONNECTION WITH THE SOFTWARE OR THE USE OR OTHER DEALINGS IN
+THE SOFTWARE.